From: Dennis Doering Date: Mon, 23 Sep 2013 10:25:35 +0000 (+0200) Subject: Mi32 einführung X-Git-Url: https://jspc29.x-matter.uni-frankfurt.de/git/?a=commitdiff_plain;h=201f23ac46b367d991b153b20c09474414798fe4;p=radhard.git Mi32 einführung --- diff --git a/Doering-PHD-Thesis/Anhang.aux b/Doering-PHD-Thesis/Anhang.aux index 678be91..18f66f8 100755 --- a/Doering-PHD-Thesis/Anhang.aux +++ b/Doering-PHD-Thesis/Anhang.aux @@ -1,52 +1,52 @@ \relax \providecommand\hyper@newdestlabel[2]{} -\@writefile{toc}{\contentsline {chapter}{\numberline {A}Anhang}{155}{appendix.A}} +\@writefile{toc}{\contentsline {chapter}{\numberline {A}Anhang}{157}{appendix.A}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} -\@writefile{toc}{\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{155}{section.A.1}} -\@writefile{lot}{\contentsline {table}{\numberline {A.1}{\ignorespaces Vollst\"andige Auflistung der zu den Abbildungen geh\"orenden Messparametern}}{156}{table.caption.110}} -\newlabel{tab:Referenz2}{{A.1}{156}{Vollständige Auflistung der zu den Abbildungen gehörenden Messparametern}{table.caption.110}{}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.1}Rauschen}{157}{subsection.A.1.1}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{157}{subsection.A.1.2}} -\@writefile{toc}{\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{157}{subsection.A.1.3}} -\@writefile{lof}{\contentsline {figure}{\numberline {A.1}{\ignorespaces Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}}{158}{figure.caption.111}} -\newlabel{fig:NoiseVergleichLRHR}{{A.1}{158}{Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}{figure.caption.111}{}} -\@writefile{lot}{\contentsline {table}{\numberline {A.2}{\ignorespaces Signal-Rausch-Verh\"altnis, bestimmt mit einer Ru-106-Quelle. 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Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von 0.35mum produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in mum angibt. Vor kurzem wurde ein neuer Industrieprozess verfügbar, der es ermöglicht Sensoren mit einer kleineren Strukturengröße von 0.18mum herzustellen. Diese Sensoren werden analog im Folgenden als TOWER-0.18 bezeichnet. Die kleinere Strukturengröße ermöglicht komplexere In-Pixelschaltungen. - - - - dünnere Oxidschichten und damit vermutlich eine höhere ionisierende Strahlenhärte.\newline -Die verbesserte ionisierende Strahlenhärte soll im Folgenden mit TOWER-0.18 belegt werden. Diese Sensoren haben ebenfalls eine hochohmige Epitaxieschicht, so dass die in Abschnitt XXX demonstrierte verbesserte nicht-ionisierende Strahlenhärte bei diesen Sensoren erhalten werden konnte. Im Abschnitt XXX wird überprüft, ob sich die Ergebnisse von AMS-0.35 mit hochohmiger Epitaxieschicht auch für TOWER-0.18 mit hochohmiger Epitaxieschicht übertragen lassen.\newline -Experimentell wurden mehrere Technologieprototypen von TOWER-0.18 hergestellt. Diese Sensoren werden im Folgenden als MIMOSA-32 und MIMOSA-32TER bezeichnet. Diese haben als Technologieentdecker eine Vielzahl an verschiedenen Pixellayouts und Verstärkerschaltungen implentiert, um die vielversprechensten Layouts für die nächste Sensorgeneration auszuwählen.\newline +CMOS Monolithic Active Pixel Sensoren werden in konventionellen Industrieprozesse hergestellt. Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von 0.35mum produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in mum angibt. Die Sensoren haben aufgrund der konsekutiven Auslese eine Integrationszeit von einigen 100 mus bis wenige mus. Der für die Anwendung in Strahlteleskope optimierte MIMSOA-26 (siehe Kapitel XXX) erreicht dank massiv zeilenparalleler Auslese als großflächiger Sensor eine Integrationszeit 115mus. Dies reicht für den Vertexdetektor für NA-61, allerdings nicht für CBM und ALICE, die für ihre Physikziele eine wesentlich höhere Kollisionsrate benötigen, so dass es zur Überlagerung von mehreren Kollisionen (Pile-Up) im Detektor kommt. Zwar kann aufgrund der hohen Granulariät und effizienter Spurrekonstruktionsalgorithmen ein gewisser Pile-Up toleriert werden, allerdings sollte die Zahl der Kollisionen pro Integrationszeit nicht zu groß werden. Dies ist einer der limitierende Faktoren des gesamten Experimentes. Eine kürzere Integrationszeit der Sensoren ermöglicht eine höhere Kollisionsrate und damit bessere Statistik. Dies ist allerdings nicht mit den bisherigem AMS-0.35-Prozess möglich. Vor kurzem wurde ein neuer Industrieprozess verfügbar, der es ermöglicht Sensoren mit einer kleineren Strukturengröße von 0.18mum herzustellen. Diese Sensoren werden analog im Folgenden als TOWER-0.18 bezeichnet. Die kleinere Strukturengröße ermöglicht komplexere In-Pixelschaltungen und damit kürzere Integrationszeiten von wenigen 10 mus auch für großflächige Sensoren. Für den MAPS-Sensor MISTRAL für CBM und ALICE wird eine Integrationszeit von 30mus angestrebt, was einen Faktor 3 schneller ist als MIMOSA-26.\newline +Darüber hinaus wurde vermutet, dass aufgrund der kleineren Strukturengröße die ionisierenden Strahlenhärte höher ist. So sind die Oxidschichten dünner, so dass Löcher leichter durch den Tunneleffekt entweichen können. Weiterhin ermöglichen die kleineren Strukturen aufwändigere, abgeschlossene Transistorlayouts (ELT), die Leckstromkanäle unterbinden können und sich deshalb im AMS-0.35-Prozess als strahlenhärter erwiesen haben, allerdings zu viel Platz benötigten. Weiterhin bietet die kürzere Integrationszeit selbst den Vorteil, dass weniger Leckstromelektronen gesammelt werden und damit das Rauschen nach Bestrahlung weniger stark steigt.\newline +In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess hergestellte Sensoren mit einer Integrationszeit von 30mus die Strahlenhärteanforderungen von CBM und ALICE erfüllen. Dazu wurden mehrere Prototypsensoren MIMOSA-32, MIMOSA-32ter und MIMOSA-34 entwickelt und getestet. Jeder hat 32 Matrizen mit acht Spalten aus 64 Pixeln und unterschiedlichen Pixel- und Vorverstärkerlayouts. Das Ziel ist es die bestmögliche Konfiguration für die nächste Sensorgeneration auszuwählen. Die Integrationszeit beträgt 32mus und entspricht damit der Spezifikation von MISTRAL. Die Sensoren werden mit verschiedenen Wafern produziert, unter anderem auch in hochohmigen Wafern bis zu einer Resistivität von 6kOmegacm um die Vorteile in Bezug auf nicht-ionisierende Strahlenhärte zu erhalten bzw. zu erweitern. \newline \section{Rauschverhalten} \begin{figure} \centering @@ -14,7 +10,7 @@ Experimentell wurden mehrere Technologieprototypen von TOWER-0.18 hergestellt. D \caption[XXX]{XXX} \label{fig:noiseVergleichMi32Mi18} \end{figure} -Zuerst soll das Rauschverhalten der TOWER-0.18-Sensoren betrachtet werden. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt die Rauschverteilung der Pixel. Verglichen wird MIMOSA-32-P2 und MIMOSA-32-P5 (TOWER-0.18) mit MIMOSA-18AHR-A2 (AMS-0.35). Der Mittelwert der Verteilung von TOWER-0.18 liegt um 20e, für AMS-0.35 dagegen um 12e. Das mittlere Rauschen hat sich dadurch nahezu verdoppelt. Allerdings verschlechtert sich nicht nur das mittlere Rauschen, auch der Schwanz aus Pixeln mit hohen Rauschen vergrößert sich deutlich. Einzelne Pixel von MIMOSA-32-P2 haben ein Rauschen von >50e, während kein Pixel von MIMOSA-18AHR ein Rauschen >26e hat. Dies ist bemerkenswert, hat MIMOSA-18AHR schließlich mit 96*96 im Vergleich zu MIMOSA-32 mit 8*64 eine 18mal bessere Pixelstatistik.