From: Dennis Doering Date: Mon, 30 Sep 2013 07:25:11 +0000 (+0200) Subject: Einleitung Michael teilweise korrektur X-Git-Url: https://jspc29.x-matter.uni-frankfurt.de/git/?a=commitdiff_plain;h=13b3d7f759ae29a8b0bae8772da0357d295868ee;p=radhard.git Einleitung Michael teilweise korrektur --- diff --git a/Doering-PHD-Thesis/Anhang.aux b/Doering-PHD-Thesis/Anhang.aux index e89e201..9f6cb29 100755 --- a/Doering-PHD-Thesis/Anhang.aux +++ b/Doering-PHD-Thesis/Anhang.aux @@ -1,52 +1,52 @@ \relax \providecommand\hyper@newdestlabel[2]{} -\@writefile{toc}{\contentsline {chapter}{\numberline {A}Anhang}{155}{appendix.A}} +\@writefile{toc}{\contentsline {chapter}{\numberline {A}Anhang}{156}{appendix.A}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} -\@writefile{toc}{\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{155}{section.A.1}} -\@writefile{lot}{\contentsline {table}{\numberline {A.1}{\ignorespaces Vollst\"andige Auflistung der zu den Abbildungen geh\"orenden Messparametern}}{156}{table.caption.109}} -\newlabel{tab:Referenz2}{{A.1}{156}{Vollständige Auflistung der zu den Abbildungen gehörenden Messparametern}{table.caption.109}{}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.1}Rauschen}{157}{subsection.A.1.1}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{157}{subsection.A.1.2}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{157}{subsection.A.1.3}} -\@writefile{lof}{\contentsline {figure}{\numberline {A.1}{\ignorespaces Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}}{158}{figure.caption.110}} -\newlabel{fig:NoiseVergleichLRHR}{{A.1}{158}{Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}{figure.caption.110}{}} -\@writefile{lot}{\contentsline {table}{\numberline {A.2}{\ignorespaces Signal-Rausch-Verh\"altnis, bestimmt mit einer Ru-106-Quelle. 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+\@writefile{toc}{\contentsline {subsubsection}{\numberline {A.1.6.2}Zusammenfassung}{170}{subsubsection.A.1.6.2}} +\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.7}Fehltreffer}{170}{subsection.A.1.7}} +\@writefile{lof}{\contentsline {figure}{\numberline {A.10}{\ignorespaces Fehltrefferrate eines hochohmigen und Standard MIMOSA-26}}{171}{figure.caption.121}} +\newlabel{fig:Mi26-fakehit-STD-HR15}{{A.10}{171}{Fehltrefferrate eines hochohmigen und Standard MIMOSA-26}{figure.caption.121}{}} \@setckpt{Anhang}{ -\setcounter{page}{171} +\setcounter{page}{172} \setcounter{equation}{0} \setcounter{enumi}{6} \setcounter{enumii}{0} diff --git a/Doering-PHD-Thesis/Ausblick.aux b/Doering-PHD-Thesis/Ausblick.aux index 4811527..57a15d6 100755 --- a/Doering-PHD-Thesis/Ausblick.aux +++ b/Doering-PHD-Thesis/Ausblick.aux @@ -1,11 +1,11 @@ \relax \providecommand\hyper@newdestlabel[2]{} -\@writefile{toc}{\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{154}{chapter.7}} +\@writefile{toc}{\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{155}{chapter.7}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} -\newlabel{Ausblick}{{7}{154}{Zusammenfassung der Doktorarbeit}{chapter.7}{}} +\newlabel{Ausblick}{{7}{155}{Zusammenfassung der Doktorarbeit}{chapter.7}{}} \@setckpt{Ausblick}{ -\setcounter{page}{155} +\setcounter{page}{156} \setcounter{equation}{0} \setcounter{enumi}{6} \setcounter{enumii}{0} diff --git a/Doering-PHD-Thesis/Auswertung.aux b/Doering-PHD-Thesis/Auswertung.aux index e9f72f3..e2245d6 100755 --- a/Doering-PHD-Thesis/Auswertung.aux +++ b/Doering-PHD-Thesis/Auswertung.aux @@ -4,7 +4,7 @@ \citation{DevMi26paper} \citation{Dev07} \citation{Lutz} -\@writefile{toc}{\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 24.~September 2013}{82}{chapter.5}} +\@writefile{toc}{\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 28.~September 2013}{82}{chapter.5}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} \newlabel{Bes..}{{5}{82}{Hochohmige CMOS-Sensoren \today }{chapter.5}{}} @@ -137,6 +137,7 @@ \@writefile{lof}{\contentsline {subfigure}{\numberline{(a)}{\ignorespaces {Grundlinie}}}{124}{subfigure.29.1}} \@writefile{lof}{\contentsline {subfigure}{\numberline{(b)}{\ignorespaces {Rauschen}}}{124}{subfigure.29.2}} \@writefile{toc}{\contentsline {subsection}{\numberline {5.3.4}Ionisierende Strahlenh\"arte}{124}{subsection.5.3.4}} +\newlabel{sec:MIMOSA26Ionisierend}{{5.3.4}{124}{Ionisierende Strahlenhärte}{subsection.5.3.4}{}} \@writefile{lof}{\contentsline {figure}{\numberline {5.30}{\ignorespaces Ausheilverhalten von MIMOSA-26}}{125}{figure.caption.86}} \newlabel{fig:Mi26-xray-pedestal-noise}{{5.30}{125}{Ausheilverhalten von MIMOSA-26}{figure.caption.86}{}} \@writefile{lof}{\contentsline {subfigure}{\numberline{(a)}{\ignorespaces {Ausheilungsverhalten des Rauschens bei Raumtemperatur}}}{125}{subfigure.30.1}} diff --git a/Doering-PHD-Thesis/Auswertung.tex b/Doering-PHD-Thesis/Auswertung.tex index cf17240..6fecae7 100755 --- a/Doering-PHD-Thesis/Auswertung.tex +++ b/Doering-PHD-Thesis/Auswertung.tex @@ -373,6 +373,7 @@ Die Fehltrefferrate der verschiedenen Sensoren wird in Abbildung \ref{fig:Mi26Be Zusammenfassend hat der Strahltest gezeigt, dass hochohmige MIMOSA-26 eine Strahlenhärte bis zu $10^{13}~\rm n_{eq}/cm^2$ erreichen. Die Leistungsfähigkeit eines bestrahlten Sensors ist immer noch besser als die eines unbestrahlten niedrigohmigen Sensors. Damit scheinen Sensoren mit hochohmiger Epitaxieschicht das Mittel der Wahl zu sein, um einen Sensor zu designen, der die von CBM geforderte Strahlenhärte von $10^{13}~\rm n_{eq}/cm^2$ erreicht.\newline \subsection{Ionisierende Strahlenhärte} +\label{sec:MIMOSA26Ionisierend} \begin{figure} \centering \subfloat[Grundlinie] {\includegraphics[viewport = 50 0 700 550, width=0.5\textwidth] {BilderHR/Mi26-xray-uebersicht-pedestal.pdf}} diff --git a/Doering-PHD-Thesis/Dank.aux b/Doering-PHD-Thesis/Dank.aux index adc0124..f972b58 100755 --- a/Doering-PHD-Thesis/Dank.aux +++ b/Doering-PHD-Thesis/Dank.aux @@ -1,7 +1,7 @@ \relax \providecommand\hyper@newdestlabel[2]{} \@setckpt{Dank}{ -\setcounter{page}{176} +\setcounter{page}{178} \setcounter{equation}{0} \setcounter{enumi}{6} \setcounter{enumii}{0} diff --git a/Doering-PHD-Thesis/Einleitung.aux b/Doering-PHD-Thesis/Einleitung.aux index 4ebfb6b..3ebd092 100755 --- a/Doering-PHD-Thesis/Einleitung.aux +++ b/Doering-PHD-Thesis/Einleitung.aux @@ -55,15 +55,17 @@ \citation{AndronicSIS100} \citation{AndronicCharm} \citation{CharmSummaryPaper} +\citation{Vertex08} +\citation{CBMbook} \citation{Dev07} \@writefile{lof}{\contentsline {figure}{\numberline {1.3}{\ignorespaces Vereinfachte Geometrie eines Vertexdetektors aus zwei Stationen}}{9}{figure.caption.11}} \newlabel{fig:GeometrieVertexaufloesung}{{1.3}{9}{Vereinfachte Geometrie eines Vertexdetektors aus zwei Stationen}{figure.caption.11}{}} \@writefile{toc}{\contentsline {section}{\numberline {1.5}Messung von D-Mesonen in Schwerionenkollisionen}{9}{section.1.5}} \@writefile{toc}{\contentsline {section}{\numberline {1.6}Wahl des Sensors}{9}{section.1.6}} -\citation{Dev07} \@writefile{lof}{\contentsline {figure}{\numberline {1.4}{\ignorespaces Sekund\"are Vertexaufl\"osung f\"ur verschiedene Szenarien.