From: Dennis Doering Date: Mon, 23 Sep 2013 13:46:24 +0000 (+0200) Subject: Mi32 Plots und Text X-Git-Url: https://jspc29.x-matter.uni-frankfurt.de/git/?a=commitdiff_plain;h=9f5f3454fdaf67b7f4a2f2b2bdcf1a2c81f48316;p=radhard.git Mi32 Plots und Text --- diff --git a/Doering-PHD-Thesis/Anhang.aux b/Doering-PHD-Thesis/Anhang.aux index 18f66f8..0c0a6a5 100755 --- a/Doering-PHD-Thesis/Anhang.aux +++ b/Doering-PHD-Thesis/Anhang.aux @@ -4,47 +4,47 @@ \@writefile{lof}{\addvspace {10\p@ }} \@writefile{lot}{\addvspace {10\p@ }} \@writefile{toc}{\contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{157}{section.A.1}} -\@writefile{lot}{\contentsline {table}{\numberline {A.1}{\ignorespaces Vollst\"andige Auflistung der zu den Abbildungen geh\"orenden Messparametern}}{158}{table.caption.110}} -\newlabel{tab:Referenz2}{{A.1}{158}{Vollständige Auflistung der zu den Abbildungen gehörenden Messparametern}{table.caption.110}{}} +\@writefile{lot}{\contentsline {table}{\numberline {A.1}{\ignorespaces Vollst\"andige Auflistung der zu den Abbildungen geh\"orenden Messparametern}}{158}{table.caption.112}} +\newlabel{tab:Referenz2}{{A.1}{158}{Vollständige Auflistung der zu den Abbildungen gehörenden Messparametern}{table.caption.112}{}} \@writefile{toc}{\contentsline {subsection}{\numberline {A.1.1}Rauschen}{159}{subsection.A.1.1}} \@writefile{toc}{\contentsline {subsection}{\numberline {A.1.2}Einfluss des Pixelpitches}{159}{subsection.A.1.2}} \@writefile{toc}{\contentsline {subsection}{\numberline {A.1.3}Einfluss der Dicke der Epitaxieschicht}{159}{subsection.A.1.3}} -\@writefile{lof}{\contentsline {figure}{\numberline {A.1}{\ignorespaces Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}}{160}{figure.caption.111}} -\newlabel{fig:NoiseVergleichLRHR}{{A.1}{160}{Rauschen eines niedrig- und hochohmigen Sensors im Vergleich}{figure.caption.111}{}} -\@writefile{lot}{\contentsline {table}{\numberline {A.2}{\ignorespaces Signal-Rausch-Verh\"altnis, bestimmt mit einer Ru-106-Quelle. 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+\newlabel{fig:Mi26-fakehit-STD-HR15}{{A.10}{172}{Fehltrefferrate eines hochohmigen und Standard MIMOSA-26}{figure.caption.123}{}} \@setckpt{Anhang}{ \setcounter{page}{173} \setcounter{equation}{0} @@ -81,6 +81,6 @@ \setcounter{pp@next@reset}{0} \setcounter{Item}{6} \setcounter{Hfootnote}{11} -\setcounter{bookmark@seq@number}{134} +\setcounter{bookmark@seq@number}{133} \setcounter{section@level}{2} } diff --git a/Doering-PHD-Thesis/Ausblick.aux b/Doering-PHD-Thesis/Ausblick.aux index 1e6305c..7d09c3b 100755 --- a/Doering-PHD-Thesis/Ausblick.aux +++ b/Doering-PHD-Thesis/Ausblick.aux @@ -40,6 +40,6 @@ \setcounter{pp@next@reset}{0} \setcounter{Item}{6} \setcounter{Hfootnote}{11} -\setcounter{bookmark@seq@number}{120} +\setcounter{bookmark@seq@number}{119} \setcounter{section@level}{1} } diff --git a/Doering-PHD-Thesis/Auswertung.aux b/Doering-PHD-Thesis/Auswertung.aux index cd5af97..e61d3e0 100755 --- a/Doering-PHD-Thesis/Auswertung.aux +++ b/Doering-PHD-Thesis/Auswertung.aux @@ -117,6 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b/Doering-PHD-Thesis/Auswertung.tex @@ -325,6 +325,7 @@ Abbildung \ref{fig:Mi18-20-S-N} zeigt das Signal-zu-Rauschen bei $T =-3~{}^{\cir Zwar existiert ebenfalls eine Ordnung mit dem Pixelpitch, allerdings ist der Vorteil eines kleineren Pixelpitches geringer. Der dominierende Faktor ist das für bestrahlte Sensoren stark ansteigende Schrotrauschen, was nach Abbildung \ref{fig:Mi18-noiseAllmatrix} nicht besonders vom Pixelpitch abhängt. Sowohl das ungenügende Signal-zu-Rauschen als auch die Verfälschung des Fe-55-Spektrums und das massive Auftreten von Fehltreffern nach einer Bestrahlung $\gtrsim 10^{14}~\rm n_{eq}/cm^2$ sind auf das ansteigende Rauschen zurückzuführen. Schlussfolgernd ist das Rauschen bei nur moderat gekühlter Sensoren der limitierende Faktor, so dass sich ohne weitere Rauschunterdrückung wie beispielsweise eine kürzere Integrationszeit eine maximale Strahlenhärte von $3\cdot 10^{13}~\rm n_{eq}/cm^2$ ergibt, welche allerdings ausreichend ist.