\newline +Erste Tests mit MIMOSA-32 zeigten ein sehr hohes Rauschen. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt die Rauschverteilung der Pixel. Verglichen wird MIMOSA-32-P2 und MIMOSA-32-P5 (TOWER-0.18) mit MIMOSA-18AHR-A2 (AMS-0.35). Der Mittelwert der Verteilung von TOWER-0.18 liegt um 20e, für AMS-0.35 dagegen um 12e. Das mittlere Rauschen hat sich dadurch nahezu verdoppelt. Allerdings verschlechtert sich nicht nur das mittlere Rauschen, auch der Schwanz aus Pixeln mit hohen Rauschen vergrößert sich deutlich. Einzelne Pixel von MIMOSA-32-P2 haben ein Rauschen von >50e, während kein Pixel von MIMOSA-18AHR ein Rauschen >26e hat. Dies ist bemerkenswert, hat MIMOSA-18AHR schließlich mit 96*96 im Vergleich zu MIMOSA-32 mit 8*64 eine 18mal bessere Pixelstatistik.\newline Einen ersten Hinweis auf den Ursprung dieses hohen Rauschens bringt der Vergleich mit MIMOSA-32-P5. Dieser hat ein kleineres Quellfolgertor (Source follower gate) als MIMOSA-32-P2. Es wird ein noch stärker ausgeprägter Schwanz beobachtet. Einzelne Pixel haben ein Rauschen von bis zu 85e. \begin{figure} \centering @@ -23,12 +19,14 @@ Einen ersten Hinweis auf den Ursprung dieses hohen Rauschens bringt der Vergleic \end{figure} Ursprünglich wurden Pixel mit kleinerem Quellfolgertor implementiert um die Verstärkung des Transistors zu vergrößern. Diese Abhängigkeit wird in Tabelle XXX gezeigt. Die Verstärkung verbessert sich tatsächlich um $XX\%$. Allerdings muss abgewogen werden, ob diese Verbesserung der Verstärkung nicht mit Nachteilen im Rauschen erkauft wird. Denn der Anstieg des Rauschens beträgt nach Tabelle XXX $XX\%$. Das Rauschen steigt durch die Verwendung des kleineren Quellfolgertors damit stärker als die Verstärkung. Entsprechend erhöht sich das ENC. Ein kleineres Quellfolgertor bringt damit keine Vorteile in Bezug auf das Rauschen der Sensoren. \newline -Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung XXX den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von -35C bis +20C. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Eine starke Temperaturabhängigkeit, wie es zum Beispiel beim erhöhten Rauschen bestrahlter Sensoren auftritt, wird dagegen nicht beobachtet. -Abbildung XXX zeigt dazu die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg des Rauschens ausgleicht. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht bei niedrigerer Betriebstemperatur, sondern steigt sogar leicht an. Die Fehltrefferrate eines bei -35C betriebenen Sensors ist systematisch höher als die eines bei +20C betriebenen Sensors. \newline +Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung XXX den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von -35C bis +20C. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Unerwarteterweise steigt das Rauschen mit Senkung der Betriebstemperatur leicht an. Dies ist gegen die Erwartung von thermischen Rauschen und RTS-Rauschen, welches beides durch eine niedrigere Temperatur unterdrückt werden konnte ZITAT. +Abbildung XXX zeigt dazu die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg des Rauschens ausgleicht. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht bei niedrigerer Betriebstemperatur, sondern steigt sogar leicht an. Die Fehltrefferrate eines bei -35C betriebenen Sensors ist ebenfalls systematisch höher als die eines bei +20C betriebenen Sensors. \newline In der Anwendung als Vertexdetektor kann die Schwelle nicht an das Rauschen eines jeden einzelnen Pixels angepasst werden, sondern es wird eine allgemeine Schwelle für alle Pixel angelegt. Abbildung XXX zeigt die zu erwartende Fehltrefferrate als Funktion der anlegten Schwelle für verschiedene Quellfolgertorgrößen und Abbildung XXX für verschiedene Temperaturen. Auch hier zeigt sich, Sensoren mit einem kleineren Quellfolgertor sowie betrieben bei niedrigerer Temperatur haben, abhängig von der angelegten Schwelle, eine höhere Fehltrefferrate. Der Effekt ist also nicht zu vernachlässigen.\newline Eine mögliche Erklärung wird in XXX beschrieben. Auch dort wurde die Transistortorgröße variiert und eine Abhängigkeit vom Rauschen festgestellt. Dieses Rauschen wurde als 1/f-Rauschen identifiziert, was naheliegenderweise auch hier der Grund für das hohe Rauschen sein sollte. +Die gleiche Signatur wird auch in ausgewählten Pixeln beobachtet (siehe Abbildung XXX). Es sind drei äquidistante Stufen sichtbar. Noch deutlicher wird die Signatur im Histogramm (Abbildung XXX). Studiert man die Temperaturabhängigkeit, so nimmt die Breite des CDS-Signals ab, wie man es von thermischen Rauschen erwarten würde, allerdings verstärkt sich die Signatur gerade bei der niedrigsten erreichbaren Temperatur von -35C. Dies ist der Grund, wieso in den obigen Messungen der nicht erwartete Anstieg des Rauschens mit Senkung der Temperatur beobachtet wurde.\newline +Als Konsequenz aus diesen Beobachtungen wurde die nächste Sensorgeneration MIMOSA-34 mit größeren Transistortoren ausgestattet. Abbildung XXX zeigt das Rauschen einer ausgewählten Matrix. Das Rauschen ist wesentlich geringer als bei MIMOSA-32 und MIMOSA-32ter und beträgt 12e, was mit MIMOSA-18AHR wieder vergleichbar ist. Die Rauschverteilung ist allerdings immer noch sehr viel breiter, was dafür spricht, dass die Pixelmatrix inhomogen ist. Hier ist noch Raum für Verbesserungen. Insbesondere interessant ist, dass ein Teil der Pixel ein sehr geringes Rauschen von <10 aufweist, was im AMS-0.35-Prozess nicht erreicht werden konnte. Wenn es gelinge, die Eigenschaften dieser sehr rauscharmen Pixel zu verstehen, könnte man einen entsprechend homogen rauscharmen Sensor mit <10e Rauschen entwickeln. \section{Ionisierende Strahlenhärte} -TOWER-0.18 sollten eine bessere ionisierende Strahlenhärte haben. Bei unbestrahlten Sensoren wurde allerdings bereits ein höheres Rauschen festgestellt. Die Fragestellung ist, wie sich das Rauschen von TOWER-0.18 nach ionisierender Bestrahlung verhält. Steigt das Rauschen eines TOWER-0.18 weniger stark mit der Bestrahlungsdosis und ist das Rauschen deshalb ab einer bestimmten Bestrahlungsdosis besser als vergleichbare AMS-0.35?\newline +Von den neuen Sensoren wurde eine bessere ionisierende Strahlenhärte erwartet. Bei unbestrahlten Sensoren wurde allerdings bereits ein höheres Rauschen festgestellt. Die Fragestellung ist, wie sich das Rauschen von TOWER-0.18 nach ionisierender Bestrahlung verhält. Steigt das Rauschen eines TOWER-0.18 weniger stark mit der Bestrahlungsdosis und ist das Rauschen deshalb ab einer bestimmten Bestrahlungsdosis besser als vergleichbare AMS-0.35?\newline Das Rauschen von AMS-0.35 steigt nach \cite{Dev07} wie in Abbildung XXX gezeigt nach einer Dosis von 1Mrad an. Da sich die Verstärkung nicht ändert, steigt auch das gemessene Rauschen in mV an. \newline Bei TOWER-0.18 wird bei der dreifach höheren Dosis von 3Mrad kein besonders großer Anstieg des Rauschens beobachtet. Nach 10Mrad wird sogar ein Abfall des gemessenen Rauschens beobachtet. Der Grund liegt in der Verringerung der Verstärkung der Auslesekette. Wird dieses berücksichtigt, ändert sich das ENC nach 3Mrad nicht signifikant bzw. steigt auf 30e nach 10Mrad.\newline Die Verringerung der Verstärkung muss dabei nicht auf ein Feature von TOWER-0.18 zurückzuführen sein. So wurde auch bei MIMOSA-26 im AMS-0.35 eine Halbierung der Verstärkung beobachtet (siehe Abbildung XXX); allerdings bereits nach einer um einen Faktor zehn geringeren Dosis von 1Mrad.\newline @@ -89,6 +87,7 @@ Um die Leistungsf \end{figure} Konventionelle MAPS in AMS-0.35 waren auf einfache Schaltungen beschränkt, da es nicht möglich war PMOS-Transistoren in die P-Senke zu implementieren. Denn die erforderliche n-Implantation konkurriert mit der Sammeldiode um die Ladungssammlung, Signalelektronen gehen in dieser verloren. TOWER-0.18 bietet nun allerdings die Möglichkeit eine tiefe P-Senke unter einer n-Implantation einzubinden (siehe Abbildung XXX). Dies ermöglicht die n-Implantation von der sensitiven Epitaxieschicht zu isolieren. In der Nähe der Diode hat die tiefe P-Senke eine Aussparung um die Ladungssammlung nicht zu beeinflussen. Die dadurch möglichen PMOS-Transistoren ermöglichen komplexere in-Pixel-Verstärkerschaltungen. \newline +PMOS-Transistoren sind notwendig für aufwändigere In-Pixelschaltungen mit Diskriminatoren, die notwendig sind um von der zeilenparallen Auslese auf eine pixelindividuelle Auslese zu kommen und damit die Integrationszeit zu senken. In MIMOSA-32 wurde zum ersten Mal diese Technologie in einen MAPS-Sensor integriert um das Funktionsprinzip zu demonstrieren. Dabei sollte vor allem ein Einfluss auf die Ladungssammlung ausgeschlossen werden.\newline Abbildung XXX zeigt nun das Fe-55-Spektrum von drei MIMOSA-32-Matrizen. Die erste Matrix hat keine tiefe P-Senke, die zweite Matrix hat eine tiefe P-Senke, wobei die Aussparung um die Diode 6mum beträgt, während die dritte Matrix zwar ebenfalls eine tiefe P-Senke hat, deren Aussparung 10mum beträgt.\newline Von Interesse ist nun eine Abweichung des Spektrums in der Nähe des Kalibrationspeaks, da dies einen Scann in der Nähe der Diode darstellt. Die zweite Matrix mit 6mum Aussparung hat einen signifikanten Verlust an Einträgen dort. Die P-Senke beeinflusst damit die Ladungssammlung bei einer Aussparung von nur 6mum. Dieser Effekt ist in der dritten Matrix mit 10mum Aussparung nicht sichtbar. Das Spektrum dieser Matrix unterscheidet sich nicht signifikant von der Matrix ohne tiefer P-Senke. Damit sollte die Aussparung der tiefen P-Senke in der Nähe der Diode größer als 6mum sein um einen Einfluss auf die Ladungssammlung auszuschließen. \newline diff --git a/Doering-PHD-Thesis/PHDthesis.aux b/Doering-PHD-Thesis/PHDthesis.aux index 34646e2..895be9e 100755 --- a/Doering-PHD-Thesis/PHDthesis.aux +++ b/Doering-PHD-Thesis/PHDthesis.aux @@ -42,7 +42,7 @@ \bibcite{Amar07}{AY07} \bibcite{CharmSummaryPaper}{B{$^{+}$}11} \bibcite{Alex08}{B\"ud08} -\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{171}{appendix*.122}} +\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.122}} \bibcite{BlumeKP4}{Blu12} \bibcite{teststandsystem}{C{$^{+}$}04} \bibcite{CMS}{C{$^{+}$}11} diff --git a/Doering-PHD-Thesis/PHDthesis.lof b/Doering-PHD-Thesis/PHDthesis.lof index b96d2ae..e3a4cf3 100755 --- a/Doering-PHD-Thesis/PHDthesis.lof +++ b/Doering-PHD-Thesis/PHDthesis.lof @@ -122,41 +122,41 @@ \contentsline {subfigure}{\numberline {(b)}{\ignorespaces 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a/Doering-PHD-Thesis/PHDthesis.toc +++ b/Doering-PHD-Thesis/PHDthesis.toc @@ -49,7 +49,7 @@ \contentsline {chapter}{\numberline {3}Strahlensch\"aden}{49}{chapter.3} \contentsline {section}{\numberline {3.1}Oberfl\"achensch\"aden}{49}{section.3.1} \contentsline {section}{\numberline {3.2}Volumensch\"aden}{51}{section.3.2} -\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 19.~September 2013}{55}{chapter.4} +\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 23.~September 2013}{55}{chapter.4} \contentsline {section}{\numberline {4.1}Experimenteller Aufbau}{55}{section.4.1} \contentsline {subsection}{\numberline {4.1.1}Elektronik}{55}{subsection.4.1.1} \contentsline {subsection}{\numberline {4.1.2}Temperaturkontrolle}{56}{subsection.4.1.2} @@ -70,7 +70,7 @@ \contentsline {subsection}{\numberline {4.4.2}Ausheilverhalten}{80}{subsection.4.4.2} \contentsline {subsection}{\numberline {4.4.3}Zusammenfassung}{81}{subsection.4.4.3} \contentsline {section}{\numberline {4.5}Zusammenfassung}{81}{section.4.5} -\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 19.~September 2013}{82}{chapter.5} +\contentsline {chapter}{\numberline {5}Hochohmige CMOS-Sensoren 23.~September 2013}{82}{chapter.5} \contentsline {section}{\numberline {5.1}MAPS mit hochohmiger Epitaxieschicht}{82}{section.5.1} \contentsline {subsection}{\numberline {5.1.1}Ladungssammlungseffizienz des Seedpixels}{86}{subsection.5.1.1} \contentsline {subsubsection}{\numberline {5.1.1.1}MIMOSA-26-Puzzle}{88}{subsubsection.5.1.1.1} @@ -103,32 +103,32 @@ \contentsline {subsection}{\numberline {5.3.5}Zusammenfassung}{127}{subsection.5.3.5} \contentsline {section}{\numberline {5.4}Zusammenfassung}{128}{section.5.4} \contentsline {section}{\numberline {5.5}Schlussfolgerung}{128}{section.5.5} -\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 19.~September 2013}{129}{chapter.6} +\contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 23.~September 2013}{129}{chapter.6} \contentsline {section}{\numberline {6.1}Einf\"uhrung}{129}{section.6.1} \contentsline {section}{\numberline {6.2}Rauschverhalten}{130}{section.6.2} -\contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{132}{section.6.3} -\contentsline {subsection}{\numberline {6.3.1}Rauschverhalten nach ionisierender Bestrahlung}{133}{subsection.6.3.1} -\contentsline {subsection}{\numberline {6.3.2}Einfluss von Integrationszeit}{133}{subsection.6.3.2} -\contentsline {section}{\numberline {6.4}1/f-Noise}{136}{section.6.4} -\contentsline {section}{\numberline {6.5}PMOS-Transistor}{139}{section.6.5} -\contentsline {section}{\numberline {6.6}Breite Calpeak Pixeldistribution}{142}{section.6.6} -\contentsline {section}{\numberline {6.7}Neutronbestrahlung}{142}{section.6.7} -\contentsline {section}{\numberline {6.8}PreamplifierPixel}{146}{section.6.8} -\contentsline {section}{\numberline {6.9}Vergleich P25 und P26}{151}{section.6.9} -\contentsline {section}{\numberline {6.10}Beamtest}{153}{section.6.10} -\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{154}{chapter.7} -\contentsline {chapter}{\numberline {A}Anhang}{155}{appendix.A} -\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{155}{section.A.1} -\contentsline {subsection}{\numberline {A.1.1}Rauschen}{157}{subsection.A.1.1} -\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{157}{subsection.A.1.2} -\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{157}{subsection.A.1.3} -\contentsline {subsubsection}{\numberline {A.1.3.1}Rauschen}{163}{subsubsection.A.1.3.1} -\contentsline {subsection}{\numberline {A.1.4}Cluster}{164}{subsection.A.1.4} -\contentsline {subsection}{\numberline {A.1.5}Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{167}{subsection.A.1.5} -\contentsline {subsection}{\numberline {A.1.6}Einfluss der Integrationszeit}{168}{subsection.A.1.6} -\contentsline {subsubsection}{\numberline {A.1.6.1}Differenzierungen}{168}{subsubsection.A.1.6.1} -\contentsline {paragraph}{\numberline {A.1.6.1.1}Einfluss des Pixelpitches}{168}{figure.caption.120} -\contentsline {paragraph}{\numberline {A.1.6.1.2}Einfluss der Diodenoberfl\"ache}{169}{paragraph.A.1.6.1.2} -\contentsline {subsubsection}{\numberline {A.1.6.2}Zusammenfassung}{169}{subsubsection.A.1.6.2} -\contentsline {subsection}{\numberline {A.1.7}Fehltreffer}{169}{subsection.A.1.7} -\contentsline {chapter}{Literaturverzeichnis}{171}{appendix*.122} +\contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{134}{section.6.3} +\contentsline {subsection}{\numberline {6.3.1}Rauschverhalten nach ionisierender Bestrahlung}{134}{subsection.6.3.1} +\contentsline {subsection}{\numberline {6.3.2}Einfluss von Integrationszeit}{134}{subsection.6.3.2} +\contentsline {section}{\numberline {6.4}1/f-Noise}{138}{section.6.4} +\contentsline {section}{\numberline {6.5}PMOS-Transistor}{141}{section.6.5} +\contentsline {section}{\numberline {6.6}Breite Calpeak Pixeldistribution}{144}{section.6.6} +\contentsline {section}{\numberline {6.7}Neutronbestrahlung}{144}{section.6.7} +\contentsline {section}{\numberline {6.8}PreamplifierPixel}{148}{section.6.8} +\contentsline {section}{\numberline {6.9}Vergleich P25 und P26}{153}{section.6.9} +\contentsline {section}{\numberline {6.10}Beamtest}{155}{section.6.10} +\contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{156}{chapter.7} +\contentsline {chapter}{\numberline {A}Anhang}{157}{appendix.A} +\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{157}{section.A.1} +\contentsline {subsection}{\numberline {A.1.1}Rauschen}{159}{subsection.A.1.1} +\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{159}{subsection.A.1.2} +\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{159}{subsection.A.1.3} +\contentsline {subsubsection}{\numberline {A.1.3.1}Rauschen}{165}{subsubsection.A.1.3.1} +\contentsline {subsection}{\numberline {A.1.4}Cluster}{166}{subsection.A.1.4} +\contentsline {subsection}{\numberline {A.1.5}Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{169}{subsection.A.1.5} +\contentsline {subsection}{\numberline {A.1.6}Einfluss der Integrationszeit}{170}{subsection.A.1.6} +\contentsline {subsubsection}{\numberline {A.1.6.1}Differenzierungen}{170}{subsubsection.A.1.6.1} +\contentsline {paragraph}{\numberline {A.1.6.1.1}Einfluss des Pixelpitches}{170}{figure.caption.120} +\contentsline {paragraph}{\numberline {A.1.6.1.2}Einfluss der Diodenoberfl\"ache}{171}{paragraph.A.1.6.1.2} +\contentsline {subsubsection}{\numberline {A.1.6.2}Zusammenfassung}{171}{subsubsection.A.1.6.2} +\contentsline {subsection}{\numberline {A.1.7}Fehltreffer}{171}{subsection.A.1.7} +\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.122} diff --git a/Doering-PHD-Thesis/Strahlung.aux b/Doering-PHD-Thesis/Strahlung.aux index 0fac101..aea88b9 100755 --- a/Doering-PHD-Thesis/Strahlung.aux +++ b/Doering-PHD-Thesis/Strahlung.aux @@ -33,7 +33,7 @@ \newlabel{kappa}{{3.2}{53}{Volumenschäden}{equation.3.2.2}{}} \newlabel{eq:leaklinear}{{3.5}{54}{Volumenschäden}{equation.3.2.5}{}} \citation{teststandsystem} -\@writefile{toc}{\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 19.~September 2013}{55}{chapter.4}} +\@writefile{toc}{\contentsline {chapter}{\numberline {4}Methoden zur Strahlenh\"arteuntersuchung 23.~September 2013}{55}{chapter.4}} \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} \@writefile{toc}{\contentsline {section}{\numberline {4.1}Experimenteller Aufbau}{55}{section.4.1}} diff --git a/newCOMBI/ChargeSpektrum.c b/newCOMBI/ChargeSpektrum.c index fbfc45e..ed0bc73 100755 --- a/newCOMBI/ChargeSpektrum.c +++ b/newCOMBI/ChargeSpektrum.c @@ -430,7 +430,7 @@ struct laborbook LaborBuch(Int_t inputRun) std::string matrix; std::string radDose; - std::ifstream file("LaborbuchMi34Test.txt"); + std::ifstream file("LaborbuchMi34.txt"); CSVRow row; file >> row; while (file >> row) @@ -440,7 +440,7 @@ struct laborbook LaborBuch(Int_t inputRun) { Int_t runLabor; runLabor=atoi(row[COLRUNNO].c_str()); - + cout<