\relax }}{10}{figure.caption.12}} \newlabel{fig:Vertexaufl\"osung}{{1.4}{10}{Sekundäre Vertexauflösung für verschiedene Szenarien.\relax }{figure.caption.12}{}} -\newlabel{eq:vertexaufl\"osung}{{1.28}{10}{Wahl des Sensors}{equation.1.6.28}{}} +\citation{Dev07} +\newlabel{eq:vertexaufl\"osung}{{1.28}{11}{Wahl des Sensors}{equation.1.6.28}{}} \@writefile{toc}{\contentsline {section}{\numberline {1.7}Fragestellung dieser Arbeit}{11}{section.1.7}} \@setckpt{Einleitung}{ \setcounter{page}{13} diff --git a/Doering-PHD-Thesis/Einleitung.tex b/Doering-PHD-Thesis/Einleitung.tex index ba4c0cb..a69d21f 100755 --- a/Doering-PHD-Thesis/Einleitung.tex +++ b/Doering-PHD-Thesis/Einleitung.tex @@ -143,8 +143,8 @@ Charmonia besitzen in Analogie zu den Bindungszust \section{Messung von D-Mesonen in Schwerionenkollisionen} -Die Messung von D-Mesonen ist aufgrund ihrer geringen Produktionsrate experimentell eine Herausforderung. Der Schlüssel zur Untergrundunterdrückung ist die Auflösung ihres Zerfallvertices. Denn der starke Zerfall ist vollständig unterdrückt, so dass diese nicht bereits im Feuerball der Kollision zerfallen, sondern über die schwache Wechselwirkung erst nach einer gewissen Flugstrecke. Experimentell ist die Herausforderung diesen Sekundärvertex zum Kollisionsvertex zu identifizieren, denn die Flugstrecke beträgt nur wenige hundert Mikrometer. Entsprechend ist eine Vertexauflösung in dieser Größenordnung erforderlich.\newline -Als Designziel für die Entwicklung des Vertexdetektors wird deshalb eine Vertexauflösung von $50~\rm \upmu m$ festgelegt. +Die Messung von D-Mesonen ist aufgrund ihrer geringen Produktionsrate experimentell eine Herausforderung. Der Schlüssel zur Untergrundunterdrückung ist die Auflösung ihres Zerfallvertices. Denn der starke Zerfall ist vollständig unterdrückt, so dass diese nicht bereits im Feuerball der Kollision zerfallen, sondern über die schwache Wechselwirkung erst nach einer gewissen Flugstrecke. Experimentell ist die Herausforderung diesen Sekundärvertex zum Kollisionsvertex zu identifizieren, denn die Flugstrecke beträgt nur wenige hundert Mikrometer. Entsprechend ist eine Vertexauflösung in dieser Größenordnung erforderlich. Methodisch wird der Stoßparameter bestimmt, in dem die Trajektorien eines potentiellen Sekundärvertices auf die Ebene des Primärvertices extrapoliert werden. Stimmen die Schnittpunkte mit dem Primärvertex nicht überein, ist dies ein erster Hinweis auf einen Sekundärvertex. \newline +Als Designziel für die Entwicklung des Vertexdetektors wird deshalb eine Stoßparameterauflösung von $50-100~\rm \upmu m$ festgelegt \cite{Vertex08,CBMbook} (Seite 845). \section{Wahl des Sensors} \begin{figure} \centering @@ -178,9 +178,10 @@ Als Designziel f \label{fig:Vertexauflösung} \end{minipage} \end{figure} -Entscheidend für die Vertexauflösung ist vor allem die erste Detektorstation. Diese sollte möglichst nahe am Kollisionspunkt positioniert werden und eine hohe Ortsauflösung besitzen. Gleichzeitig sollte sie möglichst dünn sein, um Vielfachstreuung zu unterdrücken.\newline +Entscheidend für die Stoßparameterauflösung ist vor allem die erste Detektorstation. Diese sollte möglichst nahe am Kollisionspunkt positioniert werden und eine hohe Ortsauflösung besitzen. Gleichzeitig sollte sie möglichst dünn sein, um Vielfachstreuung zu unterdrücken.\newline Nach \cite{Dev07} sollen im Mikrovertexdetektor des CBM-Experimentes CMOS Monolithic Active Pixel Sensoren (MAPS) zum Einsatz kommen. Ihre Vorteile gegenüber Hybridpixeln, wie sie unter anderem in den LHC-Experimenten CMS und ATLAS eingesetzt werden, werden in einer kleinen Rechnung deutlich.\newline -Die Vertexauflösung wird durch den Fehler $\Delta y$ in der Bestimmung des Stoßparameters definiert. Für eine vereinfachte Detektorgeometrie aus zwei Stationen (Abbildung \ref{fig:GeometrieVertexaufloesung}) gilt: + +Die Stoßparameteruflösung wird durch den Fehler $\Delta y$ in der Bestimmung des Stoßparameters definiert. Für eine vereinfachte Detektorgeometrie aus zwei Stationen (Abbildung \ref{fig:GeometrieVertexaufloesung}) gilt: \begin{equation} y(z)=\frac{y_2'-y_1}{z_2-z_1}\cdot \left(z-z_1\right)+y_1 \end{equation} @@ -203,9 +204,9 @@ Zur Berechnung der Vertexaufl \Delta y=\sqrt{\frac{z_2^2\cdot\left(\Delta y_1\right)^2+z_1^2\cdot\left(\Delta y_2\right)^2}{\left(z_2-z_1\right)^2}+\frac{z_1^2\cdot\left(\Delta \theta_{Vielfach}\right)^2}{cos^4\Delta \theta_{Vielfach}}} \label{eq:vertexauflösung} \end{equation} -Sie berücksichtigt die Abstände der Detektorstationen vom Kollisionspunkt $z_1$ und $z_2=50cm$, die Ortsauflösung der einzelnen Stationen $\Delta y_1$ und $\Delta y_2$ sowie die Vielfachstreuung der ersten Detektorstation $\Delta \theta_{Vielfach}=\frac{15~MeV}{1~GeV}\cdot\sqrt{\frac{x}{X_0}}$ in Abhängigkeit ihrer Dicke $x$ in Einheiten von $X_0$. Abbildung \ref{fig:Vertexauflösung} zeigt für drei ausgewählte Abstände $z_1= 1cm$, $z_1=5cm$ und $z_1=20cm$ die Vertexauflösung als Funktion der Ortsauflösung und Dicke. Der aus MAPS aufgebaute MVD-Prototyp erreicht eine Auflösung von $3\upmu m$ bei einem Materialbudget von $0,3\% X_0$. Für Hybridpixel soll eine Auflösung von $30\upmu m$ bei einem Materialbudget von $2\% X_0$ angenommen werden. Bei $z_1=1cm$ liefern sowohl MAPS als auch Hybridpixel eine ausreichende Vertexauflösung. Allerdings ist es unrealistisch eine Detektorstation so nah am Kollisionspunkt zu positionieren. Bei $z_1=20cm$ dagegen kann die nötige Vertexauflösung nicht erreicht werden. Als Kompromiss zwischen diesen beiden Extremen wird $z_1=5cm$ betrachtet. Hier erreichen MAPS die erforderliche Auflösung, während Hybridpixel einen Faktor 2 zu schlecht sind. \newline -In Bezug auf Ortsauflösung und Materialbudget sind deshalb MAPS Hybridpixeln klar vorzuziehen. Um D-Mesonenphysik zu betreiben, wird allerdings auch eine hohe Statistik benötigt. Dies hat eine hohe Kollisionsrate und hohe Strahlenbelastung zur Folge. Simulationen zeigen \cite{Dev07}, dass Hybridpixel die nötige Zeitauflösung und Strahlenhärte erreichen, die zum damaligen Zeitpunkt 2003 verfügbaren MAPS diese allerdings um mehrere Größenordnungen verfehlten. Deshalb wurde entschieden ein Forschungs- und Entwicklungsprojekt zwischen IPHC Straßburg und IKF Frankfurt zu gründen. Es hat das Ziel die Strahlenhärte und Zeitauflösung zu verbessern, so dass mit Start des CBM-Experimentes ein MAPS-Sensor für den Mikrovertexdetektor zur Verfügung steht, der die anspruchsvollen Anforderungen des CBM-Experimentes erfüllt.