\newline \section{Strahlenhärte des Prototypsensors für CBM} +\label{MIMOSA-26} \begin{figure} \centering \includegraphics[width=0.85\textwidth]{BilderHR/Mi26-spektrum-bestrahlt.pdf} diff --git a/Doering-PHD-Thesis/BilderMi32/Mi18Mi32Mi34Noisevergleich.pdf b/Doering-PHD-Thesis/BilderMi32/Mi18Mi32Mi34Noisevergleich.pdf index eab38ee..106e190 100755 Binary files a/Doering-PHD-Thesis/BilderMi32/Mi18Mi32Mi34Noisevergleich.pdf and b/Doering-PHD-Thesis/BilderMi32/Mi18Mi32Mi34Noisevergleich.pdf differ diff --git a/Doering-PHD-Thesis/BilderMi32/Mi32_Beamtest.pdf b/Doering-PHD-Thesis/BilderMi32/Mi32_Beamtest.pdf index 9936dc5..13b9fd0 100755 Binary files a/Doering-PHD-Thesis/BilderMi32/Mi32_Beamtest.pdf 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\setcounter{section@level}{1} } diff --git a/Doering-PHD-Thesis/Mi32.tex b/Doering-PHD-Thesis/Mi32.tex index 8e9a0fd..0f92c1d 100755 --- a/Doering-PHD-Thesis/Mi32.tex +++ b/Doering-PHD-Thesis/Mi32.tex @@ -1,30 +1,81 @@ \chapter{CMOS sensors im 0.18mu Prozess \today} \section{Einführung} -CMOS Monolithic Active Pixel Sensoren werden in konventionellen Industrieprozesse hergestellt. Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von 0.35mum produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in mum angibt. Die Sensoren haben aufgrund der konsekutiven Auslese eine Integrationszeit von einigen 100 mus bis wenige mus. Der für die Anwendung in Strahlteleskope optimierte MIMSOA-26 (siehe Kapitel XXX) erreicht dank massiv zeilenparalleler Auslese als großflächiger Sensor eine Integrationszeit 115mus. Dies reicht für den Vertexdetektor für NA-61, allerdings nicht für CBM und ALICE, die für ihre Physikziele eine wesentlich höhere Kollisionsrate benötigen, so dass es zur Überlagerung von mehreren Kollisionen (Pile-Up) im Detektor kommt. Zwar kann aufgrund der hohen Granulariät und effizienter Spurrekonstruktionsalgorithmen ein gewisser Pile-Up toleriert werden, allerdings sollte die Zahl der Kollisionen pro Integrationszeit nicht zu groß werden. Dies ist einer der limitierende Faktoren des gesamten Experimentes. Eine kürzere Integrationszeit der Sensoren ermöglicht eine höhere Kollisionsrate und damit bessere Statistik. Dies ist allerdings nicht mit den bisherigem AMS-0.35-Prozess möglich. Vor kurzem wurde ein neuer Industrieprozess verfügbar, der es ermöglicht Sensoren mit einer kleineren Strukturengröße von 0.18mum herzustellen. Diese Sensoren werden analog im Folgenden als TOWER-0.18 bezeichnet. Die kleinere Strukturengröße ermöglicht komplexere In-Pixelschaltungen und damit kürzere Integrationszeiten von wenigen 10 mus auch für großflächige Sensoren. Für den MAPS-Sensor MISTRAL für CBM und ALICE wird eine Integrationszeit von 30mus angestrebt, was einen Faktor 3 schneller ist als MIMOSA-26.\newline +CMOS Monolithic Active Pixel Sensoren werden in konventionellen Industrieprozesse hergestellt. Dies ermöglicht eine sehr preisgünstige Produktion, hat allerdings den Nachteil auf die Möglichkeiten beschränkt zu sein, die die Industrie anbietet. Bis 2012 wurden die Sensoren hauptsächlich in einem Prozess mit einer Strukturengröße von $0.35\mum$ produziert. Diese Sensoren werden im Folgenden mit AMS-0.35 abgekürzt. AMS bezeichnet dabei den Herstellungsprozess, während 0.35 die Strukturengröße in $\mum$ angibt. Die Sensoren haben aufgrund der konsekutiven Auslese eine Integrationszeit von einigen $100 \mus$ bis wenige ms. Der für die Anwendung in Strahlteleskope optimierte MIMSOA-26 (siehe Kapitel \ref{MIMOSA-26}) erreicht dank massiv zeilenparalleler Auslese als großflächiger Sensor eine Integrationszeit $115\mus$. Dies reicht für den Vertexdetektor für NA-61, allerdings nicht für CBM und ALICE, die für ihre Physikziele eine wesentlich höhere Kollisionsrate benötigen, so dass es zur Überlagerung von mehreren Kollisionen (Pile-Up) im Detektor kommt. Zwar kann aufgrund der hohen Granulariät und effizienter Spurrekonstruktionsalgorithmen ein gewisser Pile-Up toleriert werden, allerdings sollte die Zahl der Kollisionen pro Integrationszeit nicht zu groß werden. Dies ist einer der limitierende Faktoren des gesamten Experimentes. Eine kürzere Integrationszeit der Sensoren ermöglicht eine höhere Kollisionsrate und damit bessere Statistik. Dies ist allerdings nicht mit den bisherigem AMS-0.35-Prozess möglich. Vor kurzem wurde ein neuer Industrieprozess verfügbar, der es ermöglicht Sensoren mit einer kleineren Strukturengröße von $0.18\mum$ herzustellen. Diese Sensoren werden analog im Folgenden als TOWER-0.18 bezeichnet. Die kleinere Strukturengröße ermöglicht komplexere In-Pixelschaltungen und damit kürzere Integrationszeiten von wenigen $10\mus$ auch für großflächige Sensoren. Für den MAPS-Sensor MISTRAL für CBM und ALICE wird eine Integrationszeit von $30\mus$ angestrebt, was einen Faktor 3 schneller ist als MIMOSA-26.