From: Dennis Doering <dennis@jspc31.x-matter.uni-frankfurt.de>
Date: Sat, 12 Oct 2013 09:51:57 +0000 (+0200)
Subject: PHD thesis update
X-Git-Url: https://jspc29.x-matter.uni-frankfurt.de/git/?a=commitdiff_plain;h=9be6a31338ab148ab55e4287a09f2fb8181d6c71;p=radhard.git

PHD thesis update
---

diff --git a/Doering-PHD-Thesis/Bilder/IonizingOxidGuard.pdf b/Doering-PHD-Thesis/Bilder/IonizingOxidGuard.pdf
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diff --git a/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-CDS-Signal.pdf b/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-CDS-Signal.pdf
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diff --git a/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-Distribution.pdf b/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-Distribution.pdf
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diff --git a/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-table.pdf b/Doering-PHD-Thesis/BilderMi32/Mi32-1-f-noise-table.pdf
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diff --git a/Doering-PHD-Thesis/BilderMi32/Mi32_FakehitsVar_TransSize.pdf b/Doering-PHD-Thesis/BilderMi32/Mi32_FakehitsVar_TransSize.pdf
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diff --git a/Doering-PHD-Thesis/BilderMi32/NoiseInt.pdf b/Doering-PHD-Thesis/BilderMi32/NoiseInt.pdf
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diff --git a/Doering-PHD-Thesis/Strahlung.tex b/Doering-PHD-Thesis/Strahlung.tex
index e146a88..b13111f 100755
--- a/Doering-PHD-Thesis/Strahlung.tex
+++ b/Doering-PHD-Thesis/Strahlung.tex
@@ -1,21 +1,23 @@
 %%% ----------------------------------------------------------------------
 \chapter[Strahlenschäden]{Strahlenschäden in Siliziumdetektoren}\label{Strahlung}
-Aus Photonen oder massiven Teilchen bestehende Strahlung wechselwirkt mit Materie und kann dadurch Schäden im Silizium des Detektors hervorrufen, die als Strahlenschäden bezeichnet werden. Frühere Arbeiten\footnote{Beispielsweise nachzulesen in \cite{Dev07} und \cite{Moll99}.} zeigten, dass es weniger auf die Zusammensetzung der durch den Detektor fliegenden Teilchen als auf deren Wechselwirkung mit dem Detektor ankommt. Hierbei kann nach Schäden durch nicht-ionisierende Strahlung und Schäden durch ionisierenden Strahlung differenziert werden.\newline
-Strahlenschäden nach nicht-ionisierender Bestrahlung werden auch als Volumenschäden (bulk damage) und Strahlenschäden nach ionisierender Bestrahlung als Oberflächenschäden (surface damage) bezeichnet \cite{Moll99}. Während die ionisierende Wechselwirkung Ionisationsprozesse bewirkt, führt nicht-ionisierende Wechselwirkung meist durch elastische Stöße zum Herausschlagen von Atomen aus dem Gitter.
+Aus Photonen oder massiven Teilchen bestehende Strahlung wechselwirkt mit Materie und kann dadurch Schäden im Detektor hervorrufen, die als Strahlenschäden bezeichnet werden. Frühere Arbeiten \cite{Moll99,Dev07} zeigten, dass es weniger auf die Zusammensetzung der durch den Detektor fliegenden Teilchen als auf deren Wechselwirkung mit dem Detektor ankommt. Hierbei kann nach Schäden durch nicht-ionisierende Strahlung, auch als Volumenschäden (bulk damage) bezeichnet, und Schäden durch ionisierenden Strahlung, auch Oberflächenschäden (surface damage) genannt, differenziert werden.\newline
+Während die ionisierende Wechselwirkung Ionisationsprozesse bewirkt, führt nicht-ionisierende Wechselwirkung meist durch elastische Stöße zum Herausschlagen von Atomen aus dem Gitter.\newline
 \section[Oberflächenschäden]{Strahlenschäden nach ionisierender Bestrahlung\newline (Oberflächenschäden)}
 \label{ionistrahlung}
-Ionisierend erzeugte Strahlenschäden werden durch in die Elektronenwolke eingebrachte Energie hervorgerufen, die durch geladene Teilchen oder Photonen übertragen wird. Dadurch werden Atome ionisiert, beziehungsweise Atombindungen und Moleküle aufgebrochen. Die Atome bleiben aber an ihrer Position im Kristallgitter. Reine Siliziumkristalle werden durch ionisierende Strahlung nicht beschädigt, da die ionisierten Elektronen durch thermische Elektronen aus dem Leitungsband ersetzt werden können.\newline
+Ionisierend erzeugte Strahlenschäden werden durch in die Elektronenwolke eingebrachte Energie hervorgerufen, die durch geladene Teilchen oder Photonen übertragen wird. Dadurch werden Atome ionisiert, beziehungsweise Atombindungen und Moleküle aufgebrochen. Die Atome bleiben aber an ihrer Position im Kristallgitter. Reine Siliziumkristalle werden durch ionisierende Strahlung nicht beschädigt, da die ionisierten Elektronen durch thermische Elektronen aus dem Leitungsband ersetzt werden können. Im Siliziumdioxid dagegen sammeln sich die positiven Löcher an.\newline
 
-Die Dosimetrie wird durch den Nachweis der Elektronen der durch die Strahlung ionisierten Atome durchgeführt. Die durch ionisierende Strahlung erzeugte Defektdichte hängt auch dann lediglich von der Summe des auf das Material übertragenen Energie ab, wenn sich die einzelnen ionisierenden Wechselwirkungen im Hinblick auf Energieübertrag und Zeitskala stark unterscheiden \cite{Fuessel}. Angegeben wird die Strahlendosis ionisierender Strahlung deshalb allgemein als Energiedeposition pro Masse der bestrahlten Probe.\newline
-Die SI-Einheit der Strahlendosis ionisierender Strahlung ist Gray, wobei $1~\rm Gy= 1~\rm \frac{J}{kg}$ ist. Die veraltete Einheit $Rad$ mit der Umrechnung $1~\rm Rad =10^{-2}~\rm Gy$ ist in der Detektorphysik weit verbreitet, so dass in dieser Arbeit die Einheit $Rad$ anstatt der SI-Einheit $Gy$ verwendet wird, um eine Konsistenz mit vorherigen Arbeiten zu erhalten.\newline
+Die Dosimetrie wird durch den Nachweis der Elektronen der durch die Strahlung ionisierten Atome durchgeführt. Dazu wird die Energie der Elektronen gemessen und daraus auf die Energiedeposition geschlossen. Dabei wird angenommen, dass die durch ionisierende Strahlung erzeugte Defektdichte auch dann lediglich von der Summe des auf das Material übertragenen Energie abhängen, wenn sich die einzelnen ionisierenden Wechselwirkungen im Hinblick auf Energieübertrag und Zeitskala stark unterscheiden \cite{Fuessel}. Angegeben wird die Strahlendosis ionisierender Strahlung deshalb allgemein als Energiedeposition pro Masse der bestrahlten Probe.\newline
+Die SI-Einheit der Strahlendosis ionisierender Strahlung ist $Gray$, wobei $1~\rm Gy= 1~\rm \frac{J}{kg}$ ist. Die veraltete Einheit $rad$ mit der Umrechnung $1~\rm rad =10^{-2}~\rm Gy$ ist in der Detektorphysik weit verbreitet, so dass in dieser Arbeit die Einheit $rad$ anstatt der SI-Einheit $Gy$ verwendet wird, um eine Konsistenz mit vorherigen Arbeiten zu erhalten.\newline
 
