weekend writing

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        \item $0,18\mum$ CMOS-Prozess
 \end{itemize}
 
-Von Hybridpixeln bekannt ist die verbesserte nicht-ionisierende Strahlenhärte in hochohmigen Sensoren. Durch die Drift in der verarmten Zone gehen weniger Ladungsträger durch Rekombinationen verloren. CMOS-MAPS konnten allerdings bisher nur mit kommerziell verfügbaren, niedrigohmige Wafer hergestellt werden. Ab 2009 ergab sich die Möglichkeit CMOS-MAPS mit einer hochohmigen Epitaxieschicht herzustellen. Eine vorausgegangene explorative Studie \cite{DevMi25paper} gab erste Hinweise auf eine verbesserte nicht-ionisierende Strahlenhärte. Die Fragestellung dieser Doktorarbeit ist daran anknüpfend, welche Eigenschaften diese hochohmigen MAPS haben und insbesondere, wie groß ihre nicht-ionisierende Strahlenhärte ist und von welchen Parametern diese abhängt. Um dies nachzuweisen, wird, nach im Rahmen dieser Doktorarbeit die nicht-ionisierende Strahlenhärte von Prototypsensoren mit hochohmiger Epitaxieschicht systematisch quantifiziert. Aufgrund dieser Ergebnisse hat sich die Verwendung der hochohmigen Epitaxieschicht als neuer Standard in der Anwendung als Vertexdetektor etabliert.\newline
+Von Hybridpixeln bekannt ist die verbesserte nicht-ionisierende Strahlenhärte in hochohmigen Sensoren. Durch die Drift in der verarmten Zone gehen weniger Ladungsträger durch Rekombinationen verloren. CMOS-MAPS konnten allerdings bisher nur mit kommerziell verfügbaren, niedrigohmige Wafer hergestellt werden. Ab 2009 ergab sich die Möglichkeit CMOS-MAPS mit einer hochohmigen Epitaxieschicht herzustellen. Eine vorausgegangene explorative Studie \cite{DevMi25paper} gab erste Hinweise auf eine verbesserte nicht-ionisierende Strahlenhärte. Die Fragestellung dieser Doktorarbeit ist daran anknüpfend, welche Eigenschaften diese hochohmigen MAPS haben und insbesondere, wie groß ihre nicht-ionisierende Strahlenhärte ist und von welchen Parametern diese abhängt. Um dies herauszufinden, wird im Rahmen dieser Doktorarbeit die nicht-ionisierende Strahlenhärte von Prototypsensoren mit hochohmiger Epitaxieschicht systematisch quantifiziert. Aufgrund dieser Ergebnisse hat sich die Verwendung der hochohmigen Epitaxieschicht als neuer Standard in der Anwendung als Vertexdetektor etabliert.\newline
 
-Die ionisierende Strahlenhärte war aufgrund der Strukturengröße von $0,35~\rm \upmu m$ und den hieraus resultierenden dicken Oxidschichten sowie einfachen In-Pixel-Schaltungen ohne Platz für Schutzringe limitiert. Von einem Wechsel zu einem Prozess mit kleinerer Strukturengröße wird erwartet, dass sich nicht nur die ionisierende Strahlenhärte verbessert, sondern auch die kleinere Strukturengröße aufwändigere In-Pixel-Schaltungen ermöglicht. Diese sind notwendig um kurze Auslesezeiten auch für großflächige Sensoren zu erreichen. Hier wurde 2012 ein Industrieprozess verfügbar, der eine Strukturengröße von $0,18~\rm \upmu m$ ermöglicht. Die Fragestellung ist, welche Eigenschaften in diesem Prozess hergestellte MAPS haben und welche ionisierende und nicht-ionisierende Strahlenhärte diese erreichen. Kann ein MAPS mit einer Integrationszeit von $30\mus$ designt werden, der gleichzeitig die ionisierende als auch nicht-ionisierende Strahlenhärteanforderungen von CBM erfüllt? Dazu werden in dieser Doktorarbeit die Ergebnisse der ersten Prototypsensoren im $0,18~\rm \upmu m$-Prozess vorgestellt. Die Resultate sind so vielversprechend, dass die finalen Sensoren für ALICE und CBM vorraussichtlich in diesem neuen $0,18~\rm \upmu m$-Prozess verwirklicht werden.\newline 
+Die Strukturengröße von $0,35~\rm \upmu m$ limitiert die In-Pixelelektronik auf einfache Transistorschaltungen, welche nur eine Integrationszeit von $\sim 100\mus$ für großflächige Sensoren erlauben. Für die Anwendung in den Vertexdetektoren von ALICE und CBM wird allerdings eine Integrationszeit von $\lesssim 30\mus$ gefordert. Hier wurde 2012 ein Industrieprozess verfügbar, der eine kleinere Strukturengröße von $0,18~\rm \upmu m$ hat. In diesem können aufwändigere In-Pixelverstärker und In-Pixeldiskriminatoren verwirklicht werden, was kürzere Integrationszeiten ermöglicht. Ein weiteres Feature des Prozesses ist eine tiefe P-Senke (Deep Pwell), die es erlaubt, PMOS-Transistoren in ein Pixel zu integrieren. Die ionisierende Strahlenhärte war aufgrund der Strukturengröße von $0,35~\rm \upmu m$ und den hieraus resultierenden dicken Oxidschichten sowie einfachen In-Pixel-Schaltungen ohne Platz für Schutzringe limitiert. Von einem Wechsel zu einem Prozess mit kleinerer Strukturengröße wird erwartet, dass sich aufgrund der dünneren Oxidschichten und der Möglichkeit mehr strahlenharte Transistoren zu implementieren, die ionisierende Strahlenhärte sich verbessert. \newline
+Diese Doktorarbeit leistet Beiträge die Eigenschaften von in dem $0,18~\rm \upmu m$ Prozess hergestellten CMOS MAPS zu verstehen und das beste Sensorlayout zu evaluieren. Es soll gezeigt werden, dass in diesem Prozess hergestellte MAPS mit $30\mus$ Integrationszeit sowohl das nicht-ionisierende als auch ionisierende Strahlenhärtedesignziel von CBM an SIS-100 erfüllen.\newline
+Um dies nachzuweisen, werden in dieser Doktorarbeit die Ergebnisse der ersten Prototypsensoren im $0,18~\rm \upmu m$-Prozess untersucht. Die Resultate sind so vielversprechend, dass die finalen Sensoren für ALICE und CBM vorraussichtlich in diesem neuen $0,18~\rm \upmu m$-Prozess verwirklicht werden.\newline 
 
 

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+\@writefile{lof}{\contentsline {figure}{\numberline {2.7}{\ignorespaces Signalentschl\"usselung eines SB-Pixel (kontinuierlich)}}{24}{figure.caption.19}}
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diff --git a/Doering-PHD-Thesis/MAPS.tex b/Doering-PHD-Thesis/MAPS.tex
index f66fcee739097b5daa0dd435cb46d70fefe2284c..731930216126b2a0a32a7b252cbac8bad5c24d0e 100755 (executable)
--- a/Doering-PHD-Thesis/MAPS.tex
+++ b/Doering-PHD-Thesis/MAPS.tex
@@ -21,7 +21,7 @@ Ladungstr
                \caption[Größe der Verarmungszone]{Größe der Verarmungszone als Funktion der Verarmungsspannung für einen niedrigohmigen (rot gepunktete Linie) und hochohmige Epitaxieschicht (schwarze durchgezogene Linie). MIMOSA-26 mit $U_{depl}\approx 0,7~\rm V$ hat bei niedrigohmiger Epitaxieschicht eine Verarmungszone von nur $1-2~\rm \upmu m$, während sie in der hochohmigen Epitaxieschicht schon $8~\rm \upmu m$ beträgt. MIMOSA-18-AHR hat aufgrund der höheren Verarmungsspannung von $U_{depl}\approx 2,5~\rm V$ eine noch größere Verarmungszone von bis zu $12~\rm \upmu m$.}
        \label{fig:Theoriedepletionzone2}
 \end{figure}
-Die in CMOS-Prozessen verwendete "`niedrigohmige"' Dotierung von $13 ~\rm \Omega ~cm $ sowie die verfügbaren Spannungen von $\leq 5V$ ermöglichen allerdings nur eine Verarmungszone von wenigen $\upmu m$, die Driftkomponente war eher zu vernachlässigen. Vor kurzem wurde jedoch ein neuer Industrieprozess verfügbar, der ein hochohmiges Dotierungsprofil von $1k ~\rm \Omega ~cm $ erlaubt, so dass hinreichende Verarmungszonen auch bei niedrigen Spannungen erreicht werden (Abbildung \ref{fig:Theoriedepletionzone2}). Diese "`hochohmigen"' Sensoren werden im Rahmen dieser Arbeit vorgestellt.
+Die in CMOS-Prozessen verwendete "`niedrigohmige"' Dotierung von $13 ~\rm \Omega ~cm $ sowie die verfügbaren Spannungen von $\leq 5V$ ermöglichen allerdings nur eine Verarmungszone von wenigen $\upmu m$, die Driftkomponente war eher zu vernachlässigen. Vor kurzem wurde jedoch ein neuer Industrieprozess verfügbar, der ein hochohmiges Dotierungsprofil von $1k ~\rm \Omega ~cm $ erlaubt, so dass hinreichende Verarmungszonen auch bei niedrigen Spannungen erreicht werden (Abbildung \ref{fig:Theoriedepletionzone2}). Diese "`hochohmigen"' Sensoren werden im Rahmen dieser Arbeit studiert.
 
 Das Nachweisprinzip von den Sensor durchquerenden Teilchen beruht auf der Erzeugung von Elektron/Lochpaaren entlang ihrer Trajektorie (Abbildung \ref{fig:Aufbau eines Pixel} (unten)). Die vom Potential geführten Elektronen und Löcher diffundieren durch die Epitaxieschicht. Die Elektronen erreichen nach einer gewissen Zeit eine der Dioden, in der sie gesammelt und zum Vorverstärker geleitet werden. \newline
 
@@ -168,12 +168,12 @@ Ein kritischer Punkt f
        \caption[MIMOSA-26]{MIMOSA-26 }
        \label{fig:MIMOSA-26}
 \end{figure} 
-MIMOSA-26 war zu Beginn dieser Doktorarbeit der State-of-the-Art-Sensor. Er kombiniert eine große Pixeloberfläche mit digitaler On-Chipdatenverarbeitung und ist der erste MIMOSA, der in einem Vertexdetektor verwendet werden könnte. Ursprünglich wurde er für Strahlteleskope entwickelt um eine Spurrekonstruktion mit Mikrometergenauigkeit zu ermöglichen und somit Spurdetektoren bis zu dieser Auflösung zu evaluieren. In 2012 wurden auf $50~\rm \upmu m$ gedünnte MIMOSA-26 erfolgreich im Prototyp des Mikrovertexdetektor des CBM-Experimentes integriert und ein Materialbudget von $0.3\%~X_0$ erreicht. Die Teleskopstationen erreichten durch Aussparungen gar ein Materialbudget von nur $0.05\%~X_0$.\newline
+MIMOSA-26 war zu Beginn dieser Doktorarbeit der State-of-the-Art-Sensor. Er kombiniert eine große Pixeloberfläche mit digitaler On-Chipdatenverarbeitung und ist der erste MIMOSA, der in einem Vertexdetektor verwendet werden könnte. Ursprünglich wurde er für Strahlteleskope entwickelt, um eine Spurrekonstruktion mit Mikrometergenauigkeit zu ermöglichen und somit Spurdetektoren bis zu dieser Auflösung zu evaluieren. In 2012 wurden auf $50~\rm \upmu m$ gedünnte MIMOSA-26 erfolgreich im Prototyp des Mikrovertexdetektor des CBM-Experimentes integriert und dabei ein Materialbudget von $0.3\%~X_0$ erreicht. Die Teleskopstationen erreichten durch Aussparungen gar ein Materialbudget von nur $0.05\%~X_0$.\newline
 Es ist geplant, den Vertexdetektor des NA-61-Experiments am SPS-CERN mit MIMOSA-26 auszustatten.\newline
-MIMOSA-26 wurde im 0.35 AMS-Prozess hergestellt. Die Pixeloberfläche besteht aus 600k Pixel, die in 576 Zeilen zu 1152 Spalten angeordnet sind. Der Pixelpitch beträgt $18.4~\rm \upmu m$. Die an die sensitive Diode angelegte Verarmungsspannung beträgt $0,5-1~\rm V$.\newline
+MIMOSA-26 wurde im 0.35 AMS-Prozess hergestellt. Die Pixeloberfläche besteht aus 600k Pixel, die in 576 Zeilen zu 1152 Spalten angeordnet sind. Der Pixelpitch beträgt $18,4~\rm \upmu m$. Die an die sensitive Diode angelegte Verarmungsspannung beträgt $0,5-1~\rm V$.\newline
 Der Sensor kann sowohl digital als auch analog ausgelesen werden. Im analogen Modus stehen acht Kanäle zur Verfügung. Entsprechend können jeweils acht Spalten gleichzeitig ausgelesen werden. Es können entweder immer die gleichen acht Spalten ausgelesen werden, was einer Integrationszeit von $460~\rm \upmu s$ entspricht oder es kann der Scannmodus verwendet werden, der alle Spalten konsekutiv in Gruppen von acht Spalten ausliest. Entsprechend beträgt die Integrationszeit in diesem Fall $66~\rm ms$. Im digitalen Modus werden alle 1152 Spalten parallel ausgelesen, was in einer Integrationszeit von $\sim 100~\rm \upmu s$  entspricht. In dieser Arbeit wurde ausschließlich der Chip analog ausgelesen und hierbei der Scannmodus gewählt.\newline 
 MIMOSA-26 ist verfügbar mit niedrig- $(\approx 10~\rm \Omega cm)$ und hochohmiger $(\approx 1k~\rm \Omega cm)$ Epitaxieschicht mit einer Dicke von $15~\rm \upmu m$. Weitere hochohmige Sensoren mit einer Epitaxieschichtdicke von 10 und $20~\rm \upmu m$ standen ebenfalls zur Verfügung.\newline
-In dieser Doktorarbeit wurde die nicht-ionisierende und ionisierende Strahlenhärte von MIMOSA-26 bestimmt, um zu klären, welche Strahlenhärte ein Sensor mit Onchipdatenverarbeitung erreicht.\newline
+In dieser Doktorarbeit wurde die nicht-ionisierende und ionisierende Strahlenhärte von MIMOSA-26 bestimmt, um zu klären, welche Strahlenhärte MIMOSA-26 als erster Sensor, der in einem Vertexdetektor verwendet werden könnte, erreicht.\newline
 \subsection{MIMOSA-18AHR}
 \begin{figure}
        \centering
@@ -193,7 +193,7 @@ MIMOSA-32 ist der erste MIMOSA, der in einem $0.18~\rm \upmu m$ CMOS-Prozess her
 In dieser Arbeit soll die ionisierende Strahlenhärte von MIMOSA-32 bis zu einer Dosis von $10\Mrad$ evaluiert werden.\newline
 \subsection{MIMOSA-32ter}
 MIMOSA-32ter ist die dritte Generation an MIMOSA-32. In diesem wurden die vielversprechensten Matrizen der vorherigen MIMOSA-32 integriert und leicht variiert um sich dem optimalen Design iterativ anzunähern.\newline
-Insbesondere von Bedeutung in dieser Arbeit sind die Matrizen P2, P5 und P6 um den Einfluss der Torgröße des Quellfolgertransistors zu studieren. Die Länge beträgt für alle Matrizen $0,2\mum$. Die Breite variiert von $1.5\mum$ für P2 (normal), über $0.9\mum$ für P6 (small) zu $0,5\mum$ für P5(tiny). Erwartet wird eine bessere Verstärkung durch die kleinere Größe und damit ein besseres Rauschen.\newline
+Insbesondere von Bedeutung in dieser Arbeit sind die Matrizen P2, P5 und P6 um den Einfluss der Torgröße des Quellfolgertransistors zu studieren. Die Länge beträgt für alle Matrizen $0,2\mum$. Die Breite variiert von $1.5\mum$ für P2 (normal), über $0.9\mum$ für P6 (small) zu $0,5\mum$ für P5(tiny). Überprüft werden soll, ob eine bessere Verstärkung durch die kleinere Größe und damit ein besseres Rauschen erreicht werden kann, oder ob das 1/f-Rauschen durch die kleinere Transistorengröße überwiegt.\newline
 Weiterhin wurde die Möglichkeit eines tiefen P-Senke (Deep-P-Well) studiert, die es erlaubt PMOS-Transistoren zu verwenden. Dazu standen die Matrizen P6, P7 und P8 zur Verfügung. P7 verfügt über eine tiefe P-Senke, wobei um die Sammeldioden eine kleine Lücke von $XX\mum$ gelassen wurde. Bei P8 wurde eine größere Lücke von $XX\mum$ verwendet. P6 wurde als Referenzmatrix ohne tiefe P-Senke verwendet. Die Frage ist, ob die tiefe P-Senke die Ladungssammlung beeinflusst und wie groß die Lücke um die Dioden sein muss. \newline
 \subsection{MIMOSA-34}
 \begin{figure}
@@ -202,5 +202,5 @@ Weiterhin wurde die M
        \caption[MIMOSA-34]{MIMOSA-34 }
        \label{fig:MIMOSA-34}
 \end{figure} 
-MIMOSA-34 ist der nächste $0.18~\rm \upmu m$ Technologieentdecker. Er hat größere Transistorgates, was das hohe Rauschen von MIMOSA-32 und MIMOSA-32ter verringern sollte. Genauso wie die Vorgänger MIMOSA-32 und MIMOSA-32ter hat er 32 Matrizen mit unterschiedlichen Eigenschaften. In MIMOSA-34 liegt der Schwerpunkt auf dem Studium unterschiedlicher Pixelpitche, Diodenanordnungen und Diodenoberflächen um so das Optimum zu finden. \newline
+MIMOSA-34 ist der nächste $0.18~\rm \upmu m$-Sensor. Er hat größere Transistortordimensionen, was das in MIMOSA-32 und MIMOSA-32ter gemessene hohe Rauschen verringern sollte. Genauso wie die Vorgänger MIMOSA-32 und MIMOSA-32ter hat er 32 Matrizen mit unterschiedlichen Eigenschaften. In MIMOSA-34 liegt der Schwerpunkt auf dem Studium unterschiedlicher Pixelpitche, Diodenanordnungen und Diodenoberflächen um so das Optimum zu finden. \newline
 