\newline -Der große Fortschritt in der Sensorentwicklung der letzten Jahre, woran auch diese Doktorarbeit ihren Beitrag hat, führte dazu, dass auch STAR im Rahmen ihres Upgrades sich für einen Vertexdetektor auf Basis von MAPS entschieden und dies auch für NA-61 und ALICE diskutiert wird. Somit werden die wichtigsten Schwerionenexperimente der nächsten Jahre voraussichtlich auf diese Technologie setzen.\newline +Sie berücksichtigt die Abstände der Detektorstationen vom Kollisionspunkt $z_1$ und $z_2=50cm$, die Ortsauflösung der einzelnen Stationen $\Delta y_1$ und $\Delta y_2$ sowie die Vielfachstreuung der ersten Detektorstation $\Delta \theta_{Vielfach}=\frac{15~MeV}{1~GeV}\cdot\sqrt{\frac{x}{X_0}}$ in Abhängigkeit ihrer Dicke $x$ in Einheiten von $X_0$. Abbildung \ref{fig:Vertexauflösung} zeigt für drei ausgewählte Abstände $z_1= 1cm$, $z_1=5cm$ und $z_1=20cm$ die Vertexauflösung als Funktion der Ortsauflösung und Dicke. Der aus MAPS aufgebaute MVD-Prototyp erreicht eine Auflösung von $3\upmu m$ bei einem Materialbudget von $0,3\% X_0$. Für Hybridpixel soll eine Auflösung von $30\upmu m$ bei einem Materialbudget von $2\% X_0$ angenommen werden. Bei $z_1=1cm$ liefern sowohl MAPS als auch Hybridpixel eine ausreichende Vertexauflösung. Allerdings ist es aufgrund der extremen Strahlenbelastung unrealistisch eine Detektorstation so nah am Kollisionspunkt zu positionieren. Bei $z_1=20cm$ dagegen kann die nötige Vertexauflösung nicht erreicht werden. Als Kompromiss zwischen diesen beiden wird $z_1=5cm$ betrachtet. Hier erreichen MAPS die erforderliche Auflösung, während Hybridpixel einen Faktor 2 zu schlecht sind. \newline +In Bezug auf Ortsauflösung und Materialbudget sind deshalb MAPS Hybridpixeln klar vorzuziehen. Um D-Mesonenphysik zu betreiben, wird allerdings auch eine hohe Statistik benötigt. Dies hat eine hohe Kollisionsrate und hohe Strahlenbelastung zur Folge. Simulationen zeigen \cite{Dev07}, dass Hybridpixel die nötige Zeitauflösung mit $25~\rm ns$ und Strahlenhärte mit $10^{15} \neqcm $ erreichen, die zum damaligen Zeitpunkt 2003 verfügbaren MAPS diese mit $200\mus$ und $10^{12} \neqcm$ allerdings um mehrere Größenordnungen verfehlten. Deshalb wurde entschieden ein Forschungs- und Entwicklungsprojekt zwischen IPHC Straßburg und IKF Frankfurt zu gründen. Es hat das Ziel die Strahlenhärte und Zeitauflösung zu verbessern, so dass mit Start des CBM-Experimentes ein MAPS-Sensor für den Mikrovertexdetektor zur Verfügung steht, der die anspruchsvollen Anforderungen des CBM-Experimentes erfüllt.\newline +Der große Fortschritt in der Sensorentwicklung der letzten Jahre führte dazu, dass auch STAR im Rahmen ihres Upgrades sich für einen Vertexdetektor auf Basis von MAPS entschieden und dies auch für NA-61 und ALICE diskutiert wird. Somit werden die wichtigsten Schwerionenexperimente der nächsten Jahre voraussichtlich auf diese Technologie setzen.\newline \section{Fragestellung dieser Arbeit} Diese Doktorarbeit wird im Kontext dieses Forschungs- und Entwicklungsprojektes durchgeführt. Ihre Aufgabenstellung ist die qualitative und quantitative Bestimmung der Strahlenhärte neuer MAPS-Generationen.\newline CMOS-MAPS werden in kommerziellen Fertigungsprozessen hergestellt. Dies ermöglicht zwar eine kostengünstige Massenfertigung, schränkt aber die Designmöglichkeiten auf die kommerziell verfügbaren ein. \newline diff --git a/Doering-PHD-Thesis/Mi32.aux b/Doering-PHD-Thesis/Mi32.aux index 6b83616..4d48f77 100755 --- a/Doering-PHD-Thesis/Mi32.aux +++ b/Doering-PHD-Thesis/Mi32.aux @@ -1,6 +1,6 @@ \relax \providecommand\hyper@newdestlabel[2]{} -\@writefile{toc}{\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 24.~September 2013}{129}{chapter.6}} +\@writefile{toc}{\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 28.~September 2013}{129}{chapter.6}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} \@writefile{toc}{\contentsline {section}{\numberline {6.1}Einf\"uhrung}{129}{section.6.1}} @@ -27,26 +27,30 @@ \newlabel{fig:Mi32-1-f-noise-Distribution}{{6.7}{137}{Histogram of the CDS-Signal (temperature)\relax }{figure.caption.94}{}} \@writefile{toc}{\contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{137}{section.6.3}} \@writefile{lof}{\contentsline {figure}{\numberline {6.8}{\ignorespaces XXX}}{139}{figure.caption.95}} +\newlabel{fig:Mi32NoiseIntegrationszeit}{{6.8}{139}{XXX}{figure.caption.95}{}} \@writefile{lof}{\contentsline {figure}{\numberline {6.9}{\ignorespaces XXX}}{140}{figure.caption.96}} +\newlabel{fig:10MradNoiseGain}{{6.9}{140}{XXX}{figure.caption.96}{}} \@writefile{lof}{\contentsline {figure}{\numberline {6.10}{\ignorespaces XXX}}{141}{figure.caption.97}} -\@writefile{toc}{\contentsline {section}{\numberline {6.4}Beamtest}{141}{section.6.4}} +\newlabel{fig:10MradStoNn}{{6.10}{141}{XXX}{figure.caption.97}{}} \@writefile{lof}{\contentsline {figure}{\numberline {6.11}{\ignorespaces XXX}}{142}{figure.caption.98}} -\@writefile{toc}{\contentsline {section}{\numberline {6.5}PMOS-Transistor}{142}{section.6.5}} +\@writefile{toc}{\contentsline {section}{\numberline {6.4}Beamtest}{142}{section.6.4}} \@writefile{lof}{\contentsline {figure}{\numberline {6.12}{\ignorespaces XXX}}{143}{figure.caption.99}} -\@writefile{lof}{\contentsline {figure}{\numberline {6.13}{\ignorespaces XXX}}{145}{figure.caption.100}} -\@writefile{toc}{\contentsline {section}{\numberline {6.6}PreamplifierPixel}{145}{section.6.6}} +\@writefile{toc}{\contentsline {section}{\numberline {6.5}PMOS-Transistor}{143}{section.6.5}} +\@writefile{lof}{\contentsline {figure}{\numberline {6.13}{\ignorespaces XXX}}{144}{figure.caption.100}} \@writefile{lof}{\contentsline {figure}{\numberline {6.14}{\ignorespaces XXX}}{146}{figure.caption.101}} +\@writefile{toc}{\contentsline {section}{\numberline {6.6}PreamplifierPixel}{146}{section.6.6}} \@writefile{lof}{\contentsline {figure}{\numberline {6.15}{\ignorespaces XXX}}{147}{figure.caption.102}} \@writefile{lof}{\contentsline {figure}{\numberline {6.16}{\ignorespaces XXX}}{148}{figure.caption.103}} \@writefile{lof}{\contentsline {figure}{\numberline {6.17}{\ignorespaces XXX}}{149}{figure.caption.104}} \@writefile{lof}{\contentsline {figure}{\numberline {6.18}{\ignorespaces XXX}}{150}{figure.caption.105}} -\@writefile{toc}{\contentsline {section}{\numberline {6.7}Vergleich P25 und P26}{150}{section.6.7}} \@writefile{lof}{\contentsline {figure}{\numberline {6.19}{\ignorespaces XXX}}{151}{figure.caption.106}} +\@writefile{toc}{\contentsline {section}{\numberline {6.7}Vergleich P25 und P26}{151}{section.6.7}} \@writefile{lof}{\contentsline {figure}{\numberline {6.20}{\ignorespaces XXX}}{152}{figure.caption.107}} -\@writefile{toc}{\contentsline {section}{\numberline {6.8}Breite Calpeak Pixeldistribution}{152}{section.6.8}} \@writefile{lof}{\contentsline {figure}{\numberline {6.21}{\ignorespaces XXX}}{153}{figure.caption.108}} +\@writefile{toc}{\contentsline {section}{\numberline {6.8}Breite Calpeak Pixeldistribution}{153}{section.6.8}} +\@writefile{lof}{\contentsline {figure}{\numberline {6.22}{\ignorespaces XXX}}{154}{figure.caption.109}} \@setckpt{Mi32}{ -\setcounter{page}{154} +\setcounter{page}{155} \setcounter{equation}{0} \setcounter{enumi}{6} \setcounter{enumii}{0} @@ -61,7 +65,7 @@ \setcounter{subsubsection}{0} \setcounter{paragraph}{0} \setcounter{subparagraph}{0} -\setcounter{figure}{21} +\setcounter{figure}{22} \setcounter{table}{1} \setcounter{parentequation}{0} \setcounter{SC@C}{0} diff --git a/Doering-PHD-Thesis/Mi32.tex b/Doering-PHD-Thesis/Mi32.tex index a27f6ac..90b1735 100755 --- a/Doering-PHD-Thesis/Mi32.tex +++ b/Doering-PHD-Thesis/Mi32.tex @@ -83,25 +83,31 @@ Als Konsequenz aus diesen Beobachtungen wurde die n \section{Ionisierende Strahlenhärte} Zur Abschätzung der ionsisierenden Strahlenhärte ist vor allem das Rauschen entscheidend. Denn ionisierende Strahlenschäden in der Epitaxieschicht sind reversibel, so dass erwartet wird, dass die Größe des Teilchensignals sich nicht ändert. Dagegen wird erwartet, dass das Rauschen ansteigt, bis das Signal nicht mehr sicher vom Rauschen getrennt werden kann und der Sensor keine ausreichende Detektionseffizienz hat. Deshalb soll im Folgenden vor allem das Rauschen nach Bestrahlung diskutiert werden.\newline Ionisierende Strahlenschäden erzeugen Leitungskanäle an der Silizium-Siliziumdioxidoberfläche. Diese rufen Leckströme hervor, die ein thermisches Rauschen hervorrufen. Die Größe des Leckstromes hängt von der Integrationszeit und von der Temperatur ab. Je kürzer die Integrationszeit und desto geringer die Betriebstemperatur des Sensors, desto weniger Leckstrom und ebenfalls weniger Rauschen wird gemessen.\newline -MIMOSA-32ter in TOWER-0.18 hat eine wesentlich geringere Integrationszeit von $32\mus$ als frühere Sensoren in AMS-0.35. Entsprechend wird erwartet, dass allein aufgrund dieser kürzeren Integrationszeit das Rauschen geringer ist. Um diese Hypothese zu testen, werden im Folgenden ausgewählte MIMOSA-32ter-Matrizen mit MIMOSA-11-Matrizen verglichen. Um ein großes Rauschen und damit leichtere Vergleichbarkeit zu erzwingen, wurde die ionisierende Dosis mit $1\Mrad$ und die Betriebstemperatur mit $40\C$ gewählt. Die Designintegrationszeit von MIMOSA-32ter konnte über einen externen Frequenzgenerator auf $360\mus$ verlängert werden, um so einen Überlappbereich mit den älteren MIMOSA-11-Messungen zu erreichen. \newline -Abbildung XXX zeigt das Rauschen als Funktion der Integrationszeit. Wie erwartet, gilt: Je kürzer die Integrationszeit, desto geringer ist das Rauschen. Vergleicht man MIMOSA-32ter-P2 mit MIMOSA-11 A0S2, welche beide nicht strahlenharte, lineare Transistoren haben, so haben beide bei einer Integrationszeit von $180\mus$ ein Rauschen von $45-48\e$. Für MIMOSA-32ter-P2 kann die Integrationszeit auf $32\mus$ verkürzt werden, was zur Folge hat, dass sich das Rauschen um 1/3 auf $30\e$ verringert.\newline +MIMOSA-32ter in TOWER-0.18 hat eine wesentlich geringere Integrationszeit von $32\mus$ als frühere Sensoren in AMS-0.35. Entsprechend wird erwartet, dass allein aufgrund dieser kürzeren Integrationszeit das Rauschen geringer ist. Um diese Hypothese zu testen, werden im Folgenden ausgewählte MIMOSA-32ter-Matrizen (TOWER-0.18) mit MIMOSA-11-Matrizen (AMS-0.35) verglichen. Um ein großes Rauschen und damit leichtere Vergleichbarkeit zu erzwingen, wurde die ionisierende Dosis mit $1\Mrad$ und die Betriebstemperatur mit $40\C$ gewählt. Die Designintegrationszeit von MIMOSA-32ter konnte über einen externen Frequenzgenerator auf $360\mus$ verlängert werden, um so einen Überlappbereich mit den älteren MIMOSA-11-Messungen zu erreichen. \newline +Abbildung \ref{fig:Mi32NoiseIntegrationszeit} zeigt das Rauschen als Funktion der Integrationszeit. Wie erwartet, gilt: Je kürzer die Integrationszeit, desto geringer ist das Rauschen. Vergleicht man MIMOSA-32ter-P2 mit MIMOSA-11 A0S2, welche beide nicht strahlenharte, lineare Transistoren haben, so haben beide bei einer Integrationszeit von $180\mus$ ein Rauschen von $45-48\e$. Für MIMOSA-32ter-P2 kann die Integrationszeit auf $32\mus$ verkürzt werden, was zur Folge hat, dass sich das Rauschen um 1/3 auf $30\e$ verringert.