-Die Defekte werden im Siliziumdioxid erzeugt. Ionisierende Strahlen können trotz der relativ großen Bandlücke des Siliziumdioxid von $8,8~\rm eV$ Elektron/Lochpaare erzeugen. Die Beweglichkeit der Elektronen im Material ist höher als die Beweglichkeit der Löcher, so dass die Elektronen in andere Bereiche diffundieren und den Löchern ihre Rekombinationspartner fehlen. Diese diffundieren dadurch zur Grenzschicht und werden mit einer gewissen Wahrscheinlichkeit durch Defekte an der Grenzschicht eingefangen, bevor sie mit einem Elektron aus dem Silizium rekombinieren können. Die positive Ladung sammelt sich an der Grenzfläche und erzeugt elektrische Felder.\newline
+Irreversible Defekte werden im Siliziumdioxid erzeugt. Ionisierende Strahlen können trotz der relativ großen Bandlücke des Siliziumdioxid von $8,8~\rm eV$ Elektron/Lochpaare erzeugen. Die Beweglichkeit der Elektronen im Material ist höher als die Beweglichkeit der Löcher, so dass die Elektronen in andere Bereiche diffundieren und den Löchern ihre Rekombinationspartner fehlen. Diese diffundieren dadurch zur Grenzschicht und werden mit einer gewissen Wahrscheinlichkeit durch Defekte an der Grenzschicht eingefangen, bevor sie mit einem Elektron aus dem Silizium rekombinieren können. Die positive Ladung sammelt sich an der Grenzfläche und erzeugt elektrische Felder.\newline
 
-Die positiven Ladungsträger können dabei durch den Tunneleffekt aus dem Siliziumdioxid ausheilen. Da die Tunnelwahrscheinlichkeit von der Dicke des Potentials abhängt, können die Ladungsträger durch dünnere Siliziumdioxidschichten einfacher tunneln. Entsprechend sollten Siliziumdioxidschichten möglichst dünn sein. Dies hat zwar zur Folge, dass die isolierende Funktion, für die die Siliziumdioxidschicht verwendet wird, nicht mehr so gut ist, was größere Leckströme in unbestrahlten Sensoren zur Folge hat. Allerdings ist der Effekt klein im Vergleich zur Verbesserung der ionisierenden Strahlenhärte dadurch.\newline
+Weiterhin entstehen auch direkt Defekte an der Silizium-Siliziumdioxidoberfläche, da durch die ionisierende Strahlung die verbogenen Bindungen an der Grenzfläche aufgebrochen werden können.\newline
+
+Die positiven Ladungsträger können dabei aus dem Siliziumdioxid tunneln und damit die Schäden ausheilen. Da die Tunnelwahrscheinlichkeit von der Dicke des Potentials abhängt, können die Ladungsträger durch dünnere Siliziumdioxidschichten einfacher tunneln. Entsprechend sollten Siliziumdioxidschichten möglichst dünn sein. Dies hat allerdings zur Folge, dass die isolierende Funktion, für die die Siliziumdioxidschicht verwendet wird, nicht mehr so gut ist, was größere Leckströme in unbestrahlten Sensoren zur Folge hat. Damit muss der Effekt im Vergleich zum Verhalten nach ionisierender Bestrahlung abgewogen werden und ein entsprechender Kompromiss gefunden werden.\newline
 
 Die induzierten Felder können die elektrischen Eigenschaften der Schaltkreise verändern. So können diese eine Verbindung zwischen Quelle (source) und Abfluss (drain) eines Transistors hervorrufen und dadurch ungewollte Leckströme generieren. Zur Abschirmung der Transistoren haben sich nach \cite{guardrings} spezielle Schutzringe (guard rings) bewährt, die die Anschlüsse des Transistors umgeben. Die Schutzringe selbst bestehen aus dünnem Oxid, das ein Ausheilen der durch die ionisierende Bestrahlung generierten Löcher durch den Tunneleffekt ermöglicht.\newline
 
-Die Ladungsträger diffundieren nicht im Siliziumdioxid, sondern driften durch elektrische Felder. Deshalb hängen die Schäden ionisierender Bestrahlung davon ab, ob der Sensor in Betrieb ist und damit elektrische Felder vorhanden sind. Die während der ionisierenden Bestrahlung generierten Oberflächenschäden sind in kurzgeschlossenen Detektoren wesentlich geringer. Entsprechend wurden ionisierende Bestrahlungen ausschließlich mit bei der Bestrahlung betriebsfähigen Chips durchgeführt.\newline
+Im Siliziumdioxid lassen elektrische Felder die durch ionisierende Strahlung generierten Elektron-Lochpaare in entgegengesetzte Richtung auseinanderdriften. Die Elektron-Lochpaare können dadurch nicht wieder miteinander rekombinieren. Umgekehrt argumentiert, werden ohne elektrische Felder die Elektron-Lochpaare nicht getrennt und können größtenteils wieder rekombinieren. Die während der ionisierenden Bestrahlung generierten Oberflächenschäden sind deshalb in kurzgeschlossenen Detektoren wesentlich geringer. Um die ionisierende Strahlenhärte korrekt zu evaluieren, müssen deswegen die ionisierende Bestrahlungen mit bei der Bestrahlung betriebsfähigen und mit Spannungen versorgten Chips durchgeführt werden. Andernfalls wird die Strahlenhärte im Vergleich zum Anwendungsfall in einem Detektor überschätzt.\newline
 
 
   