\newline Darüber hinaus wurde vermutet, dass aufgrund der kleineren Strukturengröße die ionisierenden Strahlenhärte höher ist. So sind die Oxidschichten dünner, so dass Löcher leichter durch den Tunneleffekt entweichen können. Weiterhin ermöglichen die kleineren Strukturen aufwändigere, abgeschlossene Transistorlayouts (ELT), die Leckstromkanäle unterbinden können und sich deshalb im AMS-0.35-Prozess als strahlenhärter erwiesen haben, allerdings zu viel Platz benötigten. Weiterhin bietet die kürzere Integrationszeit selbst den Vorteil, dass weniger Leckstromelektronen gesammelt werden und damit das Rauschen nach Bestrahlung weniger stark steigt.\newline -In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess hergestellte Sensoren mit einer Integrationszeit von 30mus die Strahlenhärteanforderungen von CBM und ALICE erfüllen. Dazu wurden mehrere Prototypsensoren MIMOSA-32, MIMOSA-32ter und MIMOSA-34 entwickelt und getestet. Jeder hat 32 Matrizen mit acht Spalten aus 64 Pixeln und unterschiedlichen Pixel- und Vorverstärkerlayouts. Das Ziel ist es die bestmögliche Konfiguration für die nächste Sensorgeneration auszuwählen. Die Integrationszeit beträgt 32mus und entspricht damit der Spezifikation von MISTRAL. Die Sensoren werden mit verschiedenen Wafern produziert, unter anderem auch in hochohmigen Wafern bis zu einer Resistivität von 6kOmegacm um die Vorteile in Bezug auf nicht-ionisierende Strahlenhärte zu erhalten bzw. zu erweitern. \newline +In dieser Arbeit soll nachgewiesen werden, dass im Tower-0.18 CMOS-Prozess hergestellte Sensoren mit einer Integrationszeit von $30\mus$ die Strahlenhärteanforderungen von CBM und ALICE erfüllen. Dazu wurden mehrere Prototypsensoren MIMOSA-32, MIMOSA-32ter und MIMOSA-34 entwickelt und getestet. Jeder hat 32 Matrizen mit acht Spalten aus 64 Pixeln und unterschiedlichen Pixel- und Vorverstärkerlayouts. Das Ziel ist es die bestmögliche Konfiguration für die nächste Sensorgeneration auszuwählen. Die Integrationszeit beträgt $32\mus$ und entspricht damit der Spezifikation von MISTRAL. Die Sensoren werden mit verschiedenen Wafern produziert, unter anderem auch in hochohmigen Wafern bis zu einer Resistivität von 6kOmegacm um die Vorteile in Bezug auf nicht-ionisierende Strahlenhärte zu erhalten bzw. zu erweitern. \newline \section{Rauschverhalten} \begin{figure} \centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_NoisevergleichMi18AHRA2.pdf} - \caption[XXX]{XXX} + \includegraphics[width=1\textwidth]{BilderMi32/Mi18Mi32Mi34Noisevergleich.pdf} + \caption[Rauschverteilung von Sensoren im TOWER-0.18 und AMS-0.35 im Vergleich]{Rauschverteilung von Sensoren im TOWER-0.18 und AMS-0.35 im Vergleich} \label{fig:noiseVergleichMi32Mi18} \end{figure} -Erste Tests mit MIMOSA-32 zeigten ein sehr hohes Rauschen. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt die Rauschverteilung der Pixel. Verglichen wird MIMOSA-32-P2 und MIMOSA-32-P5 (TOWER-0.18) mit MIMOSA-18AHR-A2 (AMS-0.35). Der Mittelwert der Verteilung von TOWER-0.18 liegt um 20e, für AMS-0.35 dagegen um 12e. Das mittlere Rauschen hat sich dadurch nahezu verdoppelt. Allerdings verschlechtert sich nicht nur das mittlere Rauschen, auch der Schwanz aus Pixeln mit hohen Rauschen vergrößert sich deutlich. Einzelne Pixel von MIMOSA-32-P2 haben ein Rauschen von >50e, während kein Pixel von MIMOSA-18AHR ein Rauschen >26e hat. Dies ist bemerkenswert, hat MIMOSA-18AHR schließlich mit 96*96 im Vergleich zu MIMOSA-32 mit 8*64 eine 18mal bessere Pixelstatistik.\newline -Einen ersten Hinweis auf den Ursprung dieses hohen Rauschens bringt der Vergleich mit MIMOSA-32-P5. Dieser hat ein kleineres Quellfolgertor (Source follower gate) als MIMOSA-32-P2. Es wird ein noch stärker ausgeprägter Schwanz beobachtet. Einzelne Pixel haben ein Rauschen von bis zu 85e. +Erste Tests mit MIMOSA-32 zeigten ein sehr hohes Rauschen. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt die Rauschverteilung der Pixel. Verglichen wird MIMOSA-32-P2ter und MIMOSA-32ter-P5 (TOWER-0.18) mit MIMOSA-18AHR-A2 (AMS-0.35). Der Mittelwert der Verteilung von TOWER-0.18 liegt um 20e, für AMS-0.35 dagegen um 12e. Das mittlere Rauschen hat sich dadurch nahezu verdoppelt. Allerdings verschlechtert sich nicht nur das mittlere Rauschen, auch der Schwanz aus Pixeln mit hohen Rauschen vergrößert sich deutlich. Einzelne Pixel von MIMOSA-32ter-P2 haben ein Rauschen von $>50\e$, während kein Pixel von MIMOSA-18AHR ein Rauschen $>26\e$ hat. Dies ist bemerkenswert, hat MIMOSA-18AHR schließlich mit 96*96 im Vergleich zu MIMOSA-32 mit 8*64 eine 18mal größere Pixelstatistik.\newline +Einen ersten Hinweis auf den Ursprung dieses hohen Rauschens bringt der Vergleich mit MIMOSA-32ter-P5. Dieser hat ein kleineres Quellfolgertor (Source follower gate) als MIMOSA-32ter-P2. Es wird ein noch stärker ausgeprägter Schwanz beobachtet. Einzelne Pixel haben ein Rauschen von bis zu 85e. \begin{figure} \centering \includegraphics[width=1\textwidth]{BilderMi32/Mi32_Noise_TransSize.pdf} - \caption[XXX]{XXX} - + \caption[Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur]{Rauschen als Funktion der abnehmenden Transistorgröße und Temperatur} + \label{Mi32_Noise_TransSize} +\end{figure} +\begin{table}[tbp] + +\centering +\begin{tabular}{|ccccc|} +\hline +Width &Length &Measured noise & Gain & ENC \\ +$[\mu m]$ &$[\mu m]$ &$[mV] \pm 10\% $ & $[e/mV]\pm 5\%$ & $[e]\pm 10\%$\\ +\hline +%ELT & & 1.85 & 12.1 & 22.4\\ +1.5 & 0.2 & 1.87 & 11.1 & 20.8 \\ +0.9 & 0.2 & 2.15 & 10.5 & 22.5 \\ +0.5 & 0.2 & 2.41 & 10.1 & 24.3 \\ +\hline +Smaller gate means & & +25\% & +10\% & +20\% \\ +\hline +\end{tabular} +\caption{Noise and gain in dependence of the source follower gate size.} +\label{tab:Mi32-1-f-noise-table} +\end{table} +\begin{figure} +\centering + \includegraphics[width=1\textwidth]{BilderMi32/Mi32_FakehitsVar_TransSize.pdf} + \caption[XXX]{Fehltrefferrate in Abhängigkeit der abnehmenden Transistorgröße (variable Schwelle)} + \label{fig:Mi32fakehitVarTransistor} \end{figure} -Ursprünglich wurden Pixel mit kleinerem Quellfolgertor implementiert um die Verstärkung des Transistors zu vergrößern. Diese Abhängigkeit wird in Tabelle XXX gezeigt. Die Verstärkung verbessert sich tatsächlich um $XX\%$. Allerdings muss abgewogen werden, ob diese Verbesserung der Verstärkung nicht mit Nachteilen im Rauschen erkauft wird. Denn der Anstieg des Rauschens beträgt nach Tabelle XXX $XX\%$. Das Rauschen steigt durch die Verwendung des kleineren Quellfolgertors damit stärker als die Verstärkung. Entsprechend erhöht sich das ENC. Ein kleineres Quellfolgertor bringt damit keine Vorteile in Bezug auf das Rauschen der Sensoren. \newline -Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung XXX den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von -35C bis +20C. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Unerwarteterweise steigt das Rauschen mit Senkung der Betriebstemperatur leicht an. Dies ist gegen die Erwartung von thermischen Rauschen und RTS-Rauschen, welches beides durch eine niedrigere Temperatur unterdrückt werden konnte ZITAT. -Abbildung XXX zeigt dazu die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg des Rauschens ausgleicht. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht bei niedrigerer Betriebstemperatur, sondern steigt sogar leicht an. Die Fehltrefferrate eines bei -35C betriebenen Sensors ist ebenfalls systematisch höher als die eines bei +20C betriebenen Sensors. \newline -In der Anwendung als Vertexdetektor kann die Schwelle nicht an das Rauschen eines jeden einzelnen Pixels angepasst werden, sondern es wird eine allgemeine Schwelle für alle Pixel angelegt. Abbildung XXX zeigt die zu erwartende Fehltrefferrate als Funktion der anlegten Schwelle für verschiedene Quellfolgertorgrößen und Abbildung XXX für verschiedene Temperaturen. Auch hier zeigt sich, Sensoren mit einem kleineren Quellfolgertor sowie betrieben bei niedrigerer Temperatur haben, abhängig von der angelegten Schwelle, eine höhere Fehltrefferrate. Der Effekt ist also nicht zu vernachlässigen.