diff --git a/Doering-PHD-Thesis/Mi32.aux b/Doering-PHD-Thesis/Mi32.aux
index b2683179f1dc96edfb120ea9428eda2ca1e455ab..bcccfbb68e671c5db1421affed9abd2ec90572b0 100755 (executable)
--- a/Doering-PHD-Thesis/Mi32.aux
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 \setcounter{@ppsaveapp}{0}
 \setcounter{vrcnt}{0}
 \setcounter{pp@next@reset}{0}
-\setcounter{Item}{28}
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diff --git a/Doering-PHD-Thesis/Mi32.tex b/Doering-PHD-Thesis/Mi32.tex
index 90b1735d58dd9f2a386b29357cf13f7f5efa3e94..2194bf2886a0bdd0687b0133a9ec1eda8a38a93f 100755 (executable)
--- a/Doering-PHD-Thesis/Mi32.tex
+++ b/Doering-PHD-Thesis/Mi32.tex
@@ -1,12 +1,14 @@
 \chapter{CMOS sensors im 0.18mu Prozess \today}
 \section{Einführung}
-CMOS Monolithic Active Pixel Sensoren werden in konventionellen Industrieprozesse hergestellt. Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von $0.35\mum$ produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in $\mum$ angibt. Die Sensoren haben aufgrund der konsekutiven Auslese eine Integrationszeit von einigen $100 \mus$ bis wenige ms. Der für die Anwendung in Strahlteleskope optimierte MIMSOA-26 (siehe Kapitel \ref{MIMOSA-26}) erreicht dank massiv zeilenparalleler Auslese als großflächiger Sensor eine Integrationszeit $115\mus$. Dies reicht für den Vertexdetektor für NA-61, allerdings nicht für CBM und ALICE, die für ihre Physikziele eine wesentlich höhere Kollisionsrate benötigen, so dass es zur Überlagerung von mehreren Kollisionen (Pile-Up) im Detektor kommen würde. Zwar kann aufgrund der hohen Granulariät und effizienter Spurrekonstruktionsalgorithmen ein gewisser Pile-Up toleriert werden, allerdings sollte die Zahl der Kollisionen pro Integrationszeit nicht zu groß werden. Dies ist einer der limitierende Faktoren des gesamten Experimentes. Eine kürzere Integrationszeit der Sensoren ermöglicht eine höhere Kollisionsrate und damit bessere Statistik. Dies ist allerdings nicht mit den bisherigem AMS-0.35-Prozess möglich. \newline
+CMOS Monolithic Active Pixel Sensoren werden in konventionellen Industrieprozesse hergestellt. Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von $0.35\mum$ produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in $\mum$ angibt. Die Sensoren haben aufgrund der konsekutiven Auslese eine Integrationszeit von einigen $100 \mus$ bis wenige ms. Der für die Anwendung in Strahlteleskope optimierte MIMSOA-26 (siehe Kapitel \ref{MIMOSA-26}) erreicht dank massiv zeilenparalleler Auslese als großflächiger Sensor eine Integrationszeit von $115\mus$. Dies reicht für den Vertexdetektor für NA-61, allerdings nicht für CBM und ALICE, die für ihre Physikziele eine wesentlich höhere Kollisionsrate benötigen, so dass es zur Überlagerung von mehreren Kollisionen (\textit{Pile-Up}) im Detektor kommen würde. Zwar kann aufgrund der hohen Granulariät und effizienter Spurrekonstruktionsalgorithmen ein gewisser Pile-Up toleriert werden, allerdings sollte die Zahl der Kollisionen pro Integrationszeit nicht zu groß werden. Dies ist einer der limitierende Faktoren des gesamten Experimentes. Eine kürzere Integrationszeit der Sensoren ermöglicht eine höhere Kollisionsrate und damit bessere Statistik. Dies ist allerdings nicht mit den bisherigem AMS-0.35-Prozess möglich. \newline
 
 Vor kurzem wurde ein neuer Industrieprozess verfügbar, der es ermöglicht Sensoren mit einer kleineren Strukturengröße von $0.18\mum$ herzustellen. Diese Sensoren werden analog im Folgenden als TOWER-0.18 bezeichnet. Die kleinere Strukturengröße ermöglicht komplexere In-Pixelschaltungen und damit kürzere Integrationszeiten von wenigen $10\mus$ auch für großflächige Sensoren. Für den MAPS-Sensor MISTRAL für CBM und ALICE wird eine Integrationszeit von $30\mus$ angestrebt, was einen Faktor 3 schneller ist als MIMOSA-26.\newline
 
+Bisher war es nicht möglich PMOS-Transistoren in ein Pixel zu integrieren. Denn die N-Implantation steht in Kontakt mit der Epitaxieschicht und konkurriert damit mit der Diode um die Ladungssammlung. Hiergegen ermöglicht der TOWER-0.18-Prozess eine Implantation einer tiefen P-Senke (\textit{Deep Pwell} genannt) unter der N-Implantation, die die N-Implantation von der Epitaxieschicht isoliert. Dies sollte die Implantation von PMOS-Transistoren ermöglichen, die die Ladungssammlung nicht beeinflussen.\newline
+
 Darüber hinaus wurde vermutet, dass aufgrund der kleineren Strukturengröße die ionisierenden Strahlenhärte höher ist. So sind die Oxidschichten dünner, so dass Löcher leichter durch den Tunneleffekt entweichen können. Weiterhin ermöglichen die kleineren Strukturen aufwändigere, abgeschlossene Transistorlayouts (ELT), die Leckstromkanäle unterbinden können und sich deshalb im AMS-0.35-Prozess als strahlenhärter erwiesen haben, allerdings zu viel Platz benötigten. Weiterhin bietet die kürzere Integrationszeit selbst den Vorteil, dass weniger Leckstromelektronen gesammelt werden und damit das Rauschen nach Bestrahlung weniger stark steigt.\newline
 
-In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess hergestellte Sensoren mit einer Integrationszeit von $30\mus$ die Strahlenhärteanforderungen von CBM und ALICE erfüllen. Dazu wurden mehrere Prototypsensoren MIMOSA-32, MIMOSA-32ter und MIMOSA-34 entwickelt und getestet. Jeder hat 32 Matrizen mit acht Spalten aus 64 Pixeln und unterschiedlichen Pixel- und Vorverstärkerlayouts. Das Ziel ist es die bestmögliche Konfiguration für die nächste Sensorgeneration auszuwählen. Die Integrationszeit beträgt $32\mus$ und entspricht damit der Spezifikation von MISTRAL. Die Sensoren werden mit verschiedenen Wafern produziert, unter anderem auch in hochohmigen Wafern bis zu einer Resistivität von 6kOmegacm um die Vorteile in Bezug auf nicht-ionisierende Strahlenhärte zu erhalten bzw. zu erweitern. \newline
+In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess hergestellte Sensoren mit einer Integrationszeit von $30\mus$ die Strahlenhärteanforderungen von CBM und ALICE erfüllen. Weiterhin soll überprüft werden, ob dank des Deep PWell die Ladungssammmlung nicht mehr von PMOS-Transistoren gestört werden kann. Dazu wurden mehrere Prototypsensoren MIMOSA-32, MIMOSA-32ter und MIMOSA-34 entwickelt und getestet. Jeder Sensor hat 32 Matrizen mit acht (USB-System) bzw. 16 (PXI-System) Spalten aus 64 Pixeln und unterschiedlichen Pixel- und Vorverstärkerlayouts, teilweise mit Deep Pwell ausgestattet. Das Ziel ist es die bestmögliche Konfiguration für die nächste Sensorgeneration auszuwählen. Die Integrationszeit beträgt $32\mus$ und entspricht damit der Spezifikation von MISTRAL. Die Sensoren werden mit verschiedenen Wafern produziert, unter anderem auch in hochohmigen Wafern bis zu einer Resistivität von $6~\rm k\Omega cm$ um die Vorteile in Bezug auf nicht-ionisierende Strahlenhärte zu erhalten bzw. zu erweitern. \newline
 \section{Rauschverhalten}
 \begin{figure}
 \centering
@@ -16,26 +18,26 @@ In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess herge
 \end{figure}
 Erste Tests mit MIMOSA-32 zeigten ein sehr hohes Rauschen. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt die Rauschverteilung der Pixel. Verglichen wird MIMOSA-32ter-P2 und MIMOSA-32ter-P5 (TOWER-0.18) mit MIMOSA-18AHR-A2 (AMS-0.35). Der Mittelwert der Verteilung von TOWER-0.18 liegt um 20e, für AMS-0.35 dagegen um 12e. Das mittlere Rauschen hat sich dadurch nahezu verdoppelt. Allerdings verschlechtert sich nicht nur das mittlere Rauschen, auch der Schwanz aus Pixeln mit hohen Rauschen vergrößert sich deutlich. Einzelne Pixel von MIMOSA-32ter-P2 haben ein Rauschen von $>50\e$, während kein Pixel von MIMOSA-18AHR ein Rauschen $>26\e$ hat. Dies ist bemerkenswert, hat MIMOSA-18AHR schließlich mit 96*96 im Vergleich zu MIMOSA-32 mit 8*64 eine 18mal größere Pixelstatistik.\newline
 Einen ersten Hinweis auf den Ursprung dieses hohen Rauschens bringt der Vergleich mit MIMOSA-32ter-P5. Dieser hat ein kleineres Quellfolgertor (Source follower gate) als MIMOSA-32ter-P2. Es wird ein noch stärker ausgeprägter Schwanz beobachtet. Einzelne Pixel haben ein Rauschen von bis zu $85\e$.\newline     
-\begin{figure}
-\centering
-               \includegraphics[width=1\textwidth]{BilderMi32/Mi32_Noise_TransSize.pdf}
-               \caption[Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur]{Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur}
-       \label{Mi32_Noise_TransSize}
-\end{figure}
+%\begin{figure}
+%\centering
+               %\includegraphics[width=1\textwidth]{BilderMi32/Mi32_Noise_TransSize.pdf}
+               %\caption[Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur]{Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur}
+       %\label{Mi32_Noise_TransSize}
+%\end{figure}
 \begin{table}[tbp]
 