@@ -72,15 +74,8 @@ Mit der Bestrahlungszeit $t_{Bestrahlung}$ ergibt sich im n
 \begin{equation}
 	d_{non-io}=t_{Bestrahlung}\cdot \Phi_{eq}
 \end{equation}
-
-Unter der Annahme, dass die durch die Bestrahlung induzierten Defekte für eine Erhöhung des Leckstroms verantwortlich sind, kann nach \cite{Moll99} für verarmte Sensoren eine lineare Parametrisierung der Abhängigkeit des Leckstromes von der Bestrahlungsdosis $\Phi_{eq}$ durchgeführt werden.
-\begin{equation}
-\Delta I =\alpha V \cdot \Phi_{eq}
-	\label{eq:leaklinear}
-\end{equation}
-$V$ ist das Volumen, in dem der Leckstrom generiert wird, $\Delta I$ ist die Differenz des Leckstromes vor und nach der Bestrahlung. Die Leckströme vor der Bestrahlung sind normalerweise im Vergleich zu denen nach dem Bestrahlen vernachlässigbar. Trotzdem werden diese in der Berechnung berücksichtigt. Der Proportionalitätsfaktor $\alpha$ wird Leckstrom erhöhende Schadensrate (current related damage rate) genannt und hängt von der Betriebstemperatur und Ausheilungshistorie des Sensors ab. Im Umkehrschluss lässt sich damit aus einer Änderung des Proportionalitätsfaktors auf eine Ausheilung schließen, wenn dieser in einem zeitlichen Abstand bei gleicher Temperatur gemessen wird.\newline
-
-Die in der Epitaxieschicht generierten Volumenschäden stellen Rekombinationszentren für Signalelektronen dar. Eine höhere Dosis nicht-ionisierender Strahlung generiert mehr Defekte. Eine größere Anzahl an Defekten erhöht die Rekombinationswahrscheinlichkeit der Signalelektronen, so dass die Lebenserwartung dieser im Leitungsband mit steigender Strahlendosis sinkt. Die Rekombinationswahrscheinlichkeit hängt dabei von der Länge der Diffusionspfade ab. Eine geführte Ladungssammlung durch Felder oder kürzere Diffusionslängen durch kleinere Pixelabstände führen zu einer Verringerung der Rekombinationsrate.
+Die Defekte aufgrund von Volumenschäden haben nun zwei Auswirkungen. Erstens stellen die Defekte Rekombinationszentren für Signalelektronen dar. Eine höhere Dosis nicht-ionisierender Strahlung generiert mehr Defekte. Eine größere Anzahl an Defekten erhöht die Rekombinationswahrscheinlichkeit der Signalelektronen, so dass die Lebenserwartung dieser im Leitungsband mit steigender Strahlendosis sinkt. Die Rekombinationswahrscheinlichkeit hängt dabei von der Länge der Diffusionspfade ab. Eine geführte Ladungssammlung durch Felder oder kürzere Diffusionslängen durch kleinere Pixelabstände führen zu einer Verringerung der Rekombinationsrate. Zweitens wirken die Volumenschäden für Elektronen als Zwischenzustand in der Bandlücke. Elektronen, die nicht genug thermische Energie haben um die Bandlücke in einem Sprung zu überwinden, können dies über den Zwischenzustand. Der Leckstrom und das Rauschen steigen. \newline
+Experimentell wurde nach \cite{Dev07} für die Rekombinationsrate eine Exponentialabhängigkeit und für den Leckstrom nach \cite{Moll99} eine lineare Abhängigkeit von der nicht-ionisierenden Bestrahlungsdosis gefunden (siehe Abschnitt \ref{Strahlenschäden nach Neutronenbestrahlung}). \newline
 
 \section{Bekannte Strahlenschäden an MAPS}
 Parallel zur Forschung und Entwicklung von MAPS für Detektoranwendungen wurden bereits seit 1999 umfangreiche Strahlenhärtestudien durchgeführt. Insbesondere die Wirkung von Volumen- oder Oberflächenschäden auf die Eigenschaften der Sensoren bei verschiedenen Arten von Prototypen waren Themen vorangegangener Arbeiten, die in den folgenden Abschnitten kurz zusammengefasst werden. \newline
@@ -113,7 +108,7 @@ Parallel zur Forschung und Entwicklung von MAPS f
 	\label{fig:MichMi2}
 	
 \end{figure}
-Strahlenhärtestudien zu Oberflächenschäden wurden von \cite{Dep02}, \cite{Devxraypaper}, \cite{Dev07} und \cite{Amar07} durch Bestrahlung mit $\sim 10~\rm keV$ Röntgenstrahlung durchgeführt.\newline
+Strahlenhärtestudien zu Oberflächenschäden wurden von \cite{Dep02}, \cite{Devxraypaper}, \cite{Dev07}, \cite{DoeringMaster} und \cite{Amar07} durch Bestrahlung mit $\sim 10~\rm keV$ Röntgenstrahlung durchgeführt.\newline
 Eine Auswahl der Ergebnisse aus \cite{Amar07} zeigt Abbildung \ref{fig:samirxray}. Die Sensoren MIMOSA-11 und \mbox{MIMOSA-15} wurden bis zu einer Dosis von $1~\rm MRad $ bestrahlt und bei $T=+10~{}^{\circ}\rm C$ und $T=+20~{}^{\circ}\rm C$ betrieben. Der Leckstrom erhöht sich von $(8\pm3)~\rm fA$ auf $(75\pm5)~\rm fA$. Auch das Rauschen erhöht sich. Es wurde bei $T=-20~{}^{\circ}\rm C$ ein Anstieg von $(9,5\pm1,1)~\rm e$ auf $(17,0\pm1,6)~\rm e$ sowie bei $T=+20~{}^{\circ}\rm C$ eine Erhöhung von $(16,6\pm1,6)~\rm e$ auf $(30,9\pm0,8)~\rm e$ beobachtet. Aus dem geringeren Anstieg des Rauschens bei $T=-20~{}^{\circ}\rm C$ wird geschlossen, dass es günstig sein kann, die Sensoren zu kühlen. Der Autor vermutet als Grund für den Anstieg des Leckstromes und des Rauschens positive Ladungsträger nahe der Silizium-Siliziumdioxidgrenzfläche, die Kanäle zusätzlichen Ladungsflusses öffnen könnten. Abhilfe schaffen, wie in Abschnitt \ref{ionistrahlung} ausgeführt, dünnes Siliziumdioxid und Schutzringe um die Kontakte der Transistoren, so dass eine Strahlenhärte bei entsprechend optimierten Sensoren von bis zu $1~\rm MRad $ erreicht wird. Abbildung \ref{fig:IonizingOxidGuard} zeigt das Rauschen einer Matrix mit dickem und dünnen Oxid. Das Rauschen verringert sich durch das Einführen des dünnen Oxids bei $T=+40\C$ von $(57\pm5)\e$ auf $(41\pm3)\e$ Das Einbinden eines zusätzlichen Schutzringes verringert das Rauschen auf nur noch $(32\pm3)\e$.   \newline
 Der Anstieg des Leckstroms bei SB-Pixel lässt sich nur indirekt über die Nachladekonstante messen. Die Nachladekonstante verringert sich von $(80\pm 40)~\rm ms$ auf $5~\rm ms$ \cite{Amar07}. Der Autor schlussfolgert indirekt aus diesem Ergebnis, dass sowohl der Leckstrom als auch der Nachladestrom exponentiell ansteigen und der Anstieg des Leckstroms dadurch ausgeglichen wird. Der höhere Nachladestrom erschwert allerdings die Signalidentifikation. Bei einem kleinen Nachladestrom wird ein Signal nur langsam ausgeglichen, die Nachladekonstante ist wie beobachtet groß. Ist dagegen der Nachladestrom groß, wird ein Signal sehr schnell ausgeglichen, die Nachladekonstante ist wie beobachtet klein. Eine kleine Nachladekonstante führt dazu, dass die Diode im Grenzbereich der Strahlentoleranz das Signal immer mehr auslöscht, bis es nicht mehr identifiziert werden kann.\newline
 \begin{figure}
@@ -127,7 +122,7 @@ Der Leckstrom und das Rauschen von ionisierenden Strahlensch
   