\newline Den direkten Vergleich erschwert das hohe Rauschen von MIMOSA-32ter vor der Bestrahlung. Für die nicht strahlenharten linearen Transistoren ist das Rauschen von MIMOSA-32ter-P2 geringer als MIMOSA-11 A0S2. Hier ist anscheinend das thermische Rauschen so groß, dass das hohe Rauschen vor der Bestrahlung nicht so stark ins Gewicht fällt. Bei den strahlenharten abgeschlossenen ELT Transistoren dagegen ist wie erwartet das Rauschen niedriger. Das bedeutet, dass thermische Leckströme unterbunden wurden und damit das thermische Rauschen unterdrückt werden konnte. Hier hat nun MIMOSA-32ter-P4 ein deutlich höheres Rauschen als die entsprechende Matrix MIMOSA-11 A3S1, was vermutlich auf das hohe Rauschen vor Bestrahlung zurückzuführen ist. Entsprechend ist es schwierig zu entscheiden, ob der TOWER-0.18-Prozess eine intrinsische höhere ionisierende Strahlenhärte hat als AMS-0.35. Die Studie soll mit MIMOSA-34 wiederholt werden, der ein geringeres Grundrauschen hat. \newline Nach Bestrahlung einer wesentlich höhere Dosis von bis zu $10\Mrad$ zeigt sich, dass die Referenzspannung der Sensoren wesentlich stabiler ist. Diese musste bei Sensoren im AMS-0.35-Prozess mit ansteigender Strahlendosis nachgeregelt werden. Bei mit einer Dosis von $>1\Mrad$ bestrahlte Sensoren war eine Nachregelung nicht mehr möglich. Der Sensor war insensitiv. MIMOSA-32 im TOWER-0.18-Prozess dagegen kann ohne Probleme bei Raumtemperatur auch nach $10\Mrad$ betrieben werden. \newline -Bei MIMOSA-32 wird bis zu einer Dosis von 3Mrad kein besonders großer Anstieg des Rauschens beobachtet. Nach 10Mrad wird sogar ein Abfall des gemessenen Rauschens beobachtet. Der Grund liegt in der Verringerung der Verstärkung der Auslesekette. Wird dieses berücksichtigt, ändert sich das ENC nach 3Mrad nicht signifikant bzw. steigt auf 30e nach 10Mrad.\newline -Die Verringerung der Verstärkung muss dabei nicht auf ein Feature von TOWER-0.18 zurückzuführen sein. So wurde auch bei MIMOSA-26 im AMS-0.35 eine Halbierung der Verstärkung beobachtet (siehe Abbildung XXX); allerdings bereits nach einer um einen Faktor zehn geringeren Dosis von 1Mrad.\newline -Um die Leistungsfähigkeit des Sensors zu bestimmen, wird in Abbildung XXX das Signal-zu-Rauschen gezeigt. Die betrachtete TOWER-0.18-Matrix hat ein Signal-zu-Rauschen von 40, welches sich nach 3Mrad nicht ändert und nach 10Mrad aufgrund des Rauschens auf 30 abfällt. Der MPV ändert sich nicht. Das Signal-zu-Rauschen ist sicher über der Schwelle von 15, was für die erreichte Strahlenhärte spricht. Eine Bestimmung der Strahlenhärte in einem Strahltest ist allerdings noch ausstehend.\newline +Bei MIMOSA-32 wird bis zu einer Dosis von 3Mrad kein besonders großer Anstieg des Rauschens beobachtet (Abbildung \ref{fig:10MradNoiseGain}). Nach 10Mrad wird sogar ein Abfall des gemessenen Rauschens beobachtet. Der Grund liegt in der Verringerung der Verstärkung der Auslesekette. Wird dieses berücksichtigt, ändert sich das ENC nach 3Mrad nicht signifikant bzw. steigt auf 30e nach 10Mrad.\newline +Die Verringerung der Verstärkung muss dabei nicht auf ein Feature von TOWER-0.18 zurückzuführen sein. So wurde auch bei MIMOSA-26 im AMS-0.35 eine Halbierung der Verstärkung beobachtet (siehe Kapitel \ref{sec:MIMOSA26Ionisierend}); allerdings bereits nach einer um einen Faktor zehn geringeren Dosis von 1Mrad.\newline +Um die Leistungsfähigkeit des Sensors zu bestimmen, wird in Abbildung \ref{fig:10MradStoNn} das Signal-zu-Rauschen gezeigt. Die betrachtete TOWER-0.18-Matrix hat ein Signal-zu-Rauschen von 40, welches sich nach 3Mrad nicht ändert und nach 10Mrad aufgrund des Rauschens auf 30 abfällt. Der MPV ändert sich nicht. Das Signal-zu-Rauschen ist sicher über der Schwelle von 15, was für die erreichte Strahlenhärte spricht. Eine Bestimmung der Strahlenhärte in einem Strahltest ist allerdings noch ausstehend.\newline \begin{figure} \centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_Noise_Gain.pdf} + \includegraphics[width=1\textwidth]{BilderMi32/NoiseInt.pdf} \caption[XXX]{XXX} - + \label{fig:Mi32NoiseIntegrationszeit} +\end{figure} +\begin{figure} +\centering + \includegraphics[width=1\textwidth]{BilderMi32/10MradNoiseGain.pdf} + \caption[XXX]{XXX} + \label{fig:10MradNoiseGain} \end{figure} \begin{figure} \centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_StoN.pdf} + \includegraphics[width=1\textwidth]{BilderMi32/10MradStoN.pdf} \caption[XXX]{XXX} - + \label{fig:10MradStoNn} \end{figure} \clearpage \section{Beamtest} diff --git a/Doering-PHD-Thesis/PHDthesis.aux b/Doering-PHD-Thesis/PHDthesis.aux index a4f8bea..895be9e 100755 --- a/Doering-PHD-Thesis/PHDthesis.aux +++ b/Doering-PHD-Thesis/PHDthesis.aux @@ -42,7 +42,7 @@ \bibcite{Amar07}{AY07} \bibcite{CharmSummaryPaper}{B{$^{+}$}11} \bibcite{Alex08}{B\"ud08} -\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{171}{appendix*.121}} +\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.122}} \bibcite{BlumeKP4}{Blu12} \bibcite{teststandsystem}{C{$^{+}$}04} \bibcite{CMS}{C{$^{+}$}11} diff --git a/Doering-PHD-Thesis/PHDthesis.lof b/Doering-PHD-Thesis/PHDthesis.lof index c2169b7..b1bc7c8 100755 --- a/Doering-PHD-Thesis/PHDthesis.lof +++ b/Doering-PHD-Thesis/PHDthesis.lof @@ -134,7 +134,7 @@ \contentsline {figure}{\numberline {6.10}{\ignorespaces XXX}}{141}{figure.caption.97} \contentsline {figure}{\numberline {6.11}{\ignorespaces XXX}}{142}{figure.caption.98} \contentsline {figure}{\numberline {6.12}{\ignorespaces XXX}}{143}{figure.caption.99} -\contentsline {figure}{\numberline {6.13}{\ignorespaces XXX}}{145}{figure.caption.100} +\contentsline {figure}{\numberline {6.13}{\ignorespaces XXX}}{144}{figure.caption.100} \contentsline 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(equation.1.6.27) 1799 0 R (equation.1.6.28) 1800 0 R (equation.2.1.1) 1858 0 R] +4423 0 obj << +/Names [(equation.1.6.24) 1799 0 R (equation.1.6.25) 1800 0 R (equation.1.6.26) 1801 0 R (equation.1.6.27) 1826 0 R (equation.1.6.28) 1827 0 R (equation.2.1.1) 1862 0 R] /Limits [(equation.1.6.24) (equation.2.1.1)] >> endobj -4366 0 obj << -/Names [(equation.2.1.2) 1885 0 R (equation.2.1.3) 1886 0 R (equation.2.1.4) 1887 0 R (equation.2.1.5) 1921 0 R (equation.2.2.6) 1979 0 R (equation.2.2.7) 1980 0 R] +4424 0 obj << +/Names [(equation.2.1.2) 1889 0 R (equation.2.1.3) 1890 0 R (equation.2.1.4) 1891 0 R (equation.2.1.5) 1925 0 R (equation.2.2.6) 1983 0 R (equation.2.2.7) 1984 0 R] /Limits [(equation.2.1.2) (equation.2.2.7)] >> endobj -4367 0 obj << -/Names [(equation.2.2.8) 2019 0 R (equation.2.3.10) 2147 0 R (equation.2.3.9) 2110 0 R (equation.3.2.1) 2460 0 R (equation.3.2.2) 2482 0 R (equation.3.2.3) 2483 0 R] +4425 0 obj << +/Names [(equation.2.2.8) 2023 0 R (equation.2.3.10) 2151 0 R (equation.2.3.9) 2114 0 R (equation.3.2.1) 2464 0 R (equation.3.2.2) 2486 0 R (equation.3.2.3) 2487 0 R] /Limits [(equation.2.2.8) (equation.3.2.3)] >> endobj -4368 0 obj << -/Names [(equation.3.2.4) 2484 0 R (equation.3.2.5) 2497 0 R (equation.4.2.1) 2785 0 R (equation.5.1.1) 3040 0 R (equation.5.1.2) 3041 0 R (figure.caption.10) 742 0 R] +4426 0 obj << +/Names [(equation.3.2.4) 2488 0 R (equation.3.2.5) 2501 0 R (equation.4.2.1) 