 \centering
-\begin{tabular}{|ccccc|}
+\begin{tabular}{|c|ccccc|}
 \hline
 Width         &Length         &Measured noise               & Gain                & ENC \\
-$[\mu m]$     &$[\mu m]$      &$[mV] \pm 10\% $             & $[e/mV]\pm 5\%$     & $[e]\pm 10\%$\\
+Matrix & $[\mu m]$     &$[\mu m]$      &$[mV] \pm 10\% $             & $[e/mV]\pm 5\%$     & $[e]\pm 10\%$\\
 \hline
 %ELT                           &                                               & 1.85                                                                                          & 12.1                                                          & 22.4\\
-1.5                                      & 0.2                                         & 1.87                                                                                          & 11.1                                                          & 20.8 \\
-0.9                                    & 0.2                                           & 2.15                                                                                          & 10.5                                                          & 22.5 \\
-0.5                                    & 0.2                                           & 2.41                                                                                          & 10.1                                                          & 24.3 \\
+MIMOSA-32ter-P2&1.5                                      & 0.2                                         & 1.87                                                                                          & 11.1                                                          & 20.8 \\
+MIMOSA-32ter-P6&0.9                                    & 0.2                                           & 2.15                                                                                          & 10.5                                                          & 22.5 \\
+MIMOSA-32ter-P5&0.5                                    & 0.2                                           & 2.41                                                                                          & 10.1                                                          & 24.3 \\
 \hline
-Smaller gate means &          & +25\%                       & +10\%               & +20\% \\
+Smaller gate means & &          & +25\%                       & +10\%               & +20\% \\
 \hline
 \end{tabular}
 \caption{Noise and gain in dependence of the source follower gate size.}
@@ -59,10 +61,10 @@ Smaller gate means &          & +25\%                       & +10\%
                \caption[XXX]{Fehltrefferrate für eine Matrix mit kleiner Transistorgröße in Abhängigkeit der Temperatur}
        \label{fig:Mi32fakehitTemperatur}
 \end{figure}
-Ursprünglich wurden Pixel mit kleinerem Quellfolgertor implementiert um die Verstärkung des Transistors zu vergrößern. In AMS-0.35 bedeutete ein kleinerer Transistor eine größere Verstärkung und damit ein kleineres ENC. Diese Abhängigkeit soll für im TOWER-0.18-Prozess hergestellten MIMOSA-32ter in Tabelle \ref{tab:Mi32-1-f-noise-table} überprüft werden. Die Verstärkung verbessert sich auch hier durch den kleineren Transistor um $10\%$. Allerdings führt diese Verbesserung der Verstärkung nicht zu einem verbesserten Rauschen. Denn der Anstieg des Rauschens in $[mV]$ beträgt $25\%$ und steigt damit stärker als die Verstärkung sich verbessert. Entsprechend erhöht sich das ENC um $20\%$. Ein kleineres Quellfolgertor bringt damit für Sensoren im TOWER-0.18-Prozess keine Vorteile in Bezug auf das Rauschen der Sensoren. \newline
-Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung \ref{Mi32_Noise_TransSize} den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von $-35\C$ bis $+20\C$. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Unerwarteterweise ist das Rauschen bei $+20\C$ am geringsten. Dies ist gegen die Erwartung von thermischen Rauschen und RTS-Rauschen, welches beides durch eine niedrigere Temperatur unterdrückt werden konnte \cite{DoeringMaster, Doe08}. 
-Abbildung \ref{fig:Mi32fakehitVarTransistor} zeigt ergänzend die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg eines gaußförmigen Rauschens ausgleichen kann. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Je kleiner die Transistorgröße, desto größer ist die Fehltrefferrate. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht durch Verringern der Betriebstemperatur, sondern erhöht sich. Hier handelt es sich damit um ein nicht-gaußförmiges Rauschen.\newline
-In der Anwendung als Vertexdetektor kann die Schwelle nicht an das Rauschen eines jeden einzelnen Pixels angepasst werden, sondern es wird eine allgemeine Schwelle für alle Pixel angelegt. Abbildung \ref{fig:Mi32fakehitTransistor} zeigt die zu erwartende Fehltrefferrate als Funktion der angelegten Schwelle für verschiedene Quellfolgertorgrößen und in Abbildung \ref{fig:Mi32fakehitTemperatur} für verschiedene Temperaturen. Auch hier zeigt sich, dass Sensoren mit einem kleineren Quellfolgertor sowie betrieben bei niedrigerer Temperatur bei gleicher Schwelle eine höhere Fehltrefferrate haben. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht durch Verringern der Betriebstemperatur nicht systematisch, sondern ist bei $-20\C$ am höchsten. Da der Mikrovertexdetektor bei dieser Temperatur betrieben werden soll, ist hier das Interesse geweckt.\newline
+Ursprünglich war die Idee Pixel mit kleinerem Quellfolgertor zu implementieren um die Verstärkung des Transistors zu vergrößern. In AMS-0.35 bedeutete ein kleinerer Transistor eine größere Verstärkung und damit ein kleineres ENC. Diese Abhängigkeit soll für im TOWER-0.18-Prozess hergestellten MIMOSA-32ter in Tabelle \ref{tab:Mi32-1-f-noise-table} überprüft werden. Die Verstärkung vergrößert sich auch hier durch den kleineren Transistor um $10\%$. Allerdings führt diese Verbesserung der Verstärkung nicht zu einem geringeren Rauschen. Denn der Anstieg des Rauschens in $[mV]$ beträgt $25\%$ und steigt damit stärker als die Verstärkung sich verbessert. Entsprechend erhöht sich das ENC um $20\%$. Ein kleineres Quellfolgertor bringt damit für Sensoren im TOWER-0.18-Prozess keine Vorteile in Bezug auf das Rauschen der Sensoren. \newline
+%Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung \ref{Mi32_Noise_TransSize} den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von $-35\C$ bis $+20\C$. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Unerwarteterweise ist das Rauschen bei $+20\C$ am geringsten. Dies ist gegen die Erwartung von thermischen Rauschen und RTS-Rauschen, welches beides durch eine niedrigere Temperatur unterdrückt werden konnte \cite{DoeringMaster, Doe08}. 
+Abbildung \ref{fig:Mi32fakehitVarTransistor} zeigt ergänzend die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg eines gaußförmigen Rauschens ausgleichen kann. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Hier handelt es sich damit um ein nicht-gaußförmiges Rauschen. Je kleiner die Transistorgröße, desto größer ist die Fehltrefferrate.\newline
+In der Anwendung als Vertexdetektor kann die Schwelle nicht an das Rauschen eines jeden einzelnen Pixels angepasst werden, sondern es wird eine allgemeine Schwelle für alle Pixel angelegt. Abbildung \ref{fig:Mi32fakehitTransistor} zeigt die zu erwartende Fehltrefferrate als Funktion der angelegten Schwelle für verschiedene Quellfolgertorgrößen und in Abbildung \ref{fig:Mi32fakehitTemperatur} für verschiedene Temperaturen. Auch hier zeigt sich, dass Sensoren mit einem kleineren Quellfolgertor sowie betrieben bei niedrigerer Temperatur bei gleicher Schwelle eine höhere Fehltrefferrate haben. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht durch Verringern der Betriebstemperatur systematisch, sondern ist bei $-20\C$ am höchsten. Da der Mikrovertexdetektor bei dieser Temperatur betrieben werden soll, ist hier das Interesse geweckt.\newline
 Eine mögliche Erklärung wird in XXX beschrieben. Auch dort wurde die Transistortorgröße variiert und eine Abhängigkeit vom Rauschen festgestellt. Dieses Rauschen wurde als 1/f-Rauschen identifiziert, was naheliegenderweise auch hier der Grund für das hohe Rauschen sein sollte. 
 \begin{figure}
 \begin{minipage}{8cm}
@@ -78,7 +80,7 @@ Eine m
 \end{minipage}
 
 \end{figure}
-Die gleiche Signatur wird auch in ausgewählten Pixeln beobachtet (siehe Abbildung \ref{fig:Mi32-1-f-noise-CDS-Signal}). Es sind drei äquidistante Stufen sichtbar. Noch deutlicher wird die Signatur im Histogramm (Abbildung \ref{fig:Mi32-1-f-noise-Distribution}). Studiert man die Temperaturabhängigkeit, so nimmt die Breite des CDS-Signals ab, wie man es von thermischen Rauschen erwarten würde, allerdings verstärkt sich die Signatur gerade bei der niedrigsten erreichbaren Temperatur von $-35\C$. Dies ist der Grund, wieso in den obigen Messungen der nicht erwartete Anstieg des Rauschens mit Senkung der Temperatur beobachtet wurde.\newline
+Die gleiche Signatur wird auch in ausgewählten Pixeln beobachtet (siehe Abbildung \ref{fig:Mi32-1-f-noise-CDS-Signal}). Es sind drei äquidistante Stufen sichtbar. Noch deutlicher wird die Signatur im Histogramm (Abbildung \ref{fig:Mi32-1-f-noise-Distribution}).\newline
 Als Konsequenz aus diesen Beobachtungen wurde die nächste Sensorgeneration MIMOSA-34 mit größeren Transistortoren ausgestattet. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt das Rauschen einer ausgewählten Matrix. Das Rauschen ist wesentlich geringer als bei MIMOSA-32 und MIMOSA-32ter und beträgt $12\e$, was mit MIMOSA-18AHR wieder vergleichbar ist. Die Rauschverteilung ist allerdings immer noch sehr viel breiter, was dafür spricht, dass die Pixelmatrix inhomogen ist. Hier ist noch Raum für Verbesserungen. Insbesondere interessant ist, dass ein Teil der Pixel ein sehr geringes Rauschen von $<10\e$ aufweist, was im AMS-0.35-Prozess nicht erreicht werden konnte. Wenn es gelinge, die Eigenschaften dieser sehr rauscharmen Pixel zu verstehen, könnte man einen entsprechend homogen rauscharmen Sensor mit $<10\e$ Rauschen entwickeln.     
 \section{Ionisierende Strahlenhärte}
 Zur Abschätzung der ionsisierenden Strahlenhärte ist vor allem das Rauschen entscheidend. Denn ionisierende Strahlenschäden in der Epitaxieschicht sind reversibel, so dass erwartet wird, dass die Größe des Teilchensignals sich nicht ändert. Dagegen wird erwartet, dass das Rauschen ansteigt, bis das Signal nicht mehr sicher vom Rauschen getrennt werden kann und der Sensor keine ausreichende Detektionseffizienz hat. Deshalb soll im Folgenden vor allem das Rauschen nach Bestrahlung diskutiert werden.\newline
@@ -87,9 +89,9 @@ MIMOSA-32ter in TOWER-0.18 hat eine wesentlich geringere Integrationszeit von $3
 Abbildung \ref{fig:Mi32NoiseIntegrationszeit} zeigt das Rauschen als Funktion der Integrationszeit. Wie erwartet, gilt: Je kürzer die Integrationszeit, desto geringer ist das Rauschen. Vergleicht man MIMOSA-32ter-P2 mit MIMOSA-11 A0S2, welche beide nicht strahlenharte, lineare Transistoren haben, so haben beide bei einer Integrationszeit von $180\mus$ ein Rauschen von $45-48\e$. Für MIMOSA-32ter-P2 kann die Integrationszeit auf $32\mus$ verkürzt werden, was zur Folge hat, dass sich das Rauschen um 1/3 auf $30\e$ verringert.\newline
 Den direkten Vergleich erschwert das hohe Rauschen von MIMOSA-32ter vor der Bestrahlung. Für die nicht strahlenharten linearen Transistoren ist das Rauschen von MIMOSA-32ter-P2 geringer als MIMOSA-11 A0S2. Hier ist anscheinend das thermische Rauschen so groß, dass das hohe Rauschen vor der Bestrahlung nicht so stark ins Gewicht fällt. Bei den strahlenharten abgeschlossenen ELT Transistoren dagegen ist wie erwartet das Rauschen niedriger. Das bedeutet, dass thermische Leckströme unterbunden wurden und damit das thermische Rauschen unterdrückt werden konnte. Hier hat nun MIMOSA-32ter-P4 ein deutlich höheres Rauschen als die entsprechende Matrix MIMOSA-11 A3S1, was vermutlich auf das hohe Rauschen vor Bestrahlung zurückzuführen ist. Entsprechend ist es schwierig zu entscheiden, ob der TOWER-0.18-Prozess eine intrinsische höhere ionisierende Strahlenhärte hat als AMS-0.35. Die Studie soll mit MIMOSA-34 wiederholt werden, der ein geringeres Grundrauschen hat. \newline
 Nach Bestrahlung einer wesentlich höhere Dosis von bis zu $10\Mrad$ zeigt sich, dass die Referenzspannung der Sensoren wesentlich stabiler ist. Diese musste bei Sensoren im AMS-0.35-Prozess mit ansteigender Strahlendosis nachgeregelt werden. Bei mit einer Dosis von $>1\Mrad$ bestrahlte Sensoren war eine Nachregelung nicht mehr möglich. Der Sensor war insensitiv. MIMOSA-32 im TOWER-0.18-Prozess dagegen kann ohne Probleme bei Raumtemperatur auch nach $10\Mrad$ betrieben werden. \newline
-Bei MIMOSA-32 wird bis zu einer Dosis von 3Mrad kein besonders großer Anstieg des Rauschens beobachtet (Abbildung \ref{fig:10MradNoiseGain}). Nach 10Mrad wird sogar ein Abfall des gemessenen Rauschens beobachtet. Der Grund liegt in der Verringerung der Verstärkung der Auslesekette. Wird dieses berücksichtigt, ändert sich das ENC nach 3Mrad nicht signifikant bzw. steigt auf 30e nach 10Mrad.\newline
-Die Verringerung der Verstärkung muss dabei nicht auf ein Feature von TOWER-0.18 zurückzuführen sein. So wurde auch bei MIMOSA-26 im AMS-0.35 eine Halbierung der Verstärkung beobachtet (siehe Kapitel \ref{sec:MIMOSA26Ionisierend}); allerdings bereits nach einer um einen Faktor zehn geringeren Dosis von 1Mrad.\newline
-Um die Leistungsfähigkeit des Sensors zu bestimmen, wird in Abbildung \ref{fig:10MradStoNn} das Signal-zu-Rauschen gezeigt. Die betrachtete TOWER-0.18-Matrix hat ein Signal-zu-Rauschen von 40, welches sich nach 3Mrad nicht ändert und nach 10Mrad aufgrund des Rauschens auf 30 abfällt. Der MPV ändert sich nicht. Das Signal-zu-Rauschen ist sicher über der Schwelle von 15, was für die erreichte Strahlenhärte spricht. Eine Bestimmung der Strahlenhärte in einem Strahltest ist allerdings noch ausstehend.\newline
+Bei MIMOSA-32 wird bis zu einer Dosis von 3Mrad kein besonders großer Anstieg des Rauschens beobachtet (Abbildung \ref{fig:10MradNoiseGain}). Nach $10\Mrad$ wird sogar ein Abfall des gemessenen Rauschens beobachtet. Der Grund liegt in der Verringerung der Verstärkung der Auslesekette. Wird dieses berücksichtigt, ändert sich das ENC nach $3\Mrad$ nicht signifikant bzw. steigt auf $30\e$ nach $10\Mrad$.\newline
+Die Verringerung der Verstärkung muss dabei nicht auf ein Feature von TOWER-0.18 zurückzuführen sein. So wurde auch bei MIMOSA-26 im AMS-0.35 eine Halbierung der Verstärkung beobachtet (siehe Kapitel \ref{sec:MIMOSA26Ionisierend}); allerdings bereits nach einer um einen Faktor zehn geringeren Dosis von $1\Mrad$.\newline
+Um die Leistungsfähigkeit des Sensors zu bestimmen, wird in Abbildung \ref{fig:10MradStoNn} das Signal-zu-Rauschen gezeigt. Die betrachtete TOWER-0.18-Matrix hat ein Signal-zu-Rauschen von 40, welches sich nach $3\Mrad$ nicht ändert und nach $10\Mrad$ aufgrund des Rauschens auf 30 abfällt. Der MPV ändert sich nicht. Das Signal-zu-Rauschen ist sicher über der Schwelle von 15, was für die erreichte Strahlenhärte spricht. Eine Bestimmung der Strahlenhärte in einem Strahltest ist allerdings noch ausstehend.\newline
 \begin{figure}
 \centering
                \includegraphics[width=1\textwidth]{BilderMi32/NoiseInt.pdf}