 Ein Einfluss ionisierender Strahlung auf die Ladungssammlungseffizienz wie nach nicht-ionisierender Bestrahlung wird laut \cite{Dev07} ausgeschlossen, da Ionisationen im Silizium reversibel sind. Dies muss allerdings für mindestens MIMOSA-2 eingeschränkt werden. Bei diesen speziellen Sensoren wurde unerwarteterweise ein Einbruch der Ladungssammlungseffizienz nach Röntgenbestrahlung einer Dosis von $400~\rm kRad $ beobachtet. Abbildung \ref{fig:MichMi2} zeigt das damals gemessene Ladungsspektrum. Der Sammelpeak bricht von $200~\rm ADC$ auf circa $100~\rm ADC$ ein, während sich der Kalibrationspeak und damit die Verstärkung nicht signifikant ändert. Die Verringerung der Ladungssammlungseffizienz von MIMOSA-2 nach Röntgenbestrahlung wird in \cite{Dev07} auf einen Durchbruch der P-Senke aufgrund der positiven Ladung zurückgeführt, so dass in der Epitaxieschicht diffundierende Elektronen auch vom Resettransistor gesammelt werden können, nicht zum Signal beitragen und dadurch eine Verringerung der Ladungssammlungseffizienz hervorrufen. \newline
 
-Damit wird beobachtet, dass nach einer Röntgenbestrahlung der Leckstrom bei 3T-Pixel erhöht wird, während bei SB-Pixel die Nachladekonstante sinkt. Gleichzeitig steigt das Rauschen. Der Anstieg des Leckstroms und Rauschens ist temperaturabhängig und kann durch eine niedrigere Betriebstemperatur abgemildert werden. Eine Optimierung des Design, die Verwendung von dünnen Oxidschichten und Schutzringe können sich öffnende Leitungskanäle unterbinden und damit den Leckstrom senken. 
+Damit wird nach einer ionisierenden Bestrahlung beobachtet, dass der Leckstrom bei 3T-Pixel erhöht wird, während bei SB-Pixel die Nachladekonstante sinkt. Gleichzeitig steigt das Rauschen. Der Anstieg des Leckstroms und Rauschens ist temperaturabhängig und kann durch eine niedrigere Betriebstemperatur abgemildert werden. Eine Optimierung des Design, die Verwendung von dünnen Oxidschichten und Schutzringe können sich öffnende Leitungskanäle unterbinden und damit den Leckstrom senken. 
 \subsection[Volumenschäden]{Volumenschäden in MAPS}
 \label{Strahlenschäden nach Neutronenbestrahlung}
 \begin{figure} 
@@ -144,9 +139,14 @@ Damit wird beobachtet, dass nach einer R
      \label{fig:alexneutron}  
 \end{minipage} 
 \end{figure}
-Die Strahlenhärte von MAPS in Bezug auf Volumenschäden wurde erstmals in \cite{Devneutronpaper} beschrieben. Weitere Informationen können auch den Arbeiten \cite{Dev07}, \cite{Amar07} und \cite{Alex08} entnommen werden. Die Autoren kommen übereinstimmend zu dem Ergebnis, dass sich durch Volumenschäden die Rekombinationsrate erhöht, während gleichzeitig der Leckstrom und das Rauschen ansteigen.\newline
+Die Strahlenhärte von MAPS in Bezug auf Volumenschäden wurde erstmals in \cite{Devneutronpaper} beschrieben. Weitere Informationen können auch den Arbeiten \cite{Dev07}, \cite{Amar07} und \cite{Alex08} entnommen werden. Die Arbeiten beziehen sich allerdings ausschließlich auch niedrigohmige MAPS. Die Autoren kommen übereinstimmend zu dem Ergebnis, dass sich durch Volumenschäden die Rekombinationsrate erhöht, und gleichzeitig der Leckstrom und das Rauschen ansteigen.\newline
 Ein aussagekräftiges Beispiel kann \cite{Alex08} entnommen werden. Durchgeführt wurde diese Studie an MIMOSA-19 bei $T=-20~{}^{\circ}\rm C$ und $T=+20~{}^{\circ}\rm C$ bis zu einer maximalen Dosis von $1,95 \cdot 10^{13}\frac{n_{eq}}{cm^2}$. Eine Auswahl der Resultate zeigt Abbildung \ref{fig:alexneutron}. Bei $T=+20~{}^{\circ}\rm C$ verringert sich die Ladungssammlungseffizienz eines MIMOSA-19 von $84\%$ auf $67\%$. Der Leckstrom steigt von wenigen $\rm fA$ auf bis zu $60~\rm fA$. Das Rauschen steigt von $20~\rm e$ auf über $40~\rm e$. Das bei $-20~{}^{\circ}\rm C$ gemessene Rauschen steigt im Vergleich dazu nur leicht an. Der Autor erklärt die Verringerung der Ladungssammlungseffizienz nach nicht-ionisierender Bestrahlung mit einer erhöhten Defektkonzentration, so dass diffundierende Elektronen eine höhere Rekombinationswahrscheinlichkeit besitzen. Diese Defekte werden weiterhin als Quelle für den erhöhten Leckstrom und das Rauschen angegeben. Darüber hinaus wird aus dem bei $-20~{}^{\circ}\rm C$ wesentlich geringeren Anstieg des Rauschens geschlossen, dass die Kühlung der Sensoren eine Lösung sein könnte, die Volumenschäden tolerieren zu können.\newline
- 
+Unter der Annahme, dass die durch die Bestrahlung induzierten Defekte für eine Erhöhung des Leckstroms verantwortlich sind, kann nach \cite{Moll99} für verarmte Sensoren eine lineare Parametrisierung der Abhängigkeit des Leckstromes von der Bestrahlungsdosis $\Phi_{eq}$ durchgeführt werden.
+\begin{equation}
+\Delta I =\alpha V \cdot \Phi_{eq}
+	\label{eq:leaklinear}
+\end{equation}
+$V$ ist das Volumen, in dem der Leckstrom generiert wird, $\Delta I$ ist die Differenz des Leckstromes vor und nach der Bestrahlung. Die Leckströme vor der Bestrahlung sind normalerweise im Vergleich zu denen nach dem Bestrahlen vernachlässigbar. Trotzdem werden diese in der Berechnung berücksichtigt. Der Proportionalitätsfaktor $\alpha$ wird Leckstrom erhöhende Schadensrate (current related damage rate) genannt und hängt von der Betriebstemperatur und Ausheilungshistorie des Sensors ab.\newline 
 Für die Ladungsammlungseffizienz $\epsilon_{CCE}(d)$ von vier Pixel als Funktion der Bestrahlungsdosis $d$ wird in \cite{Dev07} eine einfache Exponentialabhängigkeit beobachtet.
 \begin{equation}
 \epsilon_{CCE}(d)=\epsilon_{CCE}(0) \cdot e^{- \frac{d}{h_{cc}}}
@@ -158,25 +158,25 @@ Die Auswirkungen von Volumensch
 