\newline +\begin{figure} +\centering + \includegraphics[width=1\textwidth]{BilderMi32/Mi32_TransSize.pdf} + \caption[XXX]{Fehltrefferrate in Abhängigkeit der abnehmenden Transistorgröße} + \label{fig:Mi32fakehitTransistor} +\end{figure} +\begin{figure} +\centering + \includegraphics[width=1\textwidth]{BilderMi32/Mi32_TransSizeT.pdf} + \caption[XXX]{Fehltrefferrate für eine Matrix mit kleiner Transistorgröße in Abhängigkeit der Temperatur} + \label{fig:Mi32fakehitTemperatur} +\end{figure} +Ursprünglich wurden Pixel mit kleinerem Quellfolgertor implementiert um die Verstärkung des Transistors zu vergrößern. In AMS-0.35 bedeutete ein kleinerer Transistor eine größere Verstärkung damit ein kleineres ENC. Diese Abhängigkeit wird für im TOWER-0.18-Prozess hergestellten MIMOSA-32ter in Tabelle \ref{tab:Mi32-1-f-noise-table} überprüft. Die Verstärkung verbessert sich auch hier durch den kleineren Transistor um $10\%$. Allerdings muss abgewogen werden, ob diese Verbesserung der Verstärkung nicht mit Nachteilen im Rauschen erkauft wird. Denn der Anstieg des Rauschens in $[mV]$ beträgt $25\%$. Das Rauschen steigt durch die Verwendung des kleineren Quellfolgertors damit stärker als die Verstärkung. Entsprechend erhöht sich das ENC um $20\%$. Ein kleineres Quellfolgertor bringt damit für Sensoren im TOWER-0.18-Prozess keine Vorteile in Bezug auf das Rauschen der Sensoren. \newline +Um den Ursprung dieses Effektes auf die Spur zu kommen, zeigt Abbildung \ref{Mi32_Noise_TransSize} den Mittelwert des Rauschens in mV als Funktion der Größe des Quellfolgertors über einen weiten Temperaturbereich von $-35\C$ bis $+20\C$. Das Rauschen steigt mit abnehmender Quellfolgertorgröße an. Unerwarteterweise ist das Rauschen bei $+20\C$ am geringsten. Dies ist gegen die Erwartung von thermischen Rauschen und RTS-Rauschen, welches beides durch eine niedrigere Temperatur unterdrückt werden konnte \cite{DoeringMaster, Doe08}. +Abbildung \ref{fig:Mi32fakehitVarTransistor} zeigt ergänzend die Fehltrefferrate. Angewendet wurde eine variable Schwelle, die einen Anstieg der Fehltrefferrate durch einen Anstieg des Rauschens ausgleicht. Beobachtet wird trotzdem ein Anstieg der Fehltrefferrate über mehrere Größenordnungen. Je kleiner die Transistorgröße, desto größer ist die Fehltrefferrate. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht durch Verringern der Betriebstemperatur, sondern erhöht sich.\newline +In der Anwendung als Vertexdetektor kann die Schwelle nicht an das Rauschen eines jeden einzelnen Pixels angepasst werden, sondern es wird eine allgemeine Schwelle für alle Pixel angelegt. Abbildung \ref{fig:Mi32fakehitTransistor} zeigt die zu erwartende Fehltrefferrate als Funktion der anlegten Schwelle für verschiedene Quellfolgertorgrößen und Abbildung \ref{fig:Mi32fakehitTemperatur} für verschiedene Temperaturen. Auch hier zeigt sich, Sensoren mit einem kleineren Quellfolgertor sowie betrieben bei niedrigerer Temperatur haben, abhängig von der angelegten Schwelle, eine höhere Fehltrefferrate. Entgegen früherer Beobachtungen \cite{Doe08} verringert sich die Fehltrefferrate nicht durch Verringern der Betriebstemperatur nicht systematisch, sondern ist bei $-20\C$ am höchsten. Da der Mikrovertexdetektor bei dieser Temperatur betrieben werden soll, ist hier das Interesse geweckt.\newline Eine mögliche Erklärung wird in XXX beschrieben. Auch dort wurde die Transistortorgröße variiert und eine Abhängigkeit vom Rauschen festgestellt. Dieses Rauschen wurde als 1/f-Rauschen identifiziert, was naheliegenderweise auch hier der Grund für das hohe Rauschen sein sollte. -Die gleiche Signatur wird auch in ausgewählten Pixeln beobachtet (siehe Abbildung XXX). Es sind drei äquidistante Stufen sichtbar. Noch deutlicher wird die Signatur im Histogramm (Abbildung XXX). Studiert man die Temperaturabhängigkeit, so nimmt die Breite des CDS-Signals ab, wie man es von thermischen Rauschen erwarten würde, allerdings verstärkt sich die Signatur gerade bei der niedrigsten erreichbaren Temperatur von -35C. Dies ist der Grund, wieso in den obigen Messungen der nicht erwartete Anstieg des Rauschens mit Senkung der Temperatur beobachtet wurde.\newline -Als Konsequenz aus diesen Beobachtungen wurde die nächste Sensorgeneration MIMOSA-34 mit größeren Transistortoren ausgestattet. Abbildung XXX zeigt das Rauschen einer ausgewählten Matrix. Das Rauschen ist wesentlich geringer als bei MIMOSA-32 und MIMOSA-32ter und beträgt 12e, was mit MIMOSA-18AHR wieder vergleichbar ist. Die Rauschverteilung ist allerdings immer noch sehr viel breiter, was dafür spricht, dass die Pixelmatrix inhomogen ist. Hier ist noch Raum für Verbesserungen. Insbesondere interessant ist, dass ein Teil der Pixel ein sehr geringes Rauschen von <10 aufweist, was im AMS-0.35-Prozess nicht erreicht werden konnte. Wenn es gelinge, die Eigenschaften dieser sehr rauscharmen Pixel zu verstehen, könnte man einen entsprechend homogen rauscharmen Sensor mit <10e Rauschen entwickeln. +\begin{figure} +\begin{minipage}{8cm} +\includegraphics[width=8cm]{BilderMi32/Mi32-1-f-noise-CDS-Signal.pdf} +\caption{CDS-Signal of a chosen "`noisy"' pixel.