diff --git a/Doering-PHD-Thesis/PHDthesis.aux b/Doering-PHD-Thesis/PHDthesis.aux
index 7cb6462919ad022d639927ab4e7f097d1324ef50..89431b0b091a825d23a48a7034c6208cf6eed075 100755 (executable)
--- a/Doering-PHD-Thesis/PHDthesis.aux
+++ b/Doering-PHD-Thesis/PHDthesis.aux
@@ -45,7 +45,7 @@
 \bibcite{Amar07}{AY07}
 \bibcite{CharmSummaryPaper}{B{$^{+}$}11}
 \bibcite{Alex08}{B\"ud08}
-\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{177}{appendix*.125}}
+\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{177}{appendix*.124}}
 \bibcite{BlumeKP4}{Blu12}
 \bibcite{CMS}{C{$^{+}$}11}
 \bibcite{Cassing2001753}{CBS01}

diff --git a/Doering-PHD-Thesis/PHDthesis.lof b/Doering-PHD-Thesis/PHDthesis.lof
index 87cde3a5eda4925a26cff2df8082b28f1ebff840..79eddde3e595508621d62c0c4474743bbee9e699 100755 (executable)
--- a/Doering-PHD-Thesis/PHDthesis.lof
+++ b/Doering-PHD-Thesis/PHDthesis.lof
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diff --git a/Doering-PHD-Thesis/PHDthesis.lot b/Doering-PHD-Thesis/PHDthesis.lot
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+\contentsline {table}{\numberline {5.1}{\ignorespaces Maximum einer angepassten Gau\IeC {\ss }verteilung an den jeweiligen Sammel- und Kalibrationspeak in Abbildung \ref {fig:Mi18-deepcool-Fe-1e14}, Bestimmung der durchschnittlichen Ladungssammlungseffizienz der Epitaxieschicht.\relax }}{105}{table.caption.71}
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diff --git a/Doering-PHD-Thesis/PHDthesis.out b/Doering-PHD-Thesis/PHDthesis.out
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diff --git a/Doering-PHD-Thesis/PHDthesis.toc b/Doering-PHD-Thesis/PHDthesis.toc
index 84eac5d77d284fb5ee70f29ae5a6a35f73ac2b39..c852d559f16e695568e6f7a9ac4aa501fc000ae8 100755 (executable)
--- a/Doering-PHD-Thesis/PHDthesis.toc
+++ b/Doering-PHD-Thesis/PHDthesis.toc
@@ -14,102 +14,102 @@
 \contentsline {section}{\numberline {1.5}Messung von D-Mesonen in Schwerionenkollisionen}{9}{section.1.5}
 \contentsline {section}{\numberline {1.6}Wahl des Sensors}{9}{section.1.6}
 \contentsline {section}{\numberline {1.7}Fragestellung dieser Arbeit}{11}{section.1.7}
-\contentsline {chapter}{\numberline {2}Monolithic Active Pixel Sensoren (MAPS)}{13}{chapter.2}
-\contentsline {section}{\numberline {2.1}Pixeldesign und Funktionsprinzip}{13}{section.2.1}
-\contentsline {section}{\numberline {2.2}Signalanalyse}{18}{section.2.2}
-\contentsline {subsection}{\numberline {2.2.1}Signalaufbereitung im Fall des 3T-Pixel}{20}{subsection.2.2.1}
-\contentsline {subsection}{\numberline {2.2.2}Signalaufbereitung im Fall des SB-Pixel}{22}{subsection.2.2.2}
-\contentsline {section}{\numberline {2.3}Die verwendeten MAPS-Prototypen}{25}{section.2.3}
-\contentsline {subsection}{\numberline {2.3.1}MIMOSA-26}{25}{subsection.2.3.1}
-\contentsline {subsection}{\numberline {2.3.2}MIMOSA-18AHR}{26}{subsection.2.3.2}
-\contentsline {subsection}{\numberline {2.3.3}MIMOSA-32}{27}{subsection.2.3.3}
-\contentsline {subsection}{\numberline {2.3.4}MIMOSA-32ter}{27}{subsection.2.3.4}
-\contentsline {subsection}{\numberline {2.3.5}MIMOSA-34}{28}{subsection.2.3.5}
-\contentsline {chapter}{\numberline {3}Strahlensch\"aden}{30}{chapter.3}
-\contentsline {section}{\numberline {3.1}Oberfl\"achensch\"aden}{30}{section.3.1}
-\contentsline {section}{\numberline {3.2}Volumensch\"aden}{32}{section.3.2}
-\contentsline {section}{\numberline {3.3}Bekannte Strahlensch\"aden an MAPS}{35}{section.3.3}
-\contentsline {subsection}{\numberline {3.3.1}Oberfl\"achensch\"aden}{35}{subsection.3.3.1}
+\contentsline {chapter}{\numberline {2}Monolithic Active Pixel Sensoren (MAPS)}{14}{chapter.2}
+\contentsline {section}{\numberline {2.1}Pixeldesign und Funktionsprinzip}{14}{section.2.1}
+\contentsline {section}{\numberline {2.2}Signalanalyse}{19}{section.2.2}
+\contentsline {subsection}{\numberline {2.2.1}Signalaufbereitung im Fall des 3T-Pixel}{21}{subsection.2.2.1}
+\contentsline {subsection}{\numberline {2.2.2}Signalaufbereitung im Fall des SB-Pixel}{23}{subsection.2.2.2}
+\contentsline {section}{\numberline {2.3}Die verwendeten MAPS-Prototypen}{26}{section.2.3}
+\contentsline {subsection}{\numberline {2.3.1}MIMOSA-26}{26}{subsection.2.3.1}
+\contentsline {subsection}{\numberline {2.3.2}MIMOSA-18AHR}{27}{subsection.2.3.2}
+\contentsline {subsection}{\numberline {2.3.3}MIMOSA-32}{28}{subsection.2.3.3}
+\contentsline {subsection}{\numberline {2.3.4}MIMOSA-32ter}{28}{subsection.2.3.4}
+\contentsline {subsection}{\numberline {2.3.5}MIMOSA-34}{29}{subsection.2.3.5}
+\contentsline {chapter}{\numberline {3}Strahlensch\"aden}{31}{chapter.3}
+\contentsline {section}{\numberline {3.1}Oberfl\"achensch\"aden}{31}{section.3.1}
+\contentsline {section}{\numberline {3.2}Volumensch\"aden}{33}{section.3.2}
+\contentsline {section}{\numberline {3.3}Bekannte Strahlensch\"aden an MAPS}{36}{section.3.3}
+\contentsline {subsection}{\numberline {3.3.1}Oberfl\"achensch\"aden}{36}{subsection.3.3.1}
 \contentsline {subsection}{\numberline {3.3.2}Volumensch\"aden}{41}{subsection.3.3.2}
-\contentsline {subsection}{\numberline {3.3.3}Wechselwirkung}{42}{subsection.3.3.3}
-\contentsline {subsection}{\numberline {3.3.4}Random Telegraph Signal}{42}{subsection.3.3.4}
-\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 15.~Oktober 2013}{44}{chapter.4}
-\contentsline {section}{\numberline {4.1}Experimenteller Aufbau}{44}{section.4.1}
-\contentsline {subsection}{\numberline {4.1.1}USB-System}{44}{subsection.4.1.1}
-\contentsline {subsection}{\numberline {4.1.2}PXI-System}{45}{subsection.4.1.2}
-\contentsline {subsection}{\numberline {4.1.3}Automatische Datenaufnahme}{45}{subsection.4.1.3}
-\contentsline {subsection}{\numberline {4.1.4}Temperaturkontrolle}{47}{subsection.4.1.4}
-\contentsline {subsection}{\numberline {4.1.5}Radioaktive Quellen}{51}{subsection.4.1.5}
-\contentsline {subsubsection}{\numberline {4.1.5.1}Photonenquellen}{51}{subsubsection.4.1.5.1}
-\contentsline {subsubsection}{\numberline {4.1.5.2}Elektronenquellen}{51}{subsubsection.4.1.5.2}
-\contentsline {section}{\numberline {4.2}Observablen}{54}{section.4.2}
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-\contentsline {subsection}{\numberline {4.2.2}Die Grundlinie}{56}{subsection.4.2.2}
-\contentsline {subsection}{\numberline {4.2.3}Thermisches Rauschen}{60}{subsection.4.2.3}
-\contentsline {subsection}{\numberline {4.2.4}Konzept Schwelle}{61}{subsection.4.2.4}
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-\contentsline {subsection}{\numberline {4.2.6}Fehltreffer}{62}{subsection.4.2.6}
-\contentsline {subsection}{\numberline {4.2.7}Cluster}{64}{subsection.4.2.7}
-\contentsline {subsection}{\numberline {4.2.8}Ladungsspektrum}{64}{subsection.4.2.8}
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-\contentsline {subsection}{\numberline {4.2.11}Strahltest}{71}{subsection.4.2.11}
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-\contentsline {section}{\numberline {4.5}Zusammenfassung}{86}{section.4.5}
-\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 15.~Oktober 2013}{87}{chapter.5}
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-\contentsline {subsection}{\numberline {5.1.1}Ladungssammlungseffizienz des Seedpixels}{91}{subsection.5.1.1}
-\contentsline {subsubsection}{\numberline {5.1.1.1}MIMOSA-26-Puzzle}{93}{subsubsection.5.1.1.1}
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-\contentsline {subsubsection}{\numberline {5.2.1.1}Einf\"uhrung}{103}{subsubsection.5.2.1.1}
-\contentsline {subsubsection}{\numberline {5.2.1.2}Rauschen}{104}{subsubsection.5.2.1.2}
-\contentsline {subsubsection}{\numberline {5.2.1.3}Signalantwort auf Photonen}{106}{subsubsection.5.2.1.3}
-\contentsline {subsubsection}{\numberline {5.2.1.4}Signalantwort auf Elektronen}{107}{subsubsection.5.2.1.4}
-\contentsline {subsubsection}{\numberline {5.2.1.5}Signal zu Rauschen}{107}{subsubsection.5.2.1.5}
-\contentsline {subsubsection}{\numberline {5.2.1.6}Interpretation}{109}{subsubsection.5.2.1.6}
-\contentsline {subsubsection}{\numberline {5.2.1.7}Zusammenfassung}{109}{subsubsection.5.2.1.7}
-\contentsline {subsection}{\numberline {5.2.2}Einfluss des Pixelpitches}{110}{subsection.5.2.2}
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-\contentsline {subsubsection}{\numberline {5.2.2.2}Reaktion auf Photonen}{111}{subsubsection.5.2.2.2}
-\contentsline {subsubsection}{\numberline {5.2.2.3}Reaktion auf Elektronen}{114}{subsubsection.5.2.2.3}
-\contentsline {subsubsection}{\numberline {5.2.2.4}Signal zu Rauschen}{116}{subsubsection.5.2.2.4}
-\contentsline {subsubsection}{\numberline {5.2.2.5}Strahlenh\"arte}{117}{subsubsection.5.2.2.5}
-\contentsline {subsection}{\numberline {5.2.3}Moderate K\"uhlung}{119}{subsection.5.2.3}
-\contentsline {section}{\numberline {5.3}Strahlenh\"arte des Prototypsensors f\"ur CBM}{124}{section.5.3}
-\contentsline {subsection}{\numberline {5.3.1}Signalantwort auf Photonen}{124}{subsection.5.3.1}
-\contentsline {subsection}{\numberline {5.3.2}Fehltrefferrate}{126}{subsection.5.3.2}
-\contentsline {subsection}{\numberline {5.3.3}MIMOSA-26 im Strahltest}{127}{subsection.5.3.3}
-\contentsline {subsection}{\numberline {5.3.4}Ionisierende Strahlenh\"arte}{129}{subsection.5.3.4}
-\contentsline {subsection}{\numberline {5.3.5}Zusammenfassung}{132}{subsection.5.3.5}
-\contentsline {section}{\numberline {5.4}Zusammenfassung}{133}{section.5.4}
-\contentsline {section}{\numberline {5.5}Schlussfolgerung}{133}{section.5.5}
-\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 15.~Oktober 2013}{134}{chapter.6}
-\contentsline {section}{\numberline {6.1}Einf\"uhrung}{134}{section.6.1}
-\contentsline {section}{\numberline {6.2}Rauschverhalten}{135}{section.6.2}
+\contentsline {subsection}{\numberline {3.3.3}Wechselwirkung}{43}{subsection.3.3.3}
+\contentsline {subsection}{\numberline {3.3.4}Random Telegraph Signal}{43}{subsection.3.3.4}
+\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 21.~Oktober 2013}{45}{chapter.4}
+\contentsline {section}{\numberline {4.1}Experimenteller Aufbau}{45}{section.4.1}
+\contentsline {subsection}{\numberline {4.1.1}USB-System}{45}{subsection.4.1.1}
+\contentsline {subsection}{\numberline {4.1.2}PXI-System}{46}{subsection.4.1.2}
+\contentsline {subsection}{\numberline {4.1.3}Automatische Datenaufnahme}{46}{subsection.4.1.3}
+\contentsline {subsection}{\numberline {4.1.4}Temperaturkontrolle}{48}{subsection.4.1.4}
+\contentsline {subsection}{\numberline {4.1.5}Radioaktive Quellen}{52}{subsection.4.1.5}
+\contentsline {subsubsection}{\numberline {4.1.5.1}Photonenquellen}{52}{subsubsection.4.1.5.1}
+\contentsline {subsubsection}{\numberline {4.1.5.2}Elektronenquellen}{54}{subsubsection.4.1.5.2}
+\contentsline {section}{\numberline {4.2}Observablen}{55}{section.4.2}
+\contentsline {subsection}{\numberline {4.2.1}Das CDS-Signal}{55}{subsection.4.2.1}
+\contentsline {subsection}{\numberline {4.2.2}Die Grundlinie}{57}{subsection.4.2.2}
+\contentsline {subsection}{\numberline {4.2.3}Thermisches Rauschen}{61}{subsection.4.2.3}
+\contentsline {subsection}{\numberline {4.2.4}Konzept Schwelle}{62}{subsection.4.2.4}
+\contentsline {subsection}{\numberline {4.2.5}Fixed Pattern Noise}{63}{subsection.4.2.5}
+\contentsline {subsection}{\numberline {4.2.6}Fehltreffer}{63}{subsection.4.2.6}
+\contentsline {subsection}{\numberline {4.2.7}Cluster}{65}{subsection.4.2.7}
+\contentsline {subsection}{\numberline {4.2.8}Ladungsspektrum}{65}{subsection.4.2.8}
+\contentsline {subsubsection}{\numberline {4.2.8.1}Photon-Quelle}{65}{subsubsection.4.2.8.1}
+\contentsline {paragraph}{\numberline {4.2.8.1.1}Vetotrigger auf das Seedpixel}{69}{figure.caption.47}
+\contentsline {paragraph}{\numberline {4.2.8.1.2}Trigger auf Gesamtcluster}{69}{figure.caption.48}
+\contentsline {paragraph}{\numberline {4.2.8.1.3}Fe-55-Quelle}{70}{paragraph.4.2.8.1.3}
+\contentsline {paragraph}{\numberline {4.2.8.1.4}Cd-109-Quelle}{70}{paragraph.4.2.8.1.4}
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+\contentsline {paragraph}{\numberline {4.2.8.2.1}Ru-106-Quelle}{71}{paragraph.4.2.8.2.1}
+\contentsline {paragraph}{\numberline {4.2.8.2.2}Sr-90-Quelle}{71}{paragraph.4.2.8.2.2}
+\contentsline {subsection}{\numberline {4.2.9}Verst\"arkung}{71}{subsection.4.2.9}
+\contentsline {subsection}{\numberline {4.2.10}Signal-Rausch-Verh\"altnis}{72}{subsection.4.2.10}
+\contentsline {subsection}{\numberline {4.2.11}Strahltest}{72}{subsection.4.2.11}
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+\contentsline {subsection}{\numberline {4.3.1}Einfluss des Rauschens auf das Ladungsspektrum}{73}{subsection.4.3.1}
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+\contentsline {subsection}{\numberline {4.3.3}Verringerung des Rauschens durch K\"uhlen}{78}{subsection.4.3.3}
+\contentsline {subsubsection}{\numberline {4.3.3.1}Rauschen nach K\"uhlung bis $T=-35~{}^{\circ }\rm C$}{78}{subsubsection.4.3.3.1}
+\contentsline {subsubsection}{\numberline {4.3.3.2}Fe-Spektrum stark bestrahlter Chips nach zus\"atzlicher K\"uhlung}{80}{subsubsection.4.3.3.2}
+\contentsline {section}{\numberline {4.4}Einfluss parasit\"arer Oberfl\"achensch\"aden in mit Reaktorneutronen bestrahlten Sensoren}{82}{section.4.4}
+\contentsline {subsection}{\numberline {4.4.1}Vergleich mit Co-60-bestrahlten Sensoren}{85}{subsection.4.4.1}
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+\contentsline {section}{\numberline {4.5}Zusammenfassung}{87}{section.4.5}
+\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 21.~Oktober 2013}{88}{chapter.5}
+\contentsline {section}{\numberline {5.1}MAPS mit hochohmiger Epitaxieschicht}{88}{section.5.1}
+\contentsline {subsection}{\numberline {5.1.1}Ladungssammlungseffizienz des Seedpixels}{92}{subsection.5.1.1}
+\contentsline {subsubsection}{\numberline {5.1.1.1}MIMOSA-26-Puzzle}{94}{subsubsection.5.1.1.1}
+\contentsline {subsection}{\numberline {5.1.2}Clustergr\"o\IeC {\ss }e}{97}{subsection.5.1.2}
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+\contentsline {subsection}{\numberline {5.1.6}Zusammenfassung}{103}{subsection.5.1.6}
+\contentsline {section}{\numberline {5.2}Toleranz gegen\"uber nicht-ionisierender Strahlung}{103}{section.5.2}
+\contentsline {subsection}{\numberline {5.2.1}Betrieb eines mit 3e14n/cm2 bestrahlten, hochohmigen Sensors}{104}{subsection.5.2.1}
+\contentsline {subsubsection}{\numberline {5.2.1.1}Einf\"uhrung}{104}{subsubsection.5.2.1.1}
+\contentsline {subsubsection}{\numberline {5.2.1.2}Rauschen}{105}{subsubsection.5.2.1.2}
+\contentsline {subsubsection}{\numberline {5.2.1.3}Signalantwort auf Photonen}{107}{subsubsection.5.2.1.3}
+\contentsline {subsubsection}{\numberline {5.2.1.4}Signalantwort auf Elektronen}{108}{subsubsection.5.2.1.4}
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+\contentsline {subsubsection}{\numberline {5.2.2.3}Reaktion auf Elektronen}{115}{subsubsection.5.2.2.3}
+\contentsline {subsubsection}{\numberline {5.2.2.4}Signal zu Rauschen}{117}{subsubsection.5.2.2.4}
+\contentsline {subsubsection}{\numberline {5.2.2.5}Strahlenh\"arte}{118}{subsubsection.5.2.2.5}
+\contentsline {subsection}{\numberline {5.2.3}Moderate K\"uhlung}{120}{subsection.5.2.3}
+\contentsline {section}{\numberline {5.3}Strahlenh\"arte des Prototypsensors f\"ur CBM}{125}{section.5.3}
+\contentsline {subsection}{\numberline {5.3.1}Signalantwort auf Photonen}{125}{subsection.5.3.1}
+\contentsline {subsection}{\numberline {5.3.2}Fehltrefferrate}{127}{subsection.5.3.2}
+\contentsline {subsection}{\numberline {5.3.3}MIMOSA-26 im Strahltest}{128}{subsection.5.3.3}
+\contentsline {subsection}{\numberline {5.3.4}Ionisierende Strahlenh\"arte}{130}{subsection.5.3.4}
+\contentsline {subsection}{\numberline {5.3.5}Zusammenfassung}{133}{subsection.5.3.5}
+\contentsline {section}{\numberline {5.4}Zusammenfassung}{134}{section.5.4}
+\contentsline {section}{\numberline {5.5}Schlussfolgerung}{134}{section.5.5}
+\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 21.~Oktober 2013}{135}{chapter.6}
+\contentsline {section}{\numberline {6.1}Einf\"uhrung}{135}{section.6.1}
+\contentsline {section}{\numberline {6.2}Rauschverhalten}{136}{section.6.2}
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index 6ea5cbe2432ff45a352be334eda97f88f54b778f..30f783f6a4816177b2db29a9fefed6921e3b1106 100755 (executable)
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diff --git a/Doering-PHD-Thesis/Strahlung.tex b/Doering-PHD-Thesis/Strahlung.tex
index a0d805cbb8584abd0f1db43edd6bbd4e93c70c0c..7be05ce0ac491cd7c51ff5490d79a4ea7d564683 100755 (executable)
--- a/Doering-PHD-Thesis/Strahlung.tex
+++ b/Doering-PHD-Thesis/Strahlung.tex
@@ -1,12 +1,17 @@
 %%% ----------------------------------------------------------------------
 \chapter[Strahlenschäden]{Strahlenschäden in Siliziumdetektoren}\label{Strahlung}
-Aus Photonen oder massiven Teilchen bestehende Strahlung wechselwirkt mit Materie und kann dadurch Schäden im Detektor hervorrufen, die als Strahlenschäden bezeichnet werden. Frühere Arbeiten \cite{Moll99,Dev07} zeigten, dass es weniger auf die Zusammensetzung der durch den Detektor fliegenden Teilchen als auf deren Wechselwirkung mit dem Detektor ankommt. Hierbei kann nach Schäden durch nicht-ionisierende Strahlung, auch als Volumenschäden (bulk damage) bezeichnet, und Schäden durch ionisierenden Strahlung, auch Oberflächenschäden (surface damage) genannt, differenziert werden.\newline
+Strahlung, aus Photonen oder massiven Teilchen bestehend, wechselwirkt mit Materie und kann dadurch Schäden im Detektor hervorrufen, die als Strahlenschäden bezeichnet werden. Frühere Arbeiten \cite{Moll99,Dev07} zeigten, es zwei verschiedene Wechselwirkungsmechanismen gibt:
+
+\begin{enumerate}
+       \item Schäden durch nicht-ionisierende Strahlung, auch als Volumenschäden (bulk damage) bezeichnet
+       \item Schäden durch ionisierenden Strahlung, auch als Oberflächenschäden (surface damage) bezeichnet
+\end{enumerate}
 Während die ionisierende Wechselwirkung Ionisationsprozesse bewirkt, führt nicht-ionisierende Wechselwirkung meist durch elastische Stöße zum Herausschlagen von Atomen aus dem Gitter.\newline
 \section[Oberflächenschäden]{Strahlenschäden nach ionisierender Bestrahlung\newline (Oberflächenschäden)}
 \label{ionistrahlung}
-Ionisierend erzeugte Strahlenschäden werden durch in die Elektronenwolke eingebrachte Energie hervorgerufen, die durch geladene Teilchen oder Photonen übertragen wird. Dadurch werden Atome ionisiert, beziehungsweise Atombindungen und Moleküle aufgebrochen. Die Atome bleiben aber an ihrer Position im Kristallgitter. Reine Siliziumkristalle werden durch ionisierende Strahlung nicht beschädigt, da die ionisierten Elektronen durch thermische Elektronen aus dem Leitungsband ersetzt werden können. Im Siliziumdioxid dagegen sammeln sich die positiven Löcher an.\newline
+Ionisierend erzeugte Strahlenschäden werden durch in die Elektronenwolke eingebrachte Energie hervorgerufen, die durch geladene Teilchen oder Photonen übertragen wird. Dadurch werden Atome ionisiert, beziehungsweise Atombindungen und Moleküle aufgebrochen. Die Atome bleiben aber an ihrer Position im Kristallgitter. Reine Siliziumkristalle werden durch ionisierende Strahlung nicht beschädigt, da die fehlenden Elektronen durch thermische Elektronen aus dem Leitungsband ersetzt werden können. Im Siliziumdioxid dagegen sammeln sich die positiven Löcher an.\newline
 