 
 \subsection{Wechselwirkung}
-Oberflächenschäden entstehen an der Silizium-Siliziumdioxidoberfläche, während Volumenschäden in der Epitaxieschicht auftreten. Allerdings haben beide zum Teil die gleichen Effekte auf die Observablen. So erhöhen beide den Leckstrom und das Rauschen. Um die Mechanismen möglichst getrennt zu studieren und beurteilen zu können, ob ein Design eher die ionisierende oder nicht-ionisierende Strahlenhärte verbessert, werden diese getrennt studiert. In der Anwendung als Detektor treten beide Strahlenschäden gleichzeitig auf. In \cite{DoeringMaster} wurde deshalb ein Sensor mit beiden Arten bestrahlt und mit der jeweils einzelnen Bestrahlung verglichen. Es zeigte sich, dass es nur eine kleine zu vernachlässigende zusätzliche Komponente im Leckstrom gibt und sich ansonsten die Effekte der Strahlenschäden addieren. Auch eine thermische Ausheilung wurde durchgeführt und damit die Strategie einzuführen Effekte von Oberflächenschäden durch zeitweises Aufheizen der Sensoren auch in Anwesenheit von Volumenschäden abzumildern. \newline
+Oberflächenschäden entstehen an der Silizium-Siliziumdioxidoberfläche, während Volumenschäden in der Epitaxieschicht auftreten. Allerdings haben beide zum Teil die gleichen Effekte auf die Observablen. So erhöhen beide den Leckstrom und das Rauschen. Um die Mechanismen möglichst getrennt zu studieren und beurteilen zu können, ob ein Design eher die ionisierende oder nicht-ionisierende Strahlenhärte verbessert, werden diese getrennt studiert. In der Anwendung als Detektor treten beide Strahlenschäden gleichzeitig auf. In \cite{DoeringMaster} wurde deshalb ein Sensor mit beiden Arten bestrahlt und mit der jeweils einzelnen Bestrahlung verglichen. Es zeigte sich, dass es nur eine kleine zu vernachlässigende zusätzliche Komponente im Leckstrom gibt und sich ansonsten die Effekte der Strahlenschäden addieren. Auch eine thermische Ausheilung wurde durchgeführt und damit die Strategie überprüft, Effekte von Oberflächenschäden durch zeitweises Aufheizen der Sensoren auch in Anwesenheit von Volumenschäden abzumildern. \newline
 \subsection{Random Telegraph Signal}
-In \cite{Doe08} wurde eine Fehltrefferquelle namens Random Telegraph Signal (RTS) beschrieben. Dabei führt das Wechseln eines Defektzustandes zu einem Öffnen oder Schließen von Leckstromleitungskanälen, was zu einem springenden Signal führt. Diese Signatur kann in 3T-Pixeln zu großen Fehltrefferraten von einzelnen Pixeln führen. In SB-Pixeln führt nur der Sprung von einem Niveau in ein anderes zu einem Fehltreffer, entsprechend ist die Fehltrefferrate durch RTS geringer. In \cite{Doe08} wurde festgestellt, dass das Auftreten von RTS und die Fehltrefferrate von der nicht-ionisierenden Bestrahlungsdosis und Temperatur abhängt. Bei niedrigerer Temperatur sind die Leckströme aufgrund des geöffneten Leitungskanals geringer und damit die Sprungamplitude kleiner. \newline 
+In \cite{Doe08} wurde eine Fehltrefferquelle namens Random Telegraph Signal (RTS) beschrieben. Dabei führt das Wechseln eines Defektzustandes zu einem Öffnen oder Schließen von Leckstromleitungskanälen, was zu einem springenden Signal führt. Diese Signatur kann in 3T-Pixeln zu großen Fehltrefferraten von einzelnen Pixeln führen. In SB-Pixeln führt nur der Sprung von einem Niveau in ein anderes zu einem Fehltreffer, entsprechend ist die Fehltrefferrate durch RTS geringer. In \cite{Doe08} wurde festgestellt, dass das Auftreten von RTS und die Fehltrefferrate von der nicht-ionisierenden Bestrahlungsdosis und Temperatur abhängt. Bei niedrigerer Temperatur sind die Leckströme aufgrund des geöffneten Leitungskanals geringer und damit die Sprungamplitude kleiner. Weiterhin sinkt die Frequenz der Sprünge. \newline 
 