2789 0 R (equation.5.1.1) 3044 0 R (equation.5.1.2) 3045 0 R (figure.caption.10) 742 0 R] /Limits [(equation.3.2.4) (figure.caption.10)] >> endobj -4369 0 obj << -/Names [(figure.caption.100) 923 0 R (figure.caption.101) 924 0 R (figure.caption.102) 925 0 R (figure.caption.103) 926 0 R (figure.caption.104) 927 0 R (figure.caption.105) 928 0 R] +4427 0 obj << +/Names [(figure.caption.100) 922 0 R (figure.caption.101) 923 0 R (figure.caption.102) 924 0 R (figure.caption.103) 925 0 R (figure.caption.104) 926 0 R (figure.caption.105) 927 0 R] /Limits [(figure.caption.100) (figure.caption.105)] >> endobj -4370 0 obj << -/Names [(figure.caption.106) 929 0 R (figure.caption.107) 930 0 R (figure.caption.108) 931 0 R (figure.caption.11) 743 0 R (figure.caption.110) 932 0 R (figure.caption.111) 933 0 R] +4428 0 obj << +/Names [(figure.caption.106) 928 0 R (figure.caption.107) 929 0 R (figure.caption.108) 930 0 R (figure.caption.109) 931 0 R (figure.caption.11) 743 0 R (figure.caption.111) 932 0 R] /Limits [(figure.caption.106) (figure.caption.111)] >> endobj -4371 0 obj << -/Names [(figure.caption.112) 948 0 R (figure.caption.113) 949 0 R (figure.caption.114) 950 0 R (figure.caption.116) 951 0 R (figure.caption.117) 952 0 R (figure.caption.118) 953 0 R] +4429 0 obj << +/Names [(figure.caption.112) 949 0 R (figure.caption.113) 950 0 R (figure.caption.114) 951 0 R (figure.caption.115) 952 0 R (figure.caption.117) 953 0 R (figure.caption.118) 954 0 R] /Limits [(figure.caption.112) (figure.caption.118)] >> endobj -4372 0 obj << -/Names [(figure.caption.119) 506 0 R (figure.caption.12) 744 0 R (figure.caption.120) 954 0 R (figure.caption.13) 745 0 R (figure.caption.14) 746 0 R (figure.caption.15) 747 0 R] -/Limits [(figure.caption.119) (figure.caption.15)] +4430 0 obj << +/Names [(figure.caption.119) 955 0 R (figure.caption.12) 744 0 R (figure.caption.120) 506 0 R (figure.caption.121) 956 0 R (figure.caption.13) 745 0 R (figure.caption.14) 746 0 R] +/Limits [(figure.caption.119) (figure.caption.14)] >> endobj -4373 0 obj << -/Names [(figure.caption.16) 748 0 R (figure.caption.17) 749 0 R (figure.caption.18) 750 0 R (figure.caption.19) 751 0 R (figure.caption.20) 752 0 R (figure.caption.21) 753 0 R] -/Limits [(figure.caption.16) (figure.caption.21)] +4431 0 obj << +/Names [(figure.caption.15) 747 0 R (figure.caption.16) 748 0 R (figure.caption.17) 749 0 R (figure.caption.18) 750 0 R (figure.caption.19) 751 0 R (figure.caption.20) 752 0 R] +/Limits [(figure.caption.15) (figure.caption.20)] >> endobj -4374 0 obj << -/Names [(figure.caption.22) 754 0 R (figure.caption.23) 755 0 R (figure.caption.24) 756 0 R (figure.caption.25) 757 0 R (figure.caption.26) 758 0 R (figure.caption.27) 759 0 R] -/Limits [(figure.caption.22) (figure.caption.27)] +4432 0 obj << +/Names [(figure.caption.21) 753 0 R (figure.caption.22) 754 0 R (figure.caption.23) 755 0 R (figure.caption.24) 756 0 R (figure.caption.25) 757 0 R (figure.caption.26) 758 0 R] +/Limits [(figure.caption.21) (figure.caption.26)] >> endobj -4375 0 obj << -/Names [(figure.caption.28) 760 0 R (figure.caption.29) 761 0 R (figure.caption.30) 130 0 R (figure.caption.31) 134 0 R (figure.caption.32) 762 0 R (figure.caption.33) 763 0 R] -/Limits [(figure.caption.28) (figure.caption.33)] +4433 0 obj << +/Names [(figure.caption.27) 759 0 R (figure.caption.28) 760 0 R (figure.caption.29) 761 0 R (figure.caption.30) 130 0 R (figure.caption.31) 134 0 R (figure.caption.32) 762 0 R] +/Limits [(figure.caption.27) (figure.caption.32)] >> endobj -4376 0 obj << -/Names [(figure.caption.34) 764 0 R (figure.caption.35) 765 0 R (figure.caption.36) 766 0 R (figure.caption.37) 767 0 R (figure.caption.38) 768 0 R (figure.caption.39) 816 0 R] -/Limits [(figure.caption.34) (figure.caption.39)] +4434 0 obj << +/Names [(figure.caption.33) 763 0 R (figure.caption.34) 764 0 R (figure.caption.35) 765 0 R (figure.caption.36) 766 0 R (figure.caption.37) 767 0 R (figure.caption.38) 768 0 R] +/Limits [(figure.caption.33) (figure.caption.38)] >> endobj -4377 0 obj << -/Names [(figure.caption.40) 817 0 R (figure.caption.41) 818 0 R (figure.caption.42) 819 0 R (figure.caption.43) 820 0 R (figure.caption.44) 822 0 R (figure.caption.45) 823 0 R] -/Limits [(figure.caption.40) (figure.caption.45)] +4435 0 obj << +/Names [(figure.caption.39) 816 0 R (figure.caption.40) 817 0 R (figure.caption.41) 818 0 R (figure.caption.42) 819 0 R (figure.caption.43) 820 0 R (figure.caption.44) 822 0 R] +/Limits [(figure.caption.39) (figure.caption.44)] >> endobj -4378 0 obj << -/Names [(figure.caption.46) 825 0 R (figure.caption.47) 826 0 R (figure.caption.48) 827 0 R (figure.caption.49) 828 0 R (figure.caption.50) 829 0 R (figure.caption.51) 830 0 R] -/Limits [(figure.caption.46) (figure.caption.51)] +4436 0 obj << +/Names [(figure.caption.45) 823 0 R (figure.caption.46) 825 0 R (figure.caption.47) 826 0 R (figure.caption.48) 827 0 R (figure.caption.49) 828 0 R (figure.caption.50) 829 0 R] +/Limits [(figure.caption.45) (figure.caption.50)] >> endobj -4379 0 obj << -/Names [(figure.caption.52) 831 0 R (figure.caption.53) 832 0 R (figure.caption.54) 833 0 R (figure.caption.55) 834 0 R (figure.caption.56) 835 0 R (figure.caption.57) 836 0 R] -/Limits [(figure.caption.52) (figure.caption.57)] +4437 0 obj << +/Names [(figure.caption.51) 830 0 R (figure.caption.52) 831 0 R (figure.caption.53) 832 0 R (figure.caption.54) 833 0 R (figure.caption.55) 834 0 R (figure.caption.56) 835 0 R] +/Limits [(figure.caption.51) (figure.caption.56)] >> endobj -4380 0 obj << -/Names [(figure.caption.58) 837 0 R (figure.caption.59) 838 0 R (figure.caption.60) 839 0 R (figure.caption.61) 840 0 R (figure.caption.62) 841 0 R (figure.caption.63) 842 0 R] -/Limits [(figure.caption.58) (figure.caption.63)] +4438 0 obj << +/Names [(figure.caption.57) 836 0 R (figure.caption.58) 837 0 R (figure.caption.59) 838 0 R (figure.caption.60) 839 0 R (figure.caption.61) 840 0 R (figure.caption.62) 841 0 R] +/Limits [(figure.caption.57) (figure.caption.62)] >> endobj -4381 0 obj << -/Names [(figure.caption.64) 843 0 R (figure.caption.65) 844 0 R (figure.caption.66) 845 0 R (figure.caption.67) 846 0 R (figure.caption.69) 847 0 R (figure.caption.70) 848 0 R] -/Limits [(figure.caption.64) (figure.caption.70)] +4439 0 obj << +/Names [(figure.caption.63) 842 0 R (figure.caption.64) 843 0 R (figure.caption.65) 844 0 R (figure.caption.66) 