-Die Dosimetrie wird durch den Nachweis der Elektronen der durch die Strahlung ionisierten Atome durchgeführt. Dazu wird die Energie der Elektronen gemessen und daraus auf die Energiedeposition geschlossen. Dabei wird angenommen, dass die durch ionisierende Strahlung erzeugte Defektdichte auch dann lediglich von der Summe des auf das Material übertragenen Energie abhängen, wenn sich die einzelnen ionisierenden Wechselwirkungen im Hinblick auf Energieübertrag und Zeitskala stark unterscheiden \cite{Fuessel}. Angegeben wird die Strahlendosis ionisierender Strahlung deshalb allgemein als Energiedeposition pro Masse der bestrahlten Probe.\newline
+Für die Dosimetrie wird die Energie der herausgeschlagenen Elektronen gemessen und daraus auf die Energiedeposition geschlossen. Dabei wird angenommen, dass die durch ionisierende Strahlung erzeugte Defektdichte auch dann lediglich von der Summe des auf das Material übertragenen Energie abhängen, wenn sich die einzelnen ionisierenden Wechselwirkungen im Hinblick auf Energieübertrag und Zeitskala stark unterscheiden \cite{Fuessel}. Angegeben wird die Strahlendosis ionisierender Strahlung deshalb allgemein als normierte Energiedeposition.\newline
 Die SI-Einheit der Strahlendosis ionisierender Strahlung ist $Gray$, wobei $1~\rm Gy= 1~\rm \frac{J}{kg}$ ist. Die veraltete Einheit $rad$ mit der Umrechnung $1~\rm rad =10^{-2}~\rm Gy$ ist in der Detektorphysik weit verbreitet, so dass in dieser Arbeit die Einheit $rad$ anstatt der SI-Einheit $Gy$ verwendet wird, um eine Konsistenz mit vorherigen Arbeiten zu erhalten.\newline
 
 Irreversible Defekte werden im Siliziumdioxid erzeugt. Ionisierende Strahlen können trotz der relativ großen Bandlücke des Siliziumdioxid von $8,8~\rm eV$ Elektron/Lochpaare erzeugen. Die Beweglichkeit der Elektronen im Material ist höher als die Beweglichkeit der Löcher, so dass die Elektronen in andere Bereiche diffundieren und den Löchern ihre Rekombinationspartner fehlen. Diese diffundieren dadurch zur Grenzschicht und werden mit einer gewissen Wahrscheinlichkeit durch Defekte an der Grenzschicht eingefangen, bevor sie mit einem Elektron aus dem Silizium rekombinieren können. Die positive Ladung sammelt sich an der Grenzfläche und erzeugt elektrische Felder.\newline
@@ -17,7 +22,7 @@ Die positiven Ladungstr
 
 Die induzierten Felder können die elektrischen Eigenschaften der Schaltkreise verändern. So können diese eine Verbindung zwischen Quelle (source) und Abfluss (drain) eines Transistors hervorrufen und dadurch ungewollte Leckströme generieren. Zur Abschirmung der Transistoren haben sich nach \cite{guardrings} spezielle Schutzringe (guard rings) bewährt, die die Anschlüsse des Transistors umgeben. Die Schutzringe selbst bestehen aus dünnem Oxid, das ein Ausheilen der durch die ionisierende Bestrahlung generierten Löcher durch den Tunneleffekt ermöglicht.\newline
 
-Im Siliziumdioxid lassen elektrische Felder die durch ionisierende Strahlung generierten Elektron-Lochpaare in entgegengesetzte Richtung auseinanderdriften. Die Elektron-Lochpaare können dadurch nicht wieder miteinander rekombinieren. Umgekehrt argumentiert, werden ohne elektrische Felder die Elektron-Lochpaare nicht getrennt und können größtenteils wieder rekombinieren. Die während der ionisierenden Bestrahlung generierten Oberflächenschäden sind deshalb in kurzgeschlossenen Detektoren wesentlich geringer. Um die ionisierende Strahlenhärte korrekt zu evaluieren, müssen deswegen die ionisierende Bestrahlungen mit bei der Bestrahlung betriebsfähigen und mit Spannungen versorgten Chips durchgeführt werden. Andernfalls wird die Strahlenhärte im Vergleich zum Anwendungsfall in einem Detektor überschätzt.\newline
+Im Siliziumdioxid lassen elektrische Felder die durch ionisierende Strahlung generierten Elektron-Lochpaare in entgegengesetzte Richtung auseinanderdriften. Die Elektron-Lochpaare können dadurch nicht wieder miteinander rekombinieren. Umgekehrt argumentiert, werden ohne elektrische Felder die Elektron-Lochpaare nicht getrennt und können größtenteils wieder rekombinieren. Die während der ionisierenden Bestrahlung generierten Oberflächenschäden sind deshalb in kurzgeschlossenen Detektoren wesentlich geringer. Um die ionisierende Strahlenhärte korrekt zu evaluieren, müssen deswegen die Oberflächenschäden mit bei der Bestrahlung betriebsfähigen und mit Spannungen versorgten Chips erzeugt werden. Andernfalls wird die Strahlenhärte im Vergleich zum Anwendungsfall in einem Detektor überschätzt.\newline
 