 \chapter{Methoden zur Strahlenhärteuntersuchung \today}
 Die Strahlenhärte wird mit einem Verfahren untersucht, das in diesem Kapitel vorgestellt wird.
 \section{Experimenteller Aufbau}
 \label{experimenteller Aufbau}
-Zur Durchführung der Messungen stehen zwei Messstände zur Verfügung. Ein seit 2007 in Betrieb befindliches USB-System und ein 2013 neu eingerichtetes PXI-System (Abbildung \ref{fig:messaufbau}). Beide Systeme verfügen über eine eigene kühlinfrastruktur und können unabhängig voneinander, parallel, betrieben werden. \newline
+Zur Durchführung der Messungen stehen zwei Messstände zur Verfügung. Ein seit 2007 in Betrieb befindliches USB-System und ein 2013 neu eingerichtetes PXI-System (Abbildung \ref{fig:messaufbau}). Beide Systeme verfügen über eine eigene Kühlinfrastruktur und können unabhängig voneinander, parallel, betrieben werden. \newline
 \subsection{USB-System}
 \label{elektronik} 
-Das USB-System wurde am IPHC Straßburg entwickelt und als MAPS-Messstand im Technologielabor des Institut für Kernphysik Frankfurt (IKF) seit 2007 eingesetzt. Der den Sensor beinhaltende Chip wurde auf eine Testkarte (device testboard) gebondet. Die Hauptaufgabe der Testkarte ist die Weiterleitung der Spannungen und Auslesesignale sowie eine Rauschfilterung der Referenzspannungen. Zusätzlich ermöglichte die Testkarte eine Handhabung, ohne den empfindlichen Chip zu berühren. Eine Hilfskarte (auxiliary board) versorgte die Testkarte über ein Flachbandkabel mit den erforderlichen Spannungen und verband sie weiterhin mit einer oder zwei parallelen USB-Karten (imager board), welche als AD-Wandler und zur Erzeugung der Kontrollsignale mit Hilfe eines FPGAs diente. Eine zusätzliche JTAG-Karte (JTAG board) dient zur Programmierung des Sensors. Die USB-Karten, die über insgesamt acht Auslesekanäle verfügen, konnten über eine Software mit einem Standard-PC gesteuert werden. Mit dieser konnten die elektronischen Parameter der Messung angepasst werden sowie die Datenspeicherung auf Festplatten durchgeführt werden. Die anschließende Datenanalyse wurde mit Mathematica 5.1 und ROOT durchgeführt.\newline
+Das USB-System wurde am IPHC Straßburg entwickelt und als MAPS-Messstand im Technologielabor des Institut für Kernphysik Frankfurt (IKF) seit 2007 eingesetzt. Der den Sensor beinhaltende Chip wird auf eine Testkarte (device testboard) gebondet. Die Hauptaufgabe der Testkarte ist die Weiterleitung der Spannungen und Auslesesignale sowie eine Rauschfilterung der Referenzspannungen. Zusätzlich ermöglicht die Testkarte eine Handhabung, ohne den empfindlichen Chip zu berühren. Eine Hilfskarte (auxiliary board) versorgt die Testkarte über ein Flachbandkabel mit den erforderlichen Spannungen und verbindet sie weiterhin mit einer oder zwei parallelen USB-Karten (imager board), welche als AD-Wandler und zur Erzeugung der Kontrollsignale mit Hilfe eines FPGAs dient. Eine zusätzliche JTAG-Karte (JTAG board) dient zur Programmierung des Sensors. Die USB-Karten, die über insgesamt acht Auslesekanäle verfügen, können über eine Software mit einem Standard-PC gesteuert werden. Mit dieser können die elektronischen Parameter der Messung angepasst werden sowie die Datenspeicherung auf Festplatten durchgeführt werden. Die anschließende Datenanalyse wird mit Mathematica 5.1 und ROOT durchgeführt.\newline
 \subsection{PXI-System}
 Ein zweiter Strahlenhärtemessstand wurde 2013 auf Basis des National Instruments PXI-Systems eingerichtet. Dieses hat den Vorteil mit 16 Auslesekanälen die Statistik zu verdoppeln. Weiterhin ermöglicht die PXI-Verbindung eine höhere Datenrate. Beides resultiert in einer deutlich verbesserten Statistik.\newline
 Die Testkarte, auf die der Chip gebondet ist, wird über Flachbandkabel an eine zweite, baugleiche Hilfskarte angeschlossen, die über eine Zwischenkarte (interface board) mit der Flex-Riokarte des National Instruments PXI-Systems verbunden ist. Die Datenanalyse wird anschließend mit ROOT durchgeführt.\newline
 \subsection{Automatische Datenaufnahme}
 Die automatische Datenaufnahme erleichtert die Durchführung systematischer Strahlenhärtestudien. Diese ermöglicht es die Matrizen eines Chips automatisch durchzumessen. Dazu werden in einer Datenbank die Messparameter festgelegt und ein Skript programmiert anhand dieser die JTAG-Kette, Auslesesoftware, Temperatur und externe Frequenz. Wünschenswert, allerdings noch nicht umgesetzt, ist eine automatische Positionierung der radioaktiven Quellen und Chipaustausch. \newline
 Das große Potential der automatischen Datenaufnahme für eine Strahlenhärtestudie wird an MIMOSA-32 deutlich. Dieser Chip hat 32 Matrizen, die bei mindestens drei Temperaturen vermessen werden müssen. Die Messung eines Fe-55-Spektrums erfordert $1~\rm M$ Auslesezyklen, so dass eine Messung 3-4 Stunden dauert. Ohne automatische Datenaufnahme muss der Chip entsprechend alle 3-4 Stunden neu programmiert werden, so dass pro Arbeitstag im Schnitt nur 2-3 Messungen durchgeführt werden können. Die automatische Datenaufnahme übernimmt dies, so dass nach dem Start mit einem Mausklick nach $32\cdot3\cdot4~\rm h=384~\rm h=16~\rm d$ die Messungen durchgeführt sind.\newline
-Auch systematische Messscanns werden vereinfacht. Beispielsweise sollte die Integrationszeit systematisch über den externen Frequenzgenerator variiert werden. Eine Messung benötigte hier zwar nur $1~\rm k$ Auslesezyklen und damit nur wenige Minuten, allerdings waren 90 Messungen durchzuführen, was in einer Messkampagne von fünf Stunden resultiert, in der eine Arbeitskraft nur mit Messungen durchführen gebunden wird. Die automatische Datenaufnahme kann auch diese Aufgabe übernehmen.\newline
+Auch systematische Messscanns werden vereinfacht. Beispielsweise sollte die Integrationszeit systematisch über den externen Frequenzgenerator variiert werden. Eine Messung benötigte hier zwar nur $1~\rm k$ Auslesezyklen und damit nur wenige Minuten, allerdings waren 90 Messungen durchzuführen, was in einer Messkampagne von fünf Stunden resultiert, in der eine Arbeitskraft nur mit Messungen Durchführen gebunden wird. Die automatische Datenaufnahme kann auch diese Aufgabe übernehmen.\newline
 Darüber hinaus werden menschliche Fehler in der Durchführung des Messprotokolls weitesgehend vermieden und eventuell auftretende Fehler sind besser reproduzierbar oder dank umfassender automatischen Dokumentation leicht nachvollziehbar.\newline  
 Das Skript führt im USB-System folgende Routine aus:
 
@@ -201,13 +201,13 @@ Das Skript f
 		\item Setzen der Referenzspannung $Vref$ (Iterativ) \label{enum:Vref}
 		\item Abschließendes Programmieren der JTAG-Kette
 	\end{enumerate}
-	\item Programmieren des USB-System Software
+	\item Programmieren der USB-System Software
 	
 	\begin{enumerate}
 		\item Setzen der Laufnummer
 		\item Setzen der Zahl der Auslesezyklen
 		\item Start der Messung
-		\item Kontrolle der Basislinie, falls negativ, gehe zurück zu Punkt \ref{enum:Vref} und ändere die Referenzspannung
+		\item Kontrolle der Basislinie, die zwischen 1700 und $2300~\rm mV$ liegen muss. Falls nicht, gehe zurück zu Punkt \ref{enum:Vref} und ändere die Referenzspannung
 		\item Check des Eventzählers, ob dieser die Zahl der Auslesezyklen übersteigt
 		\item Stopp der Messung
 		
@@ -225,16 +225,16 @@ Das Skript f
 
 \subsection{Temperaturkontrolle}
 \label{temperaturkontrolle}
-Die Testkarte konnte, durch ein Wärmeleitpad elektrisch isoliert, auf einen temperierten Metallblock mit einer im Vergleich zur Testkarte und Chip großen Wärmekapazität aufgeschraubt werden. Karte und Metallblock wurden in einer klimatisierten Dunkelkammer installiert, um Lichteinfluss auf die Messung zu unterbinden. Die Temperatur in der Dunkelkammer wurde mit einer Kühlvorrichtung kontrolliert. Ein Kühlsystem\footnote{Nähere Informationen zum Kühlsystem Huber können \cite{huber} entnommen werden.} ermöglichte es, eine Kühlflüssigkeit auf eine Temperatur zwischen $-90~{}^{\circ}\rm C$ und $+40~{}^{\circ}\rm C$ einzustellen. Diese Kühlflüssigkeit wurde in den Metallblock geleitet, der aufgrund seiner großen Wärmekapazität nur sehr langsam die Kühlflüssigkeitstemperatur annahm. Entsprechend wurde die Kühlung des Chips verzögert. Weiterhin erwärmte sich der Chip aufgrund seiner Leistungsaufnahme selbst. Diese Erwärmung wird entsprechend ebenfalls gekühlt, so dass sich ein Gleichgewicht einstellt, welches reproduziert werden muss. Aus diesem Grund wurden drei unterschiedliche Kühlprozeduren entwickelt.\newline
+Die Testkarte kann, durch ein Wärmeleitpad elektrisch isoliert, auf einen temperierten Metallblock mit einer im Vergleich zur Testkarte und Chip großen Wärmekapazität aufgeschraubt werden. Karte und Metallblock werden in einer klimatisierten Dunkelkammer installiert, um Lichteinfluss auf die Messung zu unterbinden. Die Temperatur in der Dunkelkammer wird mit einer Kühlvorrichtung kontrolliert. Ein Kühlsystem\footnote{Nähere Informationen zum Kühlsystem Huber können \cite{huber} entnommen werden.} ermöglicht es, eine Kühlflüssigkeit auf eine Temperatur zwischen $-90~{}^{\circ}\rm C$ und $+40~{}^{\circ}\rm C$ einzustellen. Diese Kühlflüssigkeit wird in den Metallblock geleitet, der aufgrund seiner großen Wärmekapazität nur sehr langsam die Kühlflüssigkeitstemperatur annimmt. Entsprechend wird die Kühlung des Chips verzögert. Weiterhin erwärmt sich der Chip aufgrund seiner Leistungsaufnahme selbst. Diese Erwärmung wird entsprechend ebenfalls gekühlt, so dass sich ein Gleichgewicht einstellt, welches reproduziert werden muss. Aus diesem Grund wurden drei unterschiedliche Kühlprozeduren entwickelt.\newline
 