845 0 R (figure.caption.67) 846 0 R (figure.caption.69) 847 0 R] +/Limits [(figure.caption.63) (figure.caption.69)] >> endobj -4382 0 obj << -/Names [(figure.caption.71) 849 0 R (figure.caption.72) 850 0 R (figure.caption.73) 851 0 R (figure.caption.74) 852 0 R (figure.caption.75) 899 0 R (figure.caption.76) 900 0 R] -/Limits [(figure.caption.71) (figure.caption.76)] +4440 0 obj << +/Names [(figure.caption.70) 848 0 R (figure.caption.71) 849 0 R (figure.caption.72) 850 0 R (figure.caption.73) 851 0 R (figure.caption.74) 852 0 R (figure.caption.75) 898 0 R] +/Limits [(figure.caption.70) (figure.caption.75)] >> endobj -4383 0 obj << -/Names [(figure.caption.77) 901 0 R (figure.caption.78) 902 0 R (figure.caption.79) 903 0 R (figure.caption.80) 904 0 R (figure.caption.81) 905 0 R (figure.caption.82) 906 0 R] -/Limits [(figure.caption.77) (figure.caption.82)] +4441 0 obj << +/Names [(figure.caption.76) 899 0 R (figure.caption.77) 900 0 R (figure.caption.78) 901 0 R (figure.caption.79) 902 0 R (figure.caption.80) 903 0 R (figure.caption.81) 904 0 R] +/Limits [(figure.caption.76) (figure.caption.81)] >> endobj -4384 0 obj << -/Names [(figure.caption.83) 907 0 R (figure.caption.84) 908 0 R (figure.caption.85) 909 0 R (figure.caption.86) 910 0 R (figure.caption.87) 911 0 R (figure.caption.88) 912 0 R] -/Limits [(figure.caption.83) (figure.caption.88)] +4442 0 obj << +/Names [(figure.caption.82) 905 0 R (figure.caption.83) 906 0 R (figure.caption.84) 907 0 R (figure.caption.85) 908 0 R (figure.caption.86) 909 0 R (figure.caption.87) 910 0 R] +/Limits [(figure.caption.82) (figure.caption.87)] >> endobj -4385 0 obj << -/Names [(figure.caption.89) 913 0 R (figure.caption.9) 741 0 R (figure.caption.91) 914 0 R (figure.caption.92) 915 0 R (figure.caption.93) 916 0 R (figure.caption.94) 917 0 R] -/Limits [(figure.caption.89) (figure.caption.94)] +4443 0 obj << +/Names [(figure.caption.88) 911 0 R (figure.caption.89) 912 0 R (figure.caption.9) 741 0 R (figure.caption.91) 913 0 R (figure.caption.92) 914 0 R (figure.caption.93) 915 0 R] +/Limits [(figure.caption.88) (figure.caption.93)] >> endobj -4386 0 obj << -/Names [(figure.caption.95) 918 0 R (figure.caption.96) 919 0 R (figure.caption.97) 920 0 R (figure.caption.98) 921 0 R (figure.caption.99) 922 0 R (page.1) 984 0 R] -/Limits [(figure.caption.95) (page.1)] +4444 0 obj << +/Names [(figure.caption.94) 916 0 R (figure.caption.95) 917 0 R (figure.caption.96) 918 0 R (figure.caption.97) 919 0 R (figure.caption.98) 920 0 R (figure.caption.99) 921 0 R] +/Limits [(figure.caption.94) (figure.caption.99)] >> endobj -4387 0 obj << -/Names [(page.10) 1795 0 R (page.100) 3316 0 R (page.101) 3331 0 R (page.102) 3338 0 R (page.103) 3342 0 R (page.104) 3358 0 R] -/Limits [(page.10) (page.104)] +4445 0 obj << +/Names [(page.1) 986 0 R (page.10) 1797 0 R (page.100) 3320 0 R (page.101) 3335 0 R (page.102) 3342 0 R (page.103) 3346 0 R] +/Limits [(page.1) (page.103)] >> endobj -4388 0 obj << -/Names [(page.105) 3367 0 R (page.106) 3407 0 R (page.107) 3413 0 R (page.108) 3454 0 R (page.109) 3468 0 R (page.11) 1822 0 R] -/Limits [(page.105) (page.11)] +4446 0 obj << +/Names [(page.104) 3362 0 R (page.105) 3371 0 R (page.106) 3411 0 R (page.107) 3417 0 R (page.108) 3458 0 R (page.109) 3472 0 R] +/Limits [(page.104) (page.109)] >> endobj -4389 0 obj << -/Names [(page.110) 3472 0 R (page.111) 3493 0 R (page.112) 3514 0 R (page.113) 3518 0 R (page.114) 3532 0 R (page.115) 3542 0 R] -/Limits [(page.110) (page.115)] +4447 0 obj << +/Names [(page.11) 1825 0 R (page.110) 3476 0 R (page.111) 3497 0 R (page.112) 3518 0 R (page.113) 3522 0 R (page.114) 3536 0 R] +/Limits [(page.11) (page.114)] >> endobj -4390 0 obj << -/Names [(page.116) 3546 0 R (page.117) 3550 0 R (page.118) 3572 0 R (page.119) 3584 0 R (page.12) 1827 0 R (page.120) 3589 0 R] -/Limits [(page.116) (page.120)] +4448 0 obj << +/Names [(page.115) 3546 0 R (page.116) 3550 0 R (page.117) 3554 0 R (page.118) 3576 0 R (page.119) 3588 0 R (page.12) 1832 0 R] +/Limits [(page.115) (page.12)] >> endobj -4391 0 obj << -/Names [(page.121) 3602 0 R (page.122) 3645 0 R (page.123) 3655 0 R (page.124) 3680 0 R (page.125) 3698 0 R (page.126) 3729 0 R] -/Limits [(page.121) (page.126)] +4449 0 obj << +/Names [(page.120) 3593 0 R (page.121) 3606 0 R (page.122) 3649 0 R (page.123) 3659 0 R (page.124) 3684 0 R (page.125) 3702 0 R] +/Limits [(page.120) (page.125)] >> endobj -4392 0 obj << -/Names [(page.127) 3754 0 R (page.128) 3758 0 R (page.129) 3763 0 R (page.13) 1836 0 R (page.130) 3787 0 R (page.131) 3791 0 R] -/Limits [(page.127) (page.131)] +4450 0 obj << +/Names [(page.126) 3733 0 R (page.127) 3758 0 R (page.128) 3762 0 R (page.129) 3767 0 R (page.13) 1841 0 R (page.130) 3791 0 R] +/Limits [(page.126) (page.130)] >> endobj -4393 0 obj << -/Names [(page.132) 3814 0 R (page.133) 3825 0 R (page.134) 3847 0 R (page.135) 3858 0 R (page.136) 3869 0 R (page.137) 3874 0 R] -/Limits [(page.132) (page.137)] +4451 0 obj << +/Names [(page.131) 3795 0 R (page.132) 3818 0 R (page.133) 3829 0 R (page.134) 3851 0 R (page.135) 3862 0 R (page.136) 3873 0 R] +/Limits [(page.131) (page.136)] >> endobj -4394 0 obj << -/Names [(page.138) 3916 0 R (page.139) 3920 0 R (page.14) 1841 0 R (page.140) 3931 0 R (page.141) 3949 0 R (page.142) 3961 0 R] -/Limits [(page.138) (page.142)] +4452 0 obj << +/Names [(page.137) 3883 0 R (page.138) 3925 0 R (page.139) 3929 0 R (page.14) 1845 0 R (page.140) 3951 0 R (page.141) 3973 0 R] +/Limits [(page.137) (page.141)] >> endobj -4395 0 obj << -/Names [(page.143) 3971 0 R (page.144) 3983 0 R (page.145) 3992 0 R (page.146) 4003 0 R (page.147) 4014 0 R (page.148) 4025 0 R] -/Limits [(page.143) (page.148)] +4453 0 obj << +/Names [(page.142) 4003 0 R (page.143) 4015 0 R (page.144) 4026 0 R (page.145) 4037 0 R (page.146) 4046 0 R (page.147) 4057 0 R] +/Limits [(page.142) (page.147)] >> endobj -4396 0 obj << -/Names [(page.149) 4036 0 R (page.15) 1857 0 R (page.150) 4050 0 R (page.151) 4061 0 R (page.152) 4074 0 R (page.153) 4085 0 R] -/Limits [(page.149) (page.153)] +4454 0 obj << +/Names [(page.148) 4068 0 R (page.149) 4079 0 R (page.15) 1861 0 R (page.150) 4091 0 R (page.151) 4104 0 R (page.152) 4115 0 R] +/Limits [(page.148) (page.152)] >> endobj -4397 0 obj << -/Names [(page.154) 4096 0 R (page.155) 4101 0 R (page.156) 4117 0 R (page.157) 4132 0 R (page.158) 4136 0 R (page.159) 4146 0 