 
   
@@ -39,25 +44,25 @@ Im Siliziumdioxid lassen elektrische Felder die durch ionisierende Strahlung gen
 \begin{figure}
 \centering
                \includegraphics[width=1\textwidth]{Bilder/cluster-moll.pdf}
-               \caption[Defekterzeugung entlang einer Teilchenspur]{Ein Teilchen bewegt sich durch Silizium, zerfällt in drei Reaktionsprodukte und wird letztlich durch Stoßprozesse gestoppt. Entlang seiner Trajektorie generiert es einzelne Punktdefekte, die sich, kurz bevor das Teilchen gestoppt wird, lokal häufen und komplexe Defektcluster bilden. Die Simulation wurde aus \cite{Moll99} entnommen.}
+               \caption[Defekterzeugung entlang einer Teilchenspur]{Ein Teilchen bewegt sich durch Silizium, zerfällt in drei Reaktionsprodukte und wird letztlich durch Stoßprozesse gestoppt. Entlang seiner Trajektorie generiert es einzelne Punktdefekte, die sich, kurz bevor das Teilchen gestoppt wird, lokal häufen und komplexe Defektcluster bilden. Aus \cite{Moll99} entnommen.}
        \label{fig:cluster}
 \end{figure}
 \begin{figure}
 \centering
                \includegraphics[width=0.8\textwidth]{Bilder/niel-moll.pdf}
-               \caption[Schadenswirkungsquerschnitt $D(E)$ als Funktion der Teilchenenergie]{Der Schadenswirkungsquerschnitt $D(E)$ wird für Neutronen, Protonen, Pionen und Elektronen gegen die Teilchenenergie aufgetragen. Für eine Erläuterung wird an den Text verwiesen. Die Abbildung wurde aus \cite{Moll99} entnommen.}
+               \caption[Schadenswirkungsquerschnitt $D(E)$ als Funktion der Teilchenenergie]{Der Schadenswirkungsquerschnitt $D(E)$ wird für Neutronen, Protonen, Pionen und Elektronen gegen die Teilchenenergie aufgetragen. Die Abbildung wurde aus \cite{Moll99} entnommen.}
        \label{fig:niel}
 \end{figure}
 %Schnelle Neutronen mit einer kinetischen Energie von $T=1~\rm MeV$ haben einen Impuls von \newline \mbox{$43,4~\rm \frac{MeV}{c}\gg p_{min~Neutron}$}. Damit kann ein Neutron dieser Energie ein Siliziumatom aus dem Gitter stoßen. Röntgenphotonen einer Energie von $E=60~\rm keV$ haben dagegen einen um eine Größenordnung kleineren Impuls von \mbox{$0,06~\rm \frac{MeV}{c}\ll p_{min~Photon}$}. Ein Röntgenphoton kann somit im Gegensatz zu einem schnellen Neutron ein Siliziumatom nicht aus dem Gitter stoßen.\newline
-Schnelle Neutronen können im Gegensatz zu Röntgenphotonen ein Siliziumatom aus dem Gitter schlagen \cite{Lutz}. Das Herausschlagen erzeugt ein freies Atom und eine Fehlstelle. Beide diffundieren durch den Kristall und bilden Punktdefekte. Das herausgeschlagene Atom kann seine Energie durch weitere Stöße abgeben und dadurch weitere Strahlenschäden verursachen. Dabei verlangsamt es sich mit zunehmender Zahl von Stößen. Ab einem bestimmten Punkt wird das rückgestoßene Atom so langsam, dass es, fast gestoppt, lokal eine große Anzahl an Defekten generiert, die sich zu komplexen Defektclustern zusammenschließen können (Abbildung \ref{fig:cluster}).\newline
-Sowohl Punktdefekte als auch Defektcluster sind für verschiedene Strahlenschäden verantwortlich. Eine genaue Klassifizierung der Defekte kann mit verschiedenen Verfahren wie zum Beispiel \textit{Deep Level Transient Spectroscopy} (DLTS) und \textit{Thermally Stimulated Current} (TSC) durchgeführt werden (siehe \cite{Moll99}).\newline
+Schnelle Neutronen können im Gegensatz zu Röntgenphotonen ein Siliziumatom aus dem Gitter schlagen \cite{Lutz}. Das Herausschlagen erzeugt ein freies Atom und eine Fehlstelle. Beide diffundieren durch den Kristall und bilden Punktdefekte. Das herausgeschlagene Atom kann seine Energie durch weitere Stöße abgeben und dadurch weitere sekundäre Strahlenschäden verursachen. Dabei verlangsamt es sich mit zunehmender Zahl von Stößen. Ab einem bestimmten Punkt wird das rückgestoßene Atom so langsam, dass es, fast gestoppt, lokal eine große Anzahl an Defekten generiert, die sich zu komplexen Defektclustern zusammenschließen können (Abbildung \ref{fig:cluster}).\newline
+Sowohl Punktdefekte als auch Defektcluster sind für verschiedene Strahlenschäden verantwortlich. Eine genaue Klassifizierung der Defekte kann mit verschiedenen Verfahren wie zum Beispiel der \textit{Deep Level Transient Spectroscopy} (DLTS) und dem \textit{Thermally Stimulated Current} (TSC) durchgeführt werden (siehe \cite{Moll99}).\newline
 
-Die NIEL-Hypothese beschreibt die Entstehung von Strahlenschäden durch elastische Stöße und Kernwechselwirkung \cite{Vas}. Die Hauptannahme der NIEL-Hypothese ist, dass die Strahlenschädigung eines Materials proportional zum nicht-ionisierenden Energieverlust des einfallenden Teilchens ist. Sie ist unabhängig davon, wie sich die Energie im Detail aufteilt. Ausheilung und Kernumwandlungen werden im NIEL-Modell nicht berücksichtigt. \newline
+Die NIEL-Hypothese beschreibt die Entstehung von Strahlenschäden durch elastische Stöße und Kernwechselwirkung \cite{Vas}. Die Annahme der NIEL-Hypothese ist, dass die Strahlenschädigung eines Materials proportional zum nicht-ionisierenden Energieverlust der einfallenden Teilchen ist. Sie ist unabhängig davon, wie sich die Energie im Detail aufteilt. Ausheilung und Kernumwandlungen werden im NIEL-Modell nicht berücksichtigt. \newline
 Bei jeder Wechselwirkung, die zu einem Strahlenschaden führt, wird auf das Atom eine spezifische Rückstoßenergie $E_R$ übertragen. Diese kann als sogenannte \textit{Lindhard partition function} $P(E_R)$ berechnet werden \cite{Laz}. Damit lässt sich der Wirkungsquerschnitt $D(E)$, auch Schadensfunktion genannt, berechnen zu:
 \begin{equation}
        D(E):= \sum_{\nu} \sigma_{\nu}(E)\cdot \int_0^{E_R^{max}} f_{\nu}(E,E_R)P(E_R)dE_R
 \end{equation}
-Der Index $\nu$ indiziert alle möglichen Wechselwirkungen zwischen dem einschlagenden Teilchen der Energie $E$ und den Siliziumatomen im Gitter. $\sigma_{\nu}$ ist der Wirkungsquerschnitt der jeweiligen Reaktion $\nu$, während $f_{\nu}(E,E_R)$ die Wahrscheinlichkeit angibt, mit der ein Atom mit der Rückstoßenergie $E_R$ in der Reaktion $\nu$ aus seiner Gitterposition herausgeschlagen wird. Eine Integration wird über alle Rückstoßenergien bis zur Schwelle $E_d$ durchgeführt. Unterhalb der Schwelle $E_d$ reicht die Energie nicht zu einem Herausstoßen eines Atoms aus. Deshalb ist $P(E_R<E_d)=0$.\newline
+Der Index $\nu$ indiziert alle möglichen Wechselwirkungen zwischen dem einschlagenden Teilchen der Energie $E$ und den Siliziumatomen im Gitter. $\sigma_{\nu}$ ist der Wirkungsquerschnitt der jeweiligen Reaktion $\nu$, während $f_{\nu}(E,E_R)$ die Wahrscheinlichkeit angibt, mit der ein Atom mit der Rückstoßenergie $E_R$ in der Reaktion $\nu$ aus seiner Gitterposition herausgeschlagen wird. Eine Integration wird über alle Rückstoßenergien bis zur Schwelle $E_d$ durchgeführt. Unterhalb der Schwelle $E_d$ reicht die Energie nicht aus, ein Atom herauszustoßen. Deshalb ist $P(E_R<E_d)=0$.\newline
 
 Abbildung \ref{fig:niel} zeigt die Schadensfunktion $D(E)$ für Neutronen, Pionen, Elektronen und Protonen über einen weiten Energiebereich von $0,1 ~\rm meV$ bis $10~\rm GeV$. Der Verlauf der Schadensfunktion für die verschiedenen Teilchen wird in \cite{Vas} und \cite{Huh} erläutert. Bei Protonen dominiert im niedrigen Energienbereich bis zu einer Energie von $1~\rm MeV$ die Coulombwechselwirkung. Ab einer Energie von $1~\rm MeV$ spielen Kernwechselwirkungen die entscheidende Rolle. Bei steigender Energie nähern sich aufgrund der Isospinsymmetrie die Wirkungsquerschnitte von Protonen und Neutronen an. Von einigen Resonanzen abgesehen fällt der Wirkungsquerschnitt bei Neutronen unterhalb einer Energie von $1~\rm MeV$ ab. Dabei bildet sich ein Minimum bei $100~ \rm eV$, nach dem der Wirkungsquerschnitt wieder ansteigt. \newline
 Der Wirkungsquerschnitt kann mit Gleichung \ref{kappa} als Härtefaktor $\kappa$ auf eine monoenergetische Energie von $1~ \rm MeV$ normiert werden \cite{Moll99}.
@@ -66,11 +71,11 @@ Der Wirkungsquerschnitt kann mit Gleichung \ref{kappa} als H
 \label{kappa}  
 \end{equation}
 Für $D(E_n=1~\rm MeV)$ wird $95~\rm MeV~mb$ angenommen \cite{Moll99}.\newline
-Der äquivalente Neutronenfluss in der Einheit $\frac{n_{eq}}{s~cm^2}$ wird damit durch Integration über die Energien berechnet.
+Der äquivalente Neutronenfluss in der Einheit $n_{eq}~s^{-1}~cm^{-2}$ wird damit durch Integration über die Energien berechnet.
 \begin{equation}
        \Phi_{eq}=\kappa\Phi=\kappa \int \Phi(E)dE
 \end{equation}
-Mit der Bestrahlungszeit $t_{Bestrahlung}$ ergibt sich im nächsten Schritt die Neutronenbestrahlungsdosis $d_{non-io}$ in der Einheit $\frac{n_{eq}}{cm^2}$, die letztlich als Größe zur Quantifizierung der nicht-ionisierenden Bestrahlungsdosis verwendet wird.
+Mit der Bestrahlungszeit $t_{Bestrahlung}$ ergibt sich im nächsten Schritt die Neutronenbestrahlungsdosis $d_{non-io}$ in der Einheit $\neqcm$, die letztlich als Größe zur Quantifizierung der nicht-ionisierenden Bestrahlungsdosis verwendet wird.
 \begin{equation}
        d_{non-io}=t_{Bestrahlung}\cdot \Phi_{eq}
 \end{equation}
@@ -78,7 +83,7 @@ Die Defekte aufgrund von Volumensch
 Experimentell wurde nach \cite{Dev07} für die Rekombinationsrate eine Exponentialabhängigkeit und für den Leckstrom nach \cite{Moll99} eine lineare Abhängigkeit von der nicht-ionisierenden Bestrahlungsdosis nachgewiesen (siehe Abschnitt \ref{Strahlenschäden nach Neutronenbestrahlung}). \newline
 
 \section{Bekannte Strahlenschäden an MAPS}
-Parallel zur Forschung und Entwicklung von MAPS für Detektoranwendungen wurden bereits seit 1999 umfangreiche Strahlenhärtestudien durchgeführt. Insbesondere die Wirkung von Volumen- oder Oberflächenschäden auf die Eigenschaften der Sensoren bei verschiedenen Arten von Prototypen waren Themen vorangegangener Arbeiten, die in den folgenden Abschnitten kurz zusammengefasst werden. \newline
+Parallel zur Forschung und Entwicklung von MAPS für Detektoranwendungen wurden bereits seit 1999 umfangreiche Strahlenhärtestudien durchgeführt. Insbesondere die Wirkung von Volumen- oder Oberflächenschäden auf die Eigenschaften der Sensoren bei verschiedenen Prototypen waren Themen vorangegangener Arbeiten, die in den folgenden Abschnitten kurz zusammengefasst werden. \newline
 \subsection[Oberflächenschäden]{Oberflächenschäden in MAPS}
 \begin{figure} 
 \centering \mbox{ 
@@ -97,7 +102,7 @@ Parallel zur Forschung und Entwicklung von MAPS f
 \begin{figure}
 \centering
                \includegraphics[width=0.7\textwidth]{Bilder/IonizingOxidGuard.pdf}
-               \caption{Effekt von dünnem Oxid und Schutzringen auf das Rauschen nach ionisierender Bestrahlung \cite{Amar07}}
+               \caption{Effekt von dünnen Oxidschichten und Schutzringen auf das Rauschen nach ionisierender Bestrahlung \cite{Amar07}}
        \label{fig:IonizingOxidGuard}
        
 \end{figure}
@@ -109,7 +114,7 @@ Parallel zur Forschung und Entwicklung von MAPS f
        