 So kann erstens bei jeder Messung gewartet werden, bis die Temperatur des Metallblocks innerhalb von $ \pm 2~\rm K$ mit der gewünschten Temperatur übereinstimmt. Dann wird die Messung begonnen und Anfangs- und Endtemperatur der Messung notiert. Die genaue Kühlzeit wird nicht berücksichtigt. Dies hat den Nachteil, dass die gemessene Temperatur unkontrolliert von der eigentlichen Chiptemperatur abweicht, so dass die Temperaturmessung mit einer großen Unsicherheit behaftet wird.\newline
 
 Alternativ kann zweitens die Hysterese der Kühlvorrichtung ausgenutzt werden. Dazu wird von der Ausgangstemperatur ausgegangen zuerst auf eine höhere Temperatur innerhalb einer festgelegten Zeitdauer $t_1$ geheizt und dann innerhalb einer festgelegten Zeitdauer $t_2$ auf die gewünschte Temperatur gekühlt.\newline
 Damit ist zwar noch nicht die genaue Temperatur des Chips bekannt, aber die Temperatur ist besser reproduzierbar, wenn jeweils die gleichen Zeiträume für das Heizen und Kühlen gewählt werden. Für die weiteren Auswertungen wird anschließend die Kühlmitteltemperatur als Temperatur angenommen.\newline
 
-Da die zweite Prozedur mit einem sehr großem Aufwand verbunden ist und die Messungen der Ausheilstudien nur bei $T=+20~{}^{\circ}\rm C$ durchgeführt wurden und somit eine geringere Kühlleistung erfordern, wurde eine gegenüber der zweiten Prozedur vereinfachte dritte Variante entwickelt. In dieser wird $t_1=20~\rm min$ gewartet, bis der Chip die Kühltemperatur möglichst gut annimmt. Dann wird eine Messung ohne Quelle aufgenommen, die $t_2=(9\pm1)~\rm min$ dauert. Daran schließt sich eine Messung mit Quelle an, die $t_3=(18\pm1)~\rm min$ lang ist. Anschließend folgt eine weitere Messung ohne Quelle von ebenfalls $t_4=(9\pm1)~\rm min$, die redundant mit der ersten ist, aber ein etwas anderes Temperaturprofil hat. Der Unterschied zwischen der ersten und dritten Messung kann zur Abschätzung des Einflusses der Temperaturschwankungen auf die Observablen hinzugezogen werden.\newline
+Da die zweite Prozedur mit einem sehr großem Aufwand verbunden ist, wurde eine gegenüber der zweiten Prozedur vereinfachte dritte Variante entwickelt. In dieser wird $t_1=20~\rm min$ gewartet, bis der Chip die Kühltemperatur möglichst gut annimmt. Dann wird eine Messung ohne Quelle aufgenommen, die $t_2=(9\pm1)~\rm min$ dauert. Daran schließt sich eine Messung mit Quelle an, die $t_3=(18\pm1)~\rm min$ lang ist. Anschließend folgt eine weitere Messung ohne Quelle von ebenfalls $t_4=(9\pm1)~\rm min$, die redundant mit der ersten ist, aber ein etwas anderes Temperaturprofil hat. Der Unterschied zwischen der ersten und dritten Messung kann zur Abschätzung des Einflusses der Temperaturschwankungen auf die Observablen hinzugezogen werden.\newline
 