} +\label{fig:Mi32-1-f-noise-CDS-Signal} +\end{minipage} +\begin{minipage}{8cm} +\hspace{0.2cm} +\includegraphics[width=8cm]{BilderMi32/Mi32-1-f-noise-Distribution.pdf} +\caption{Histogram of the CDS-Signal (temperature)} +\label{fig:Mi32-1-f-noise-Distribution} +\end{minipage} + +\end{figure} +Die gleiche Signatur wird auch in ausgewählten Pixeln beobachtet (siehe Abbildung \ref{fig:Mi32-1-f-noise-CDS-Signal}). Es sind drei äquidistante Stufen sichtbar. Noch deutlicher wird die Signatur im Histogramm (Abbildung \ref{fig:Mi32-1-f-noise-Distribution}). Studiert man die Temperaturabhängigkeit, so nimmt die Breite des CDS-Signals ab, wie man es von thermischen Rauschen erwarten würde, allerdings verstärkt sich die Signatur gerade bei der niedrigsten erreichbaren Temperatur von $-35\C$. Dies ist der Grund, wieso in den obigen Messungen der nicht erwartete Anstieg des Rauschens mit Senkung der Temperatur beobachtet wurde.\newline +Als Konsequenz aus diesen Beobachtungen wurde die nächste Sensorgeneration MIMOSA-34 mit größeren Transistortoren ausgestattet. Abbildung \ref{fig:noiseVergleichMi32Mi18} zeigt das Rauschen einer ausgewählten Matrix. Das Rauschen ist wesentlich geringer als bei MIMOSA-32 und MIMOSA-32ter und beträgt 12e, was mit MIMOSA-18AHR wieder vergleichbar ist. Die Rauschverteilung ist allerdings immer noch sehr viel breiter, was dafür spricht, dass die Pixelmatrix inhomogen ist. Hier ist noch Raum für Verbesserungen. Insbesondere interessant ist, dass ein Teil der Pixel ein sehr geringes Rauschen von $<10\e$ aufweist, was im AMS-0.35-Prozess nicht erreicht werden konnte. Wenn es gelinge, die Eigenschaften dieser sehr rauscharmen Pixel zu verstehen, könnte man einen entsprechend homogen rauscharmen Sensor mit $<10\e$ Rauschen entwickeln. \section{Ionisierende Strahlenhärte} Von den neuen Sensoren wurde eine bessere ionisierende Strahlenhärte erwartet. Bei unbestrahlten Sensoren wurde allerdings bereits ein höheres Rauschen festgestellt. Die Fragestellung ist, wie sich das Rauschen von TOWER-0.18 nach ionisierender Bestrahlung verhält. Steigt das Rauschen eines TOWER-0.18 weniger stark mit der Bestrahlungsdosis und ist das Rauschen deshalb ab einer bestimmten Bestrahlungsdosis besser als vergleichbare AMS-0.35?\newline Das Rauschen von AMS-0.35 steigt nach \cite{Dev07} wie in Abbildung XXX gezeigt nach einer Dosis von 1Mrad an. Da sich die Verstärkung nicht ändert, steigt auch das gemessene Rauschen in mV an. \newline @@ -53,26 +104,7 @@ Um die Leistungsf \end{figure} \clearpage -\section{1/f-Noise} -\begin{figure} -\centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_TransSize.pdf} - \caption[XXX]{XXX} - -\end{figure} -\begin{figure} -\centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_TransSizeT.pdf} - \caption[XXX]{XXX} - -\end{figure} -\begin{figure} -\centering - \includegraphics[width=1\textwidth]{BilderMi32/Mi32_NoiseDis_TransSize.pdf} - \caption[XXX]{XXX} - -\end{figure} -\clearpage + \section{PMOS-Transistor} \begin{figure} \centering diff --git a/Doering-PHD-Thesis/PHDthesis.aux b/Doering-PHD-Thesis/PHDthesis.aux index 895be9e..5a98df2 100755 --- a/Doering-PHD-Thesis/PHDthesis.aux +++ b/Doering-PHD-Thesis/PHDthesis.aux @@ -42,7 +42,7 @@ \bibcite{Amar07}{AY07} \bibcite{CharmSummaryPaper}{B{$^{+}$}11} \bibcite{Alex08}{B\"ud08} -\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.122}} +\@writefile{toc}{\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.124}} \bibcite{BlumeKP4}{Blu12} \bibcite{teststandsystem}{C{$^{+}$}04} \bibcite{CMS}{C{$^{+}$}11} diff --git a/Doering-PHD-Thesis/PHDthesis.lof b/Doering-PHD-Thesis/PHDthesis.lof index e3a4cf3..ea85bf5 100755 --- a/Doering-PHD-Thesis/PHDthesis.lof +++ b/Doering-PHD-Thesis/PHDthesis.lof @@ -122,41 +122,43 @@ \contentsline {subfigure}{\numberline {(b)}{\ignorespaces {Sammelpeak}}}{126}{subfigure.31.2} \contentsline {subfigure}{\numberline {(c)}{\ignorespaces {Verschiebung des Kalibrationspeaks}}}{126}{subfigure.31.3} \addvspace {10\p@ } -\contentsline {figure}{\numberline {6.1}{\ignorespaces XXX}}{131}{figure.caption.88} -\contentsline {figure}{\numberline {6.2}{\ignorespaces XXX}}{132}{figure.caption.89} -\contentsline {figure}{\numberline {6.3}{\ignorespaces XXX}}{135}{figure.caption.90} -\contentsline {figure}{\numberline {6.4}{\ignorespaces 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So-wohl der Ka-li-bra-ti- [] -Underfull \hbox (badness 10000) in paragraph at lines 404--404 +Underfull \hbox (badness 10000) in paragraph at lines 405--405 \T1/ptm/m/n/12 (+20) ver-schie-ben sich zu nied-ri-ge-ren [] -Underfull \hbox (badness 10000) in paragraph at lines 404--404 +Underfull \hbox (badness 10000) in paragraph at lines 405--405 \T1/ptm/m/n/12 (+20) zu ei-nem leich-ten Ver-schie-bung [] -Underfull \hbox (badness 2735) in paragraph at lines 404--404 +Underfull \hbox (badness 2735) in paragraph at lines 405--405 \T1/ptm/m/n/12 (+20) des Ka-li-bra-ti-onspeaks zu hö-he-ren [] -Overfull \hbox (3.0pt too wide) in paragraph at lines 397--407 +Overfull \hbox (3.0pt too wide) in paragraph at lines 398--408 [][] [] @@ -2463,7 +2463,7 @@ aps/DennisDoering/root/Macros/GitMakros/radhard/Doering-PHD-Thesis/BilderHR/Mi2 6-xray-spektrum-collpeak.pdf, page is rotated 90 degrees> ] -Overfull \hbox (12.90773pt too wide) in paragraph at lines 417--418 +Overfull \hbox (12.90773pt too wide) in paragraph at lines 418--419 \T1/ptm/m/n/12 (-20) MIMOSA-26 ist ur-sprüng-lich als Re-fe-renz-sen-sor in Str ahl-te-le-sko-pen ent-wi-ckelt wor-den. 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Entnommen aus MIMOSA26PAPER.\relax }}{160}{table.caption.116} +\contentsline {table}{\numberline {A.1}{\ignorespaces Vollst\"andige Auflistung der zu den Abbildungen geh\"orenden Messparametern}}{158}{table.caption.112} +\contentsline {table}{\numberline {A.2}{\ignorespaces Signal-Rausch-Verh\"altnis, bestimmt mit einer Ru-106-Quelle. Entnommen aus MIMOSA26PAPER.\relax }}{160}{table.caption.118} diff --git a/Doering-PHD-Thesis/PHDthesis.out b/Doering-PHD-Thesis/PHDthesis.out index 2357e15..abc4f3c 100755 --- a/Doering-PHD-Thesis/PHDthesis.out +++ b/Doering-PHD-Thesis/PHDthesis.out @@ -110,26 +110,25 @@ \BOOKMARK [1][-]{section.6.3}{Ionisierende Strahlenh\344rte}{chapter.6}% 110 \BOOKMARK [2][-]{subsection.6.3.1}{Rauschverhalten nach ionisierender Bestrahlung}{section.6.3}% 111 \BOOKMARK [2][-]{subsection.6.3.2}{Einfluss von Integrationszeit}{section.6.3}% 112 -\BOOKMARK [1][-]{section.6.4}{1/f-Noise}{chapter.6}% 113 -\BOOKMARK [1][-]{section.6.5}{PMOS-Transistor}{chapter.6}% 114 -\BOOKMARK [1][-]{section.6.6}{Breite Calpeak Pixeldistribution}{chapter.6}% 115 -\BOOKMARK [1][-]{section.6.7}{Neutronbestrahlung}{chapter.6}% 116 -\BOOKMARK [1][-]{section.6.8}{PreamplifierPixel}{chapter.6}% 117 -\BOOKMARK [1][-]{section.6.9}{Vergleich P25 und P26}{chapter.6}% 118 -\BOOKMARK [1][-]{section.6.10}{Beamtest}{chapter.6}% 119 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[4][-]{paragraph.A.1.6.1.2}{Einfluss der Diodenoberfl\344che}{subsubsection.A.1.6.1}% 132 -\BOOKMARK [3][-]{subsubsection.A.1.6.2}{Zusammenfassung}{subsection.A.1.6}% 133 -\BOOKMARK [2][-]{subsection.A.1.7}{Fehltreffer}{section.A.1}% 134 -\BOOKMARK [0][-]{appendix*.122}{Literaturverzeichnis}{}% 135 +\BOOKMARK [1][-]{section.6.4}{PMOS-Transistor}{chapter.6}% 113 +\BOOKMARK [1][-]{section.6.5}{Breite Calpeak Pixeldistribution}{chapter.6}% 114 +\BOOKMARK [1][-]{section.6.6}{Neutronbestrahlung}{chapter.6}% 115 +\BOOKMARK [1][-]{section.6.7}{PreamplifierPixel}{chapter.6}% 116 +\BOOKMARK [1][-]{section.6.8}{Vergleich P25 und P26}{chapter.6}% 117 +\BOOKMARK [1][-]{section.6.9}{Beamtest}{chapter.6}% 118 +\BOOKMARK [0][-]{chapter.7}{Zusammenfassung der Doktorarbeit}{}% 119 +\BOOKMARK [0][-]{appendix.A}{Anhang}{}% 120 +\BOOKMARK [1][-]{section.A.1}{Parameter und Laufnummern der gezeigten Messdaten}{appendix.A}% 121 +\BOOKMARK [2][-]{subsection.A.1.1}{Rauschen}{section.A.1}% 122 +\BOOKMARK [2][-]{subsection.A.1.2}{Einfluss des Pixelpitches}{section.A.1}% 123 +\BOOKMARK [2][-]{subsection.A.1.3}{Einfluss der Dicke der Epitaxieschicht}{section.A.1}% 124 +\BOOKMARK [3][-]{subsubsection.A.1.3.1}{Rauschen}{subsection.A.1.3}% 