 \end{figure}
 Strahlenhärtestudien zu Oberflächenschäden wurden von \cite{Dep02}, \cite{Devxraypaper}, \cite{Dev07}, \cite{DoeringMaster} und \cite{Amar07} durch Bestrahlung mit $\sim 10~\rm keV$ Röntgenstrahlung durchgeführt.\newline
-Eine Auswahl der Ergebnisse aus \cite{Amar07} zeigt Abbildung \ref{fig:samirxray}. Die Sensoren MIMOSA-11 und \mbox{MIMOSA-15} wurden bis zu einer Dosis von $1~\rm MRad $ bestrahlt und unterschiedlichen Temperaturen betrieben. Der Leckstrom erhöht sich bei $T=+20~{}^{\circ}\rm C$ von $(8\pm3)~\rm fA$ auf $(75\pm5)~\rm fA$. Auch das Rauschen erhöht sich. Es wurde bei $T=-20~{}^{\circ}\rm C$ ein Anstieg von $(9,5\pm1,1)~\rm e$ auf $(17,0\pm1,6)~\rm e$ sowie bei $T=+20~{}^{\circ}\rm C$ eine Erhöhung von $(16,6\pm1,6)~\rm e$ auf $(30,9\pm0,8)~\rm e$ beobachtet. Aus dem geringeren Anstieg des Rauschens bei $T=-20~{}^{\circ}\rm C$ wird geschlossen, dass es günstig sein kann, die Sensoren zu kühlen. Der Autor vermutet als Grund für den Anstieg des Leckstromes und des Rauschens positive Ladungsträger nahe der Silizium-Siliziumdioxidgrenzfläche, die Kanäle zusätzlichen Ladungsflusses öffnen könnten. Abhilfe schaffen, wie in Abschnitt \ref{ionistrahlung} ausgeführt, dünnes Siliziumdioxid und Schutzringe um die Kontakte der Transistoren, so dass eine Strahlenhärte bei entsprechend optimierten Sensoren von bis zu $1~\rm MRad $ erreicht wird. Abbildung \ref{fig:IonizingOxidGuard} zeigt das Rauschen einer Matrix mit dickem und dünnen Oxid. Das Rauschen verringert sich durch das Einführen des dünnen Oxids bei $T=+40\C$ von $(57\pm5)\e$ auf $(41\pm3)\e$ Das Einbinden eines zusätzlichen Schutzringes verringert das Rauschen auf nur noch $(32\pm3)\e$.   \newline
+Eine Auswahl der Ergebnisse aus \cite{Amar07} zeigt Abbildung \ref{fig:samirxray}. Die Sensoren MIMOSA-11 und \mbox{MIMOSA-15} wurden bis zu einer Dosis von $1~\rm MRad $ bestrahlt und unterschiedlichen Temperaturen betrieben. Der Leckstrom erhöht sich bei $T=+20~{}^{\circ}\rm C$ von $(8\pm3)~\rm fA$ auf $(75\pm5)~\rm fA$. Auch das Rauschen erhöht sich. Es wurde bei $T=-20~{}^{\circ}\rm C$ ein Anstieg von $(9,5\pm1,1)~\rm e$ auf $(17,0\pm1,6)~\rm e$ sowie bei $T=+20~{}^{\circ}\rm C$ eine Erhöhung von $(16,6\pm1,6)~\rm e$ auf $(30,9\pm0,8)~\rm e$ beobachtet. Aus dem geringeren Anstieg des Rauschens bei $T=-20~{}^{\circ}\rm C$ wird geschlossen, dass es günstig sein kann, die Sensoren zu kühlen. Als Grund für den Anstieg des Leckstromes und des Rauschens werden positive Ladungsträger nahe der Silizium-Siliziumdioxidgrenzfläche vermutet, die Kanäle zusätzlichen Ladungsflusses öffnen könnten. Abhilfe schaffen, wie in Abschnitt \ref{ionistrahlung} ausgeführt, dünnes Siliziumdioxid und Schutzringe um die Kontakte der Transistoren, so dass eine Strahlenhärte bei entsprechend optimierten Sensoren von bis zu $1~\rm MRad $ erreicht wird. Abbildung \ref{fig:IonizingOxidGuard} zeigt das Rauschen einer Matrix mit dicken und dünnen Oxidschichten. Das Rauschen verringert sich durch das Einführen der dünnen Oxidschicht bei $T=+40\C$ von $(57\pm5)\e$ auf $(41\pm3)\e$ Das Einbinden eines zusätzlichen Schutzringes verringert das Rauschen auf nur noch $(32\pm3)\e$.   \newline
 Der Anstieg des Leckstroms bei SB-Pixel lässt sich nur indirekt über die Nachladekonstante messen. Die Nachladekonstante verringert sich von $(80\pm 40)~\rm ms$ auf $5~\rm ms$ \cite{Amar07}. Der Autor schlussfolgert indirekt aus diesem Ergebnis, dass sowohl der Leckstrom als auch der Nachladestrom exponentiell ansteigen und der Anstieg des Leckstroms dadurch ausgeglichen wird. Der höhere Nachladestrom erschwert allerdings die Signalidentifikation. Bei einem kleinen Nachladestrom wird ein Signal nur langsam ausgeglichen, die Nachladekonstante ist wie beobachtet groß. Ist dagegen der Nachladestrom groß, wird ein Signal sehr schnell ausgeglichen, die Nachladekonstante ist wie beobachtet klein. Eine kleine Nachladekonstante führt dazu, dass die Diode im Grenzbereich der Strahlentoleranz das Signal immer mehr auslöscht, bis es nicht mehr identifiziert werden kann.\newline
 \begin{figure}
 \centering
@@ -118,7 +123,7 @@ Der Anstieg des Leckstroms bei SB-Pixel l
        \label{fig:RESMDD2010Annealing}
        
 \end{figure}
-Der Leckstrom und das Rauschen von ionisierenden Strahlenschäden kann durch thermische Ausheilung verringert werden. Nach \cite{DoeringMaster} und \cite{RESMDD2010} (Abbildung \ref{fig:RESMDD2010Annealing}) erhöht sich der bei $T_{Measured}=+20\C$ gemessene Leckstrom von MIMOSA-19 nach $200krad$ Bestrahlungsdosis von wenigen fA auf $425 fA$. Eine anschließende 280 stündige Lagerung bei Raumtemperatur verringert diesen bereits um $20\%$. Ein Aufheizen des Sensors auf $80\C$ führt zu einer Ausheilen bis nach weiteren 60 Stunden bei $80\C$ ein Leckstrom von $125~\rm fA$ erreicht wird. Dies gilt nach \cite{DoeringMaster} ebenfalls in Anwesenheit von zusätzlichen Volumenschäden. \newline
+Der Leckstrom und das Rauschen von ionisierenden Strahlenschäden kann durch thermische Ausheilung verringert werden. Nach \cite{DoeringMaster} und \cite{RESMDD2010} (Abbildung \ref{fig:RESMDD2010Annealing}) erhöht sich der bei $T_{Measured}=+20\C$ gemessene Leckstrom von MIMOSA-19 nach $200~\rm krad$ Bestrahlungsdosis von wenigen fA auf $425 fA$. Eine anschließende 280 stündige Lagerung bei Raumtemperatur verringert diesen bereits um $20\%$. Ein Aufheizen des Sensors auf $80\C$ führt zu einem Ausheilen bis nach weiteren 60 Stunden bei $80\C$ ein Leckstrom von $125~\rm fA$ erreicht wird. Dies gilt nach \cite{DoeringMaster} ebenfalls in Anwesenheit von zusätzlichen Volumenschäden. \newline
   
 Ein Einfluss ionisierender Strahlung auf die Ladungssammlungseffizienz wie nach nicht-ionisierender Bestrahlung wird laut \cite{Dev07} ausgeschlossen, da Ionisationen im Silizium reversibel sind. Dies muss allerdings für mindestens MIMOSA-2 eingeschränkt werden. Bei diesen speziellen Sensoren wurde unerwarteterweise ein Einbruch der Ladungssammlungseffizienz nach Röntgenbestrahlung einer Dosis von $400~\rm kRad $ beobachtet. Abbildung \ref{fig:MichMi2} zeigt das damals gemessene Ladungsspektrum. Der Sammelpeak bricht von $200~\rm ADC$ auf circa $100~\rm ADC$ ein, während sich der Kalibrationspeak und damit die Verstärkung nicht signifikant ändert. Die Verringerung der Ladungssammlungseffizienz von MIMOSA-2 nach Röntgenbestrahlung wird in \cite{Dev07} auf einen Durchbruch der P-Senke aufgrund der positiven Ladung zurückgeführt, so dass in der Epitaxieschicht diffundierende Elektronen auch vom Resettransistor gesammelt werden können, nicht zum Signal beitragen und dadurch eine Verringerung der Ladungssammlungseffizienz hervorrufen. \newline
 
@@ -139,7 +144,7 @@ Damit wird nach einer ionisierenden Bestrahlung beobachtet, dass der Leckstrom b
      \label{fig:alexneutron}  
 \end{minipage} 
 \end{figure}
-Die Strahlenhärte von MAPS in Bezug auf Volumenschäden wurde erstmals in \cite{Devneutronpaper} beschrieben. Weitere Informationen können auch den Arbeiten \cite{Dev07}, \cite{Amar07} und \cite{Alex08} entnommen werden. Die Arbeiten beziehen sich allerdings ausschließlich auch niedrigohmige MAPS. Die Autoren kommen übereinstimmend zu dem Ergebnis, dass sich durch Volumenschäden die Rekombinationsrate erhöht, und gleichzeitig der Leckstrom und das Rauschen ansteigen.\newline
+Die Strahlenhärte von MAPS in Bezug auf Volumenschäden wurde erstmals in \cite{Devneutronpaper} beschrieben. Weitere Informationen können auch den Arbeiten \cite{Dev07}, \cite{Amar07} und \cite{Alex08} entnommen werden. Die Arbeiten beziehen sich allerdings ausschließlich auf niedrigohmige MAPS. Die Autoren kommen übereinstimmend zum Ergebnis, dass sich durch Volumenschäden die Rekombinationsrate erhöht, und gleichzeitig der Leckstrom und das Rauschen ansteigen.\newline
 
 Ein aussagekräftiges Beispiel kann \cite{Alex08} entnommen werden. Durchgeführt wurde diese Studie an MIMOSA-19 bei $T=-20~{}^{\circ}\rm C$ und $T=+20~{}^{\circ}\rm C$ bis zu einer maximalen Dosis von $1,95 \cdot 10^{13}\frac{n_{eq}}{cm^2}$. Eine Auswahl der Resultate zeigt Abbildung \ref{fig:alexneutron}. Bei $T=+20~{}^{\circ}\rm C$ verringert sich die Ladungssammlungseffizienz eines MIMOSA-19 von $84\%$ auf $67\%$. Der Leckstrom steigt von wenigen $\rm fA$ auf bis zu $60~\rm fA$. Das Rauschen steigt von $20~\rm e$ auf über $40~\rm e$. Das bei $-20~{}^{\circ}\rm C$ gemessene Rauschen steigt im Vergleich dazu nur leicht an. Der Autor erklärt die Verringerung der Ladungssammlungseffizienz nach nicht-ionisierender Bestrahlung mit einer erhöhten Defektkonzentration, so dass diffundierende Elektronen eine höhere Rekombinationswahrscheinlichkeit besitzen. Diese Defekte werden weiterhin als Quelle für den erhöhten Leckstrom und das Rauschen angegeben. Darüber hinaus wird aus dem bei $-20~{}^{\circ}\rm C$ wesentlich geringeren Anstieg des Rauschens geschlossen, dass die Kühlung der Sensoren eine Lösung sein könnte, die Volumenschäden tolerieren zu können.\newline
 Unter der Annahme, dass die durch die Bestrahlung induzierten Defekte für eine Erhöhung des Leckstroms verantwortlich sind, kann nach \cite{Moll99} für verarmte Sensoren eine lineare Parametrisierung der Abhängigkeit des Leckstromes von der Bestrahlungsdosis $\Phi_{eq}$ durchgeführt werden.
@@ -159,7 +164,7 @@ Die Auswirkungen von Volumensch
 