-Bei allen Kühlstrategien wurde darauf geachtet, dass die Chips während der Kühlprozedur in Betrieb waren, damit sich das Temperaturgleichgewicht durch die Inbetriebnahme des Chips nicht mehr ändert. \newline
+Bei allen Kühlstrategien wird darauf geachtet, dass die Chips während der Kühlprozedur in Betrieb sind, damit sich das Temperaturgleichgewicht durch die Inbetriebnahme des Chips nicht mehr ändert. \newline
 %\subsubsection{Kühlung und Temperaturmessung} 
 \begin{figure}
 \centering
@@ -248,7 +248,7 @@ Bei allen K
 		\caption[Infrarotbild eines Chips]{Links: Infrarotbild eines MIMOSA-18 in der Messapparatur. Mit der Infrarotkamera lässt die Temperatur auf dem Chip und der umgebenen PCB-Karte bestimmen. Bei einer Kühlflüssigkeitstemperatur von $T_{Kuehlung}=-70~{}^{\circ}\rm C$  werden $T_{Infrarot}=-34~{}^{\circ}\rm C$ erreicht. Rechts: Der MIMOSA-18 wurde mit schwarzem Kameralack lackiert um eine Referenzfarbe für die Infrarotkamera zu garantieren.}
 	\label{fig:Mi18-Infraredbild}
 \end{figure}
-Die Chips wurden mit einem Huberkühlsystem temperiert, welches Kühlflüssigkeitstemperaturen bis $T=-70~{}^{\circ}\rm C$ ermöglicht und mit dem bereits erfolgreich MAPS gekühlt wurden \cite{Sarah}. Die allerdings offene Frage ist, wie groß die Verluste in der Kühlkette sind und wie groß damit schließlich die Temperatur am Sensor ist. Es wurde in \cite{DoeringMaster} gezeigt, dass mit dem verwendeten Kühlsystem bei sorgfältiger Durchführung des Kühlprotokolls reproduzierbare Leckstrommessungen mit $<1\%$ Genauigkeit durchgeführt werden können und da der Leckstrom empfindlich von der Temperatur abhängt, auch indirekt die Temperatur gut reproduziert werden kann. Eine Aussage über die absolute Temperatur wurde aber in \cite{DoeringMaster,Doe08} nicht gemacht. Es wurden nur Messungen mit einem PT100 am Metallblock durchgeführt, die allerdings nur die Temperatur des Metallblocks und nicht des Sensors wiedergeben. Dies ist insofern wichtig, da der Sensor ebenfalls eine Wärmequelle ist, die gekühlt werden muss. Entsprechend ist die Temperatur des Sensors deutlich höher als die der Kühlflüssigkeit und des Metallblocks. Damit ist die absolute Temperatur des Chips als Funktion der Kühlflüssigkeitstemperatur eine offene Frage. \newline
+Die Chips werden mit einem Huberkühlsystem temperiert, welches Kühlflüssigkeitstemperaturen bis $T=-90~{}^{\circ}\rm C$ ermöglicht. Die allerdings offene Frage ist, wie groß die Verluste in der Kühlkette sind und wie groß damit schließlich die Temperatur am Sensor ist. Es wurde in \cite{DoeringMaster} gezeigt, dass mit dem verwendeten Kühlsystem bei sorgfältiger Durchführung des Kühlprotokolls reproduzierbare Leckstrommessungen mit $<1\%$ Genauigkeit durchgeführt werden können und da der Leckstrom empfindlich von der Temperatur abhängt, auch indirekt die Temperatur gut reproduziert werden kann. Eine Aussage über die absolute Temperatur wurde aber in \cite{DoeringMaster,Doe08} nicht gemacht. Es wurden nur Messungen mit einem PT100 am Metallblock durchgeführt, die allerdings nur die Temperatur des Metallblocks und nicht des Sensors wiedergeben. Dies ist insofern wichtig, da der Sensor ebenfalls eine Wärmequelle ist, die gekühlt werden muss. Entsprechend ist die Temperatur des Sensors deutlich höher als die der Kühlflüssigkeit und des Metallblocks. Damit ist die absolute Temperatur des Chips als Funktion der Kühlflüssigkeitstemperatur eine offene Frage. \newline
 Im Rahmen dieser Arbeit wurde zum ersten Mal die Temperatur direkt auf dem Chip mit einer Infrarotkamera gemessen. Abbildung \ref{fig:Mi18-Infraredbild} links zeigt den Chip im Infrarotbild. Dazu wurde ein MIMOSA-18 mit einem schwarzen Kameralack besprüht um eine für die Infrarottemperaturmessung erforderliche Referenzfläche zu schaffen (Abbildung \ref{fig:Mi18-Infraredbild} rechts). Der Lack war elektrisch nicht-leitend, so dass der Chip nach der Lackierung vollständig funktionsfähig war und während der Temperaturmessung auch betrieben wurde.\newline 
 Die Abhängigkeit der gemessenen Temperatur von der Temperatur der Kühlflüssigkeit zeigt Abbildung \ref{fig:Mi18-temperature-measurement-infrared}. Die Temperatur der Kühlflüssigkeit betrug $-20~{}^{\circ}\rm C$ bis $T=-70~{}^{\circ}\rm C$, während mit der Infrarotkamera eine Temperatur zwischen $-3~{}^{\circ}\rm C$ und $-34~{}^{\circ}\rm C$ gemessen wurde. Ebenfalls eingezeichnet ist die Temperaturmessung des Metallblocks mit Hilfe des PT100. Die Graphen sind über den großen Bereich parallel, womit das Hubersystem über den gesamten Kühlbereich über eine ausgezeichnete Kühlleistung verfügt. Damit zeigt sich, dass die frühere Annahme einer zwar nicht genau bekannten, aber gut reproduzierbaren Temperatur gerechtfertigt war. Es gibt nur einen Offset zur Temperatur am Metallblock. Der Offset beträgt $5\pm1~\rm K$. Damit ist nun die Temperatur an der Oberfläche des Chips bekannt.
 \subsection{Radioaktive Quellen}
@@ -266,7 +266,7 @@ Zur Qualifizierung der Sensoren stehen die Photonenquellen Fe-55 und Cd-109 sowi
 	\label{fig:QuellenhalterungBeta}
 \end{figure}
 \subsubsection{Photonenquellen}
-Die Photonenquellen Fe-55 und Cd-109 sind einem Zylinder mit den Dimensionen $12,7~\rm mm ~\times 5,08~\rm mm$ eingeschlossen (Abbildung \ref{fig:QuellenhalterungPhoton}) und sind zusätzlich durch ein Messinggehäuse mit einer minimalen Dicke von $2~\rm mm$ abgeschirmt. Dieses hat nach unten eine Austrittsöffnung, die während des Transports durch einen Einschub abgeschirmt wird. Für Cd-109 betrug die direkte Dosisleistung am Referenzdatum 01.05.2011 direkt an der geöffneten Austrittsöffnung $5~\rm mSv/h$, am Gehäuse $15~\rm \upmu Sv/h$ sowie unter einer weiteren Transporthaube $<1~\rm \upmu Sv/h$. Für Fe-55 betrug die direkte Dosisleistung am Referenzdatum 21.05.2005 direkt an der geöffneten Austrittsöffnung $45~\rm mSv/h$ und am Gehäuse $3~\rm \upmu Sv/h$. BILD GEHÄUSEZEICHNUNG
+Die Photonenquellen Fe-55 und Cd-109 sind einem Zylinder mit den Dimensionen $12,7~\rm mm ~\times 5,08~\rm mm$ eingeschlossen (Abbildung \ref{fig:QuellenhalterungPhoton}) und sind zusätzlich durch ein Messinggehäuse mit einer minimalen Dicke von $2~\rm mm$ abgeschirmt. Dieses hat nach unten eine Austrittsöffnung, die während des Transports durch einen Einschub abgeschirmt wird. Für Cd-109 betrug die direkte Dosisleistung am Referenzdatum 01.05.2011 direkt an der geöffneten Austrittsöffnung $5~\rm mSv/h$, am Gehäuse $15~\rm \upmu Sv/h$ sowie unter einer weiteren Transporthaube $<1~\rm \upmu Sv/h$. Für Fe-55 betrug die direkte Dosisleistung am Referenzdatum 21.05.2005 direkt an der geöffneten Austrittsöffnung $45~\rm mSv/h$ und am Gehäuse $3~\rm \upmu Sv/h$.
 \subsubsection{Elektronenquellen}
 Die Elektronenquellen Ru-106 und Sr-90 sind einem Zylinder mit den Dimensionen $7.92~\rm mm \times 5,08~\rm mm$ eingeschlossen (Abbildung \ref{fig:QuellenhalterungBeta}). Ein Gehäuse aus mindestens $18~\rm mm$ Plexiglas dient zur Abbremsung der Elektronen. Zusätzlich ist das Plexiglas mit einem $5~\rm mm$ dicken Aluminiumgehäuse zur Absorption sekundärer Photonen umgeben. Für Ru-106 betrug die direkte Dosisleistung am Referenzdatum 01.05.2011 direkt an der geöffneten Austrittsöffnung $1.5~\rm mSv/h$ und am Gehäuse $40~\rm \upmu Sv/h$. Für Sr-90 betrug die direkte Dosisleistung am Referenzdatum 09.09.2011 direkt an der geöffneten Austrittsöffnung $2.7~\rm mSv/h$ und am Gehäuse $7~\rm \upmu Sv/h$.        
 \clearpage
diff --git a/Doering-PHD-Thesis/Titel.tex b/Doering-PHD-Thesis/Titel.tex
index 0ee7785..806d3d4 100755
--- a/Doering-PHD-Thesis/Titel.tex
+++ b/Doering-PHD-Thesis/Titel.tex
@@ -28,8 +28,9 @@
 \bigskip
 \bigskip
 
-{\bf {\Huge Strahlenharte CMOS-Sensoren für Vertexdetektoren}} \\ \vspace{0.5cm}
-
+{\bf {\Huge Strahlenharte CMOS-Sensoren }} \\ \vspace{0.5cm}
+\bigskip
+{\bf {\Huge für Vertexdetektoren}} \\ \vspace{0.5cm}
 
 
 \bigskip
@@ -91,7 +92,7 @@ Johann Wolfgang Goethe-Universit
 \noindent
 \begin{tabular}{l l}
 Dekan:                 & Prof. Dr. Stroth\\
-Betreuer:             & Prof. Dr. Stroth \\
+Gutachter:             & Prof. Dr. Stroth \\
 Datum der Disputation: & XX.XX.201X \\
 \end{tabular}