125 +\BOOKMARK [2][-]{subsection.A.1.4}{Cluster}{section.A.1}% 126 +\BOOKMARK [2][-]{subsection.A.1.5}{Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{section.A.1}% 127 +\BOOKMARK [2][-]{subsection.A.1.6}{Einfluss der Integrationszeit}{section.A.1}% 128 +\BOOKMARK [3][-]{subsubsection.A.1.6.1}{Differenzierungen}{subsection.A.1.6}% 129 +\BOOKMARK [4][-]{figure.caption.122}{Einfluss des Pixelpitches}{subsubsection.A.1.6.1}% 130 +\BOOKMARK [4][-]{paragraph.A.1.6.1.2}{Einfluss der Diodenoberfl\344che}{subsubsection.A.1.6.1}% 131 +\BOOKMARK [3][-]{subsubsection.A.1.6.2}{Zusammenfassung}{subsection.A.1.6}% 132 +\BOOKMARK [2][-]{subsection.A.1.7}{Fehltreffer}{section.A.1}% 133 +\BOOKMARK [0][-]{appendix*.124}{Literaturverzeichnis}{}% 134 diff --git 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+\newcommand{\neqcm}{~\rm n_{eq}/cm^2} +\newcommand{\Mrad}{~\rm Mrad} +\newcommand{\C}{~{}^{\circ}\rm C} +\newcommand{\e}{~\rm e} \newlength{\mylinewidth} diff --git a/Doering-PHD-Thesis/PHDthesis.toc b/Doering-PHD-Thesis/PHDthesis.toc index e108e72..8631757 100755 --- a/Doering-PHD-Thesis/PHDthesis.toc +++ b/Doering-PHD-Thesis/PHDthesis.toc @@ -106,16 +106,15 @@ \contentsline {chapter}{\numberline {6}CMOS sensors im 0.18mu Prozess 23.~September 2013}{129}{chapter.6} \contentsline {section}{\numberline {6.1}Einf\"uhrung}{129}{section.6.1} \contentsline {section}{\numberline {6.2}Rauschverhalten}{130}{section.6.2} -\contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{134}{section.6.3} -\contentsline {subsection}{\numberline {6.3.1}Rauschverhalten nach ionisierender Bestrahlung}{134}{subsection.6.3.1} -\contentsline {subsection}{\numberline {6.3.2}Einfluss von Integrationszeit}{134}{subsection.6.3.2} -\contentsline {section}{\numberline {6.4}1/f-Noise}{138}{section.6.4} -\contentsline {section}{\numberline {6.5}PMOS-Transistor}{141}{section.6.5} -\contentsline {section}{\numberline {6.6}Breite Calpeak Pixeldistribution}{144}{section.6.6} -\contentsline {section}{\numberline {6.7}Neutronbestrahlung}{144}{section.6.7} -\contentsline {section}{\numberline {6.8}PreamplifierPixel}{148}{section.6.8} -\contentsline {section}{\numberline {6.9}Vergleich P25 und P26}{153}{section.6.9} -\contentsline {section}{\numberline {6.10}Beamtest}{155}{section.6.10} +\contentsline {section}{\numberline {6.3}Ionisierende Strahlenh\"arte}{137}{section.6.3} +\contentsline {subsection}{\numberline {6.3.1}Rauschverhalten nach ionisierender Bestrahlung}{138}{subsection.6.3.1} +\contentsline {subsection}{\numberline {6.3.2}Einfluss von Integrationszeit}{138}{subsection.6.3.2} +\contentsline {section}{\numberline {6.4}PMOS-Transistor}{141}{section.6.4} +\contentsline {section}{\numberline {6.5}Breite Calpeak Pixeldistribution}{144}{section.6.5} +\contentsline {section}{\numberline {6.6}Neutronbestrahlung}{144}{section.6.6} +\contentsline {section}{\numberline {6.7}PreamplifierPixel}{148}{section.6.7} +\contentsline {section}{\numberline {6.8}Vergleich P25 und P26}{153}{section.6.8} +\contentsline {section}{\numberline {6.9}Beamtest}{155}{section.6.9} \contentsline {chapter}{\numberline {7}Zusammenfassung der Doktorarbeit}{156}{chapter.7} \contentsline {chapter}{\numberline {A}Anhang}{157}{appendix.A} \contentsline {section}{\numberline {A.1}Parameter und Laufnummern der gezeigten Messdaten}{157}{section.A.1} @@ -127,8 +126,8 @@ \contentsline {subsection}{\numberline {A.1.5}Rauschen von niedrig- und hochohmiger Epi und Schichtdicke}{169}{subsection.A.1.5} \contentsline {subsection}{\numberline {A.1.6}Einfluss der Integrationszeit}{170}{subsection.A.1.6} \contentsline {subsubsection}{\numberline {A.1.6.1}Differenzierungen}{170}{subsubsection.A.1.6.1} -\contentsline {paragraph}{\numberline {A.1.6.1.1}Einfluss des Pixelpitches}{170}{figure.caption.120} +\contentsline {paragraph}{\numberline {A.1.6.1.1}Einfluss des Pixelpitches}{170}{figure.caption.122} \contentsline {paragraph}{\numberline {A.1.6.1.2}Einfluss der Diodenoberfl\"ache}{171}{paragraph.A.1.6.1.2} \contentsline {subsubsection}{\numberline {A.1.6.2}Zusammenfassung}{171}{subsubsection.A.1.6.2} \contentsline {subsection}{\numberline {A.1.7}Fehltreffer}{171}{subsection.A.1.7} -\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.122} +\contentsline {chapter}{Literaturverzeichnis}{173}{appendix*.124}