 
 \subsection{Wechselwirkung}
-Oberflächenschäden entstehen an der Silizium-Siliziumdioxidoberfläche, während Volumenschäden in der Epitaxieschicht auftreten. Allerdings haben beide zum Teil die gleichen Effekte auf die Observablen. So erhöhen beide den Leckstrom und das Rauschen. Um die Mechanismen möglichst unbeeinflusst voneinander zu studieren und dann beurteilen zu können, ob ein Design eher die ionisierende oder nicht-ionisierende Strahlenhärte verbessert, werden diese getrennt bestrahlt. In der Anwendung als Detektor treten beide Strahlenschäden gleichzeitig auf. In \cite{DoeringMaster} wurde deshalb ein Sensor mit beiden Arten bestrahlt und mit der jeweils einzelnen Bestrahlung verglichen. Es zeigte sich, dass es nur eine kleine zu vernachlässigende zusätzliche Komponente im Leckstrom gibt und sich ansonsten die Effekte der Strahlenschäden addieren. Auch eine thermische Ausheilung wurde durchgeführt und damit die Strategie überprüft, Effekte von Oberflächenschäden durch zeitweises Aufheizen der Sensoren auch in Anwesenheit von Volumenschäden abzumildern. \newline
+Oberflächenschäden entstehen an der Silizium-Siliziumdioxidoberfläche, während Volumenschäden in der Epitaxieschicht auftreten. Allerdings haben beide zum Teil die gleichen Effekte auf die Observablen. So erhöhen beide den Leckstrom und das Rauschen. Um die Mechanismen möglichst unbeeinflusst voneinander zu studieren und dann beurteilen zu können, ob ein Design eher die ionisierende oder nicht-ionisierende Strahlenhärte verbessert, werden die Schäden getrennt erzeugt. In der Anwendung als Detektor treten beide Strahlenschäden allerdings gleichzeitig auf. In \cite{DoeringMaster} wurde deshalb ein Sensor mit beiden Arten bestrahlt und mit der jeweils einzelnen Bestrahlung verglichen. Es zeigte sich, dass es nur eine kleine zu vernachlässigende zusätzliche Komponente im Leckstrom gibt und sich ansonsten die Effekte der Strahlenschäden addieren. Auch eine thermische Ausheilung wurde durchgeführt und damit die Strategie etabliert, Effekte von Oberflächenschäden durch zeitweises Aufheizen der Sensoren auch in Anwesenheit von Volumenschäden abzumildern. \newline
 \subsection{Random Telegraph Signal}
 \begin{figure}
 \centering
@@ -177,14 +182,14 @@ Die Strahlenh
 Zur Durchführung der Messungen stehen zwei Messstände zur Verfügung. Ein seit 2007 in Betrieb befindliches USB-System und ein 2013 neu eingerichtetes PXI-System (Abbildung \ref{fig:messaufbau}). Beide Systeme verfügen über eine eigene Kühlinfrastruktur und können unabhängig voneinander, parallel, betrieben werden. \newline
 \subsection{USB-System}
 \label{elektronik} 
-Das USB-System wurde am IPHC Straßburg entwickelt und als MAPS-Messstand im Technologielabor des Institut für Kernphysik Frankfurt (IKF) seit 2007 eingesetzt. Der den Sensor beinhaltende Chip wird auf eine Testkarte (device testboard) gebondet. Die Hauptaufgabe der Testkarte ist die Weiterleitung der Spannungen und Auslesesignale sowie eine Rauschfilterung der Referenzspannungen. Zusätzlich ermöglicht die Testkarte eine Handhabung, ohne den empfindlichen Chip zu berühren. Eine Hilfskarte (auxiliary board) versorgt die Testkarte über ein Flachbandkabel mit den erforderlichen Spannungen und verbindet sie weiterhin mit einer oder zwei parallelen USB-Karten (imager board), welche als AD-Wandler und zur Erzeugung der Kontrollsignale mit Hilfe eines FPGAs dient. Eine zusätzliche JTAG-Karte (JTAG board) dient zur Programmierung des Sensors. Die USB-Karten, die über insgesamt acht Auslesekanäle verfügen, können über eine Software mit einem Standard-PC gesteuert werden. Mit dieser können die elektronischen Parameter der Messung angepasst werden sowie die Datenspeicherung auf Festplatten durchgeführt werden. Die anschließende Datenanalyse wird mit Mathematica 5.1 und ROOT durchgeführt.\newline
+Das USB-System wurde am IPHC Straßburg entwickelt und als MAPS-Messstand im Technologielabor des Institut für Kernphysik Frankfurt (IKF) seit 2007 eingesetzt. Der den Sensor beinhaltende Chip wird auf eine Testkarte (device testboard) gebondet. Die Hauptaufgabe der Testkarte ist die Weiterleitung der Spannungen und Auslesesignale sowie eine Rauschfilterung der Referenzspannungen. Zusätzlich ermöglicht die Testkarte eine Handhabung, ohne den empfindlichen Chip zu berühren. Eine Hilfskarte (auxiliary board) versorgt die Testkarte über ein Flachbandkabel mit den erforderlichen Spannungen und verbindet sie weiterhin mit einer oder zwei parallelen USB-Karten (imager board), welche als AD-Wandler und zur Erzeugung der Kontrollsignale mit Hilfe eines FPGAs dient. Eine zusätzliche JTAG-Karte (JTAG board) dient zur Programmierung des Sensors. Die USB-Karten, die über insgesamt acht Auslesekanäle verfügen, können über eine Software mit einem Standard-PC gesteuert werden. Mit dieser können die Chipparameter angepasst sowie die Datenspeicherung auf Festplatten durchgeführt werden. Die anschließende Datenanalyse wird mit Mathematica 5.1 und ROOT durchgeführt.\newline
 \subsection{PXI-System}
 Ein zweiter Strahlenhärtemessstand wurde 2013 auf Basis des National Instruments PXI-Systems eingerichtet. Dieses hat den Vorteil mit 16 Auslesekanälen die Statistik zu verdoppeln. Weiterhin ermöglicht die PXI-Verbindung eine höhere Datenrate. Beides resultiert in einer deutlich verbesserten Statistik.\newline
 Die Testkarte, auf die der Chip gebondet ist, wird über Flachbandkabel an eine zweite, baugleiche Hilfskarte angeschlossen, die über eine Zwischenkarte (interface board) mit der Flex-Riokarte des National Instruments PXI-Systems verbunden ist. Die Datenanalyse wird anschließend mit ROOT durchgeführt.\newline
 \subsection{Automatische Datenaufnahme}
 Die automatische Datenaufnahme erleichtert die Durchführung systematischer Strahlenhärtestudien. Diese ermöglicht es die Matrizen eines Chips automatisch durchzumessen. Dazu werden in einer Datenbank die Messparameter festgelegt und ein Skript programmiert anhand dieser die JTAG-Kette, Auslesesoftware, Temperatur und externe Frequenz. Wünschenswert, allerdings noch nicht umgesetzt, ist eine automatische Positionierung der radioaktiven Quellen und Chipaustausch. \newline
-Das große Potential der automatischen Datenaufnahme für eine Strahlenhärtestudie wird an MIMOSA-32 deutlich. Dieser Chip hat 32 Matrizen, die bei mindestens drei Temperaturen vermessen werden müssen. Die Messung eines Fe-55-Spektrums erfordert $1~\rm M$ Auslesezyklen, so dass eine Messung 3-4 Stunden dauert. Ohne automatische Datenaufnahme muss der Chip entsprechend alle 3-4 Stunden neu programmiert werden, so dass pro Arbeitstag im Schnitt nur 2-3 Messungen durchgeführt werden können. Die automatische Datenaufnahme übernimmt dies, so dass nach dem Start mit einem Mausklick nach $32\cdot3\cdot4~\rm h=384~\rm h=16~\rm d$ die Messungen durchgeführt sind.\newline
-Auch systematische Messscanns werden vereinfacht. Beispielsweise sollte die Integrationszeit systematisch über den externen Frequenzgenerator variiert werden. Eine Messung benötigte hier zwar nur $1~\rm k$ Auslesezyklen und damit nur wenige Minuten, allerdings waren 90 Messungen durchzuführen, was in einer Messkampagne von fünf Stunden resultiert, in der eine Arbeitskraft nur mit Messungen Durchführen gebunden wird. Die automatische Datenaufnahme kann auch diese Aufgabe übernehmen.\newline
+Das große Potential der automatischen Datenaufnahme für eine Strahlenhärtestudie wird an MIMOSA-32 deutlich. Dieser Chip hat 32 Matrizen, die bei mindestens drei Temperaturen vermessen werden müssen. Die Messung eines Fe-55-Spektrums erfordert 1 Million Auslesezyklen, so dass eine Messung vier Stunden dauert. Ohne automatische Datenaufnahme muss der Chip entsprechend alle vier Stunden neu programmiert werden, so dass pro Arbeitstag im Schnitt nur drei Messungen durchgeführt werden können. Die gesamte Messkampagne würde entsprechend $32\cdot3/3~\rm d=32~\rm d$ dauern. Die automatische Datenaufnahme übernimmt dies, so dass nach dem Start mit einem Mausklick nach $32\cdot3\cdot4~\rm h=384~\rm h=16~\rm d$ die Messungen durchgeführt sind.\newline
+Auch systematische Studien werden vereinfacht. Beispielsweise sollte die Integrationszeit systematisch über den externen Frequenzgenerator variiert werden. Eine Messung benötigte hier zwar nur $1~\rm k$ Auslesezyklen und damit nur wenige Minuten, allerdings waren 90 Messungen durchzuführen, was in einer Messkampagne von fünf Stunden resultiert, in der eine Arbeitskraft nur mit Messungen Durchführen gebunden wird. Die automatische Datenaufnahme kann auch diese Aufgabe übernehmen.\newline
 Darüber hinaus werden menschliche Fehler in der Durchführung des Messprotokolls weitesgehend vermieden und eventuell auftretende Fehler sind besser reproduzierbar oder dank umfassender automatischen Dokumentation leicht nachvollziehbar.\newline  
 Das Skript führt im USB-System folgende Routine aus:
 
@@ -197,15 +202,15 @@ Das Skript f
                \item Setzen der Sollwerttemperatur
                \item Kontrollieren, ob die Isttemperatur die Sollwerttemperatur $\pm 0,5\C$ erreicht hat
                \item Eine Zeit $t_{wait}$ warten, bis die Temperatur des Sensors vermutlich stabil ist
-               \item Die Temperatur des Kühlblocks über einen Temperatursensor messen und in einer Logdatei dokumentieren
+               \item Die Temperatur des Kühlblocks über einen Temperatursensor messen und in einer Protokolldatei dokumentieren
        \end{enumerate}
        
-       \item Programmieren der I2C control Software
+       \item Programmieren der JTAG Software
        
        \begin{enumerate}
                \item Initialisierung der JTAG-Kette
                \item Setzen der Matrix
-               \item Eventuell Programmierung des externen Frequenzgenerators zur Anpassung der Integrationszeit
+               \item Optionale Programmierung des externen Frequenzgenerators zur Anpassung der Integrationszeit
                \item Setzen der Referenzspannung $Vref$ (Iterativ) \label{enum:Vref}
                \item Abschließendes Programmieren der JTAG-Kette
        \end{enumerate}
@@ -215,7 +220,7 @@ Das Skript f
                \item Setzen der Laufnummer
                \item Setzen der Zahl der Auslesezyklen
                \item Start der Messung
-               \item Kontrolle der Basislinie, die zwischen 1700 und $2300~\rm mV$ liegen muss. Falls nicht, gehe zurück zu Punkt \ref{enum:Vref} und ändere die Referenzspannung
+               \item Kontrolle der Basislinie, die zwischen 1700 und $2300~\rm mV$ liegen muss. Falls nicht, zurück zu Punkt \ref{enum:Vref} und Ändern der Referenzspannung
                \item Check des Eventzählers, ob dieser die Zahl der Auslesezyklen übersteigt
                \item Stopp der Messung
                
@@ -223,7 +228,7 @@ Das Skript f
        \item Schreiben des Datums, gewählten Referenzspannung, Messdauer und Temperatur des Temperatursensors in die Datenbank
        \item Starten der nächsten Messung mit Punkt \ref{enum:Runnummer}
 \end{enumerate}
-Das Skript für das PXI-System folgt analog mit kleinen Anpassungen an die Labviewsoftware des PXI-Systems.\newline
+Das Skript für das PXI-System folgt analog mit kleinen Anpassungen an die LabVIEWsoftware des PXI-Systems.\newline
 \begin{figure}
        \centering
                \includegraphics[width=13cm]{Bilder/Auslesekette.pdf}
@@ -235,19 +240,17 @@ Das Skript f
 \label{temperaturkontrolle}
 Die Testkarte kann, durch ein Wärmeleitpad elektrisch isoliert, auf einen temperierten Metallblock mit einer im Vergleich zur Testkarte und Chip großen Wärmekapazität aufgeschraubt werden. Karte und Metallblock werden in einer klimatisierten Dunkelkammer installiert, um Lichteinfluss auf die Messung zu unterbinden. Die Temperatur in der Dunkelkammer wird mit einer Kühlvorrichtung kontrolliert. Ein Kühlsystem\footnote{Nähere Informationen zum Kühlsystem Huber können \cite{huber} entnommen werden.} ermöglicht es, eine Kühlflüssigkeit auf eine Temperatur zwischen $-90~{}^{\circ}\rm C$ und $+40~{}^{\circ}\rm C$ einzustellen. Diese Kühlflüssigkeit wird in den Metallblock geleitet, der aufgrund seiner großen Wärmekapazität nur sehr langsam die Kühlflüssigkeitstemperatur annimmt. Entsprechend wird die Kühlung des Chips verzögert. Weiterhin erwärmt sich der Chip aufgrund seiner Leistungsaufnahme selbst. Diese Erwärmung wird entsprechend ebenfalls gekühlt, so dass sich ein Gleichgewicht einstellt, welches reproduziert werden muss. Aus diesem Grund wurden drei unterschiedliche Kühlprozeduren entwickelt.\newline
 
-So kann erstens bei jeder Messung gewartet werden, bis die Temperatur des Metallblocks innerhalb von $ \pm 2~\rm K$ mit der gewünschten Temperatur übereinstimmt. Dann wird die Messung begonnen und Anfangs- und Endtemperatur der Messung notiert. Die genaue Kühlzeit wird nicht berücksichtigt. Dies hat den Nachteil, dass die gemessene Temperatur unkontrolliert von der eigentlichen Chiptemperatur abweicht, so dass die Temperaturmessung mit einer großen Unsicherheit behaftet wird.\newline
+So kann erstens bei jeder Messung gewartet werden, bis die Temperatur des Metallblocks innerhalb von $ \pm 2~\rm K$ mit der gewünschten Temperatur übereinstimmt. Dann wird die Messung begonnen und Anfangs- und Endtemperatur der Messung notiert. Die genaue Kühlzeit wird nicht berücksichtigt. Dies hat den Nachteil, dass die gemessene Temperatur unkontrolliert von der eigentlichen Chiptemperatur abweicht, so dass die Temperaturmessung mit einer großen Unsicherheit behaftet ist.\newline
 
 Alternativ kann zweitens die Hysterese der Kühlvorrichtung ausgenutzt werden. Dazu wird von der Ausgangstemperatur ausgegangen zuerst auf eine höhere Temperatur innerhalb einer festgelegten Zeitdauer $t_1$ geheizt und dann innerhalb einer festgelegten Zeitdauer $t_2$ auf die gewünschte Temperatur gekühlt.\newline
 Damit ist zwar noch nicht die genaue Temperatur des Chips bekannt, aber die Temperatur ist besser reproduzierbar, wenn jeweils die gleichen Zeiträume für das Heizen und Kühlen gewählt werden. Für die weiteren Auswertungen wird anschließend die Kühlmitteltemperatur als Temperatur angenommen.\newline
 
-Da die zweite Prozedur mit einem sehr großem Aufwand verbunden ist, wurde eine gegenüber der zweiten Prozedur vereinfachte dritte Variante entwickelt. In dieser wird $t_1=20~\rm min$ gewartet, bis der Chip die Kühltemperatur möglichst gut annimmt. Dann wird eine Messung ohne Quelle aufgenommen, die $t_2=(9\pm1)~\rm min$ dauert. Daran schließt sich eine Messung mit Quelle an, die $t_3=(18\pm1)~\rm min$ lang ist. Anschließend folgt eine weitere Messung ohne Quelle von ebenfalls $t_4=(9\pm1)~\rm min$, die redundant mit der ersten ist, aber ein etwas anderes Temperaturprofil hat. Der Unterschied zwischen der ersten und dritten Messung kann zur Abschätzung des Einflusses der Temperaturschwankungen auf die Observablen hinzugezogen werden.\newline
-
 Bei allen Kühlstrategien wird darauf geachtet, dass die Chips während der Kühlprozedur in Betrieb sind, damit sich das Temperaturgleichgewicht durch die Inbetriebnahme des Chips nicht mehr ändert. \newline
 %\subsubsection{Kühlung und Temperaturmessung} 
 \begin{figure}
 \centering
                \includegraphics[width=1\textwidth]{BilderHR/Mi18-temperature-measurement-infrared.pdf}
-               \caption[Temperatur des Chips und Metallblocks]{Gemessene Temperatur als Funktion der Kühlflüssigkeitstemperatur, gemessen mit einer Infrarotkamera auf der Oberfläche des Sensors (rote Kreise) und mit einem PT100 (schwarze Quadrate). Bei einer Kühlflüssigkeitstemperatur von $T=-70~{}^{\circ}\rm C$ wird eine absolute Temperatur von $T=-40~{}^{\circ}\rm C$ am Metallblock und $T=-34~{}^{\circ}\rm C$ am Chip erreicht.}
+               \caption[Temperatur des Chips und Metallblocks]{Gemessene Temperatur als Funktion der Kühlflüssigkeitstemperatur, gemessen mit einer Infrarotkamera auf der Oberfläche des Sensors (rote Kreise) und mit einem Temperatursensor PT100 (schwarze Quadrate). Bei einer Kühlflüssigkeitstemperatur von $T=-70~{}^{\circ}\rm C$ wird eine absolute Temperatur von $T=-40~{}^{\circ}\rm C$ am Metallblock und $T=-34~{}^{\circ}\rm C$ am Chip erreicht.}
        \label{fig:Mi18-temperature-measurement-infrared}
 \end{figure}
 \begin{figure}