R] -/Limits [(page.154) (page.159)] +4455 0 obj << +/Names [(page.153) 4128 0 R (page.154) 4139 0 R (page.155) 4150 0 R (page.156) 4156 0 R (page.157) 4171 0 R (page.158) 4186 0 R] +/Limits [(page.153) (page.158)] >> endobj -4398 0 obj << -/Names [(page.16) 1882 0 R (page.160) 4154 0 R (page.161) 4164 0 R (page.162) 4175 0 R (page.163) 4188 0 R (page.164) 4192 0 R] -/Limits [(page.16) (page.164)] +4456 0 obj << +/Names [(page.159) 4190 0 R (page.16) 1886 0 R (page.160) 4200 0 R (page.161) 4208 0 R (page.162) 4219 0 R (page.163) 4229 0 R] +/Limits [(page.159) (page.163)] >> endobj -4399 0 obj << -/Names [(page.165) 4215 0 R (page.166) 4225 0 R (page.167) 4235 0 R (page.168) 4243 0 R (page.169) 4259 0 R (page.17) 1920 0 R] 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00000 n +0004378200 00000 n +0004378240 00000 n +0004378431 00000 n trailer -<< /Size 4472 -/Root 4470 0 R -/Info 4471 0 R -/ID [ ] >> +<< /Size 4530 +/Root 4528 0 R +/Info 4529 0 R +/ID [<769386CA1411A1B7283ED80C8F615721> <769386CA1411A1B7283ED80C8F615721>] >> startxref -4357284 +4378967 %%EOF diff --git a/Doering-PHD-Thesis/PHDthesis.toc b/Doering-PHD-Thesis/PHDthesis.toc index c8c814a..c6e9b43 100755 --- a/Doering-PHD-Thesis/PHDthesis.toc +++ b/Doering-PHD-Thesis/PHDthesis.toc @@ -49,7 +49,7 @@ \contentsline {chapter}{\numberline {3}Strahlensch\"aden}{49}{chapter.3} \contentsline {section}{\numberline {3.1}Oberfl\"achensch\"aden}{49}{section.3.1} \contentsline {section}{\numberline {3.2}Volumensch\"aden}{51}{section.3.2} -\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 24.~September 2013}{55}{chapter.4} +\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 28.~September 2013}{55}{chapter.4} \contentsline {section}{\numberline {4.1}Experimenteller Aufbau}{55}{section.4.1} \contentsline {subsection}{\numberline {4.1.1}Elektronik}{55}{subsection.4.1.1} \contentsline {subsection}{\numberline {4.1.2}Temperaturkontrolle}{56}{subsection.4.1.2} @@ -70,7 +70,7 @@ \contentsline {subsection}{\numberline {4.4.2}Ausheilverhalten}{80}{subsection.4.4.2} \contentsline {subsection}{\numberline {4.4.3}Zusammenfassung}{81}{subsection.4.4.3} \contentsline {section}{\numberline {4.5}Zusammenfassung}{81}{section.4.5} -\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 24.~September 2013}{82}{chapter.5} +\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 28.~September 2013}{82}{chapter.5} \contentsline {section}{\numberline {5.1}MAPS mit hochohmiger Epitaxieschicht}{82}{section.5.1} \contentsline {subsection}{\numberline {5.1.1}Ladungssammlungseffizienz des Seedpixels}{86}{subsection.5.1.1} \contentsline {subsubsection}{\numberline {5.1.1.1}MIMOSA-26-Puzzle}{88}{subsubsection.5.1.1.1} @@ -103,28 +103,28 @@ \contentsline {subsection}{\numberline {5.3.5}Zusammenfassung}{127}{subsection.5.3.5} \contentsline {section}{\numberline {5.4}Zusammenfassung}{128}{section.5.4} \contentsline {section}{\numberline {5.5}Schlussfolgerung}{128}{section.5.5} -\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 24.~September 2013}{129}{chapter.6} +\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 28.~September 2013}{129}{chapter.6} \contentsline {section}{\numberline {6.1}Einf\"uhrung}{129}{section.6.1} \contentsline {section}{\numberline {6.2}Rauschverhalten}{130}{section.6.2} \contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{137}{section.6.3} -\contentsline {section}{\numberline {6.4}Beamtest}{141}{section.6.4} -\contentsline {section}{\numberline {6.5}PMOS-Transistor}{142}{section.6.5} -\contentsline {section}{\numberline {6.6}PreamplifierPixel}{145}{section.6.6} -\contentsline {section}{\numberline {6.7}Vergleich P25 und P26}{150}{section.6.7} -\contentsline {section}{\numberline {6.8}Breite Calpeak Pixeldistribution}{152}{section.6.8} -\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{154}{chapter.7} -\contentsline {chapter}{\numberline {A}Anhang}{155}{appendix.A} -\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{155}{section.A.1} -\contentsline {subsection}{\numberline {A.1.1}Rauschen}{157}{subsection.A.1.1} -\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{157}{subsection.A.1.2} -\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{157}{subsection.A.1.3} -\contentsline {subsubsection}{\numberline {A.1.3.1}Rauschen}{163}{subsubsection.A.1.3.1} -\contentsline {subsection}{\numberline {A.1.4}Cluster}{164}{subsection.A.1.4} -\contentsline {subsection}{\numberline {A.1.5}Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{167}{subsection.A.1.5} -\contentsline {subsection}{\numberline {A.1.6}Einfluss der Integrationszeit}{168}{subsection.A.1.6} -\contentsline {subsubsection}{\numberline {A.1.6.1}Differenzierungen}{168}{subsubsection.A.1.6.1} -\contentsline {paragraph}{\numberline {A.1.6.1.1}Einfluss des Pixelpitches}{168}{figure.caption.119} -\contentsline {paragraph}{\numberline {A.1.6.1.2}Einfluss der Diodenoberfl\"ache}{169}{paragraph.A.1.6.1.2} -\contentsline {subsubsection}{\numberline {A.1.6.2}Zusammenfassung}{169}{subsubsection.A.1.6.2} -\contentsline {subsection}{\numberline {A.1.7}Fehltreffer}{169}{subsection.A.1.7} -\contentsline {chapter}{Literaturverzeichnis}{171}{appendix*.121} +\contentsline {section}{\numberline {6.4}Beamtest}{142}{section.6.4} +\contentsline {section}{\numberline {6.5}PMOS-Transistor}{143}{section.6.5} +\contentsline {section}{\numberline {6.6}PreamplifierPixel}{146}{section.6.6} +\contentsline {section}{\numberline {6.7}Vergleich P25 und P26}{151}{section.6.7} +\contentsline {section}{\numberline {6.8}Breite Calpeak Pixeldistribution}{153}{section.6.8} +\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{155}{chapter.7} +\contentsline {chapter}{\numberline {A}Anhang}{156}{appendix.A} +\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{156}{section.A.1} +\contentsline {subsection}{\numberline {A.1.1}Rauschen}{158}{subsection.A.1.1} +\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{158}{subsection.A.1.2} +\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{158}{subsection.A.1.3} +\contentsline {subsubsection}{\numberline {A.1.3.1}Rauschen}{164}{subsubsection.A.1.3.1} +\contentsline {subsection}{\numberline {A.1.4}Cluster}{165}{subsection.A.1.4} +\contentsline {subsection}{\numberline {A.1.5}Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{168}{subsection.A